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    Laser chamber incorporating ceramic insulators coated with dielectric material
    1.
    发明公开
    Laser chamber incorporating ceramic insulators coated with dielectric material 有权
    Laserkammer mit keramischen Isolatoren，die mit dielektrischem材料beschichtet sind

    公开(公告)号：EP0963015A2

    公开(公告)日：1999-12-08

    申请号：EP99110581.8

    申请日：1999-06-01

    申请人： Cymer, Inc.

    发明人： Ishihara, Toshihiko ,  Morton, Richard G.

    IPC分类号： H01S3/03

    CPC分类号： H01S3/0305 ,  H01S3/225

    摘要： A coated ceramic insulator in a laser chamber that is exposed to a gaseous environment where impurities in the ceramic insulator are prevented from detrimentally contaminating the laser chamber by a high-purity insulating coating. The insulating coating prevents chemical interactions between the ceramic insulator and the gaseous environment. In particular, the coating prevents contamination, by impurities in the ceramic insulator, of the lasing gas.

    摘要翻译： 暴露于气体环境的激光室中的涂覆陶瓷绝缘体，其中防止陶瓷绝缘体中的杂质被高纯度绝缘涂层有害地污染激光室。 绝缘涂层防止陶瓷绝缘体与气体环境之间的化学相互作用。 特别地，涂层防止了由陶瓷绝缘体中的杂质污染的激光气体。

    Laser chamber incorporating ceramic insulators coated with dielectric material
    2.
    发明公开
    Laser chamber incorporating ceramic insulators coated with dielectric material 有权
    激光室与陶瓷绝缘体，其被涂覆有电介质材料

    公开(公告)号：EP0963015A3

    公开(公告)日：2001-03-14

    申请号：EP99110581.8

    申请日：1999-06-01

    申请人： Cymer, Inc.

    发明人： Ishihara, Toshihiko ,  Morton, Richard G.

    IPC分类号： H01S3/03

    CPC分类号： H01S3/0305 ,  H01S3/225

    摘要： A coated ceramic insulator in a laser chamber that is exposed to a gaseous environment where impurities in the ceramic insulator are prevented from detrimentally contaminating the laser chamber by a high-purity insulating coating. The insulating coating prevents chemical interactions between the ceramic insulator and the gaseous environment. In particular, the coating prevents contamination, by impurities in the ceramic insulator, of the lasing gas.