公开(公告)号：EP2381575A4

公开(公告)日：2018-03-28

申请号：EP09834925

申请日：2009-12-24

申请人： DAISHINKU CORP

发明人： KOHDA NAOKI ,  YOSHIOKA HIROKI

IPC分类号： H03H9/02 ,  H01L23/02 ,  H03H3/02

CPC分类号： H01L41/332 ,  B01D2325/02 ,  C23C8/40 ,  C23C12/00 ,  H01L23/3731 ,  H01L23/3732 ,  H01L23/3733 ,  H01L31/18 ,  H01L31/1804 ,  H01L41/23 ,  H01L41/25 ,  H01L41/29 ,  H01L41/33 ,  H01L2924/0002 ,  H03H3/02 ,  H03H9/0547 ,  H03H9/0552 ,  H03H9/1035 ,  H03H9/19 ,  H03H2003/045 ,  H03H2003/0457 ,  Y10T29/42 ,  H01L2924/00

摘要： A piezoelectric resonator device includes a piezoelectric resonator plate where an excitation electrode is formed, and an upper lid member and a lower lid member that hermetically seal the excitation electrode, the piezoelectric resonator plate having a joining region where the upper lid member is joined and a joining region where the lower lid member is joined, on front and back main surfaces, the upper lid member having a joining region on one main surface where the piezoelectric resonator plate is joined, and the lower lid member having a joining region on one main surface where the piezoelectric resonator plate is joined. A joining material is formed on each of the joining region of the piezoelectric resonator plate, the joining region of the upper lid member, and the joining region of the lower lid member. The joining region of the piezoelectric resonator plate and the joining region of the upper lid member are joined to each other via a joining material, and the joining region of the piezoelectric resonator plate and the joining region of the lower lid member are joined to each other via a joining material. At least one of a substrate of the joining region of the piezoelectric resonator plate, a substrate of the joining region of the upper lid member, and a substrate of the joining region of the lower lid member has a roughened surface.