MANUFACTURING METHOD OF FLUID CONTROL DEVICE
    3.
    发明公开
    MANUFACTURING METHOD OF FLUID CONTROL DEVICE 审中-公开
    流体控制装置的制造方法

    公开(公告)号:EP3290700A1

    公开(公告)日:2018-03-07

    申请号:EP17179905.9

    申请日:2017-07-06

    Inventor: HAN, Yung-Lung

    Abstract: A manufacturing method of a fluid control device (2) is provided. Firstly, a housing (26), a piezoelectric actuator (23) and a deformable substrate (20) are provided. The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21). A bulge (230c) is formed on the vibration plate (230). The flexible plate (22) includes a movable part (22a). Next, the flexible plate (22) and the communication plate (21) are stacked and coupled, and a preformed synchronous deformation process is implemented by applying at least one external force to outer portion of the deformable substrate (20) to form a preformed synchronously-deformed structure. Then, the housing (26), the piezoelectric actuator (23) and the deformable substrate (20) are sequentially stacked and coupled. The preformed synchronously-deformed structure is aligned with the bulge (230c) of the vibration plate (230). Consequently, a specified depth (δ) is defined between the movable part (22a) of the flexible plate (22) and the bulge (230c) of the vibration plate (230).

    Abstract translation: 提供了一种流体控制装置(2)的制造方法。 首先,提供壳体(26),压电致动器(23)和可变形衬底(20)。 压电致动器(23)包括压电元件(233)和振动板(230)。 可变形基板(20)包括柔性板(22)和连通板(21)。 在振动板(230)上形成凸起(230c)。 柔性板(22)包括可动部分(22a)。 接下来,柔性板(22)和连通板(21)被堆叠和连接,并且通过将至少一个外力施加到可变形基板(20)的外部部分以同步形成预成形件来执行预成形的同步变形处理 - 变形的结构。 然后,壳体(26),压电致动器(23)和可变形基板(20)顺序地堆叠并联接。 预先形成的同步变形结构与振动板(230)的凸起(230c)对齐。 因此,在可挠板(22)的可动部(22a)与振动板(230)的凸部(230c)之间形成规定的深度(δ)。

    Piezoaktor und Verfahren zum Herstellen eines Piezoaktors
    8.
    发明公开
    Piezoaktor und Verfahren zum Herstellen eines Piezoaktors 审中-公开
    压电致动器和制造压电致动器的方法

    公开(公告)号:EP2818686A1

    公开(公告)日:2014-12-31

    申请号:EP14172286.8

    申请日:2014-06-13

    Inventor: Cromme, Peter

    Abstract: Die Erfindung betrifft einen Piezoaktor (20) für eine von einem Medium umströmte Anordnung (10), mit mehreren Piezoelementen (16) und einem die mehreren Piezoelemente (16) umgebenden Schutzsystem (35), wobei das Schutzsystem (35) wenigstens eine Schicht (40) umfasst, die schädliche Bestandteile absorbierende Eigenschaften aufweist. Erfindungsgemäß ist es vorgesehen, dass die wenigstens Schicht (40) an der den mehreren Piezoelementen (16) zugewandten Seite eines die mehreren Piezoelementen (16) umgebenden Schutzelements angeordnet ist.

    Abstract translation: 本发明涉及一种用于具有多个压电元件(16)和包围所述保护系统(35)的多个压电元件(16)媒体装置(10)的流动围绕压电致动器(20),所述保护系统(35)的至少一个层(40 ),其具有的有害成分的吸收性能。 根据本发明,它提供了至少层(40)布置在面对所述多个周边保护构件的压电元件(16)的一侧,所述多个压电元件(16)。

    Piezoelectric/electrostrictive element and method of manufacturing the same
    9.
    发明授权
    Piezoelectric/electrostrictive element and method of manufacturing the same 有权
    一种压电/电致伸缩元件和过程及其制备

    公开(公告)号:EP2091091B1

    公开(公告)日:2014-05-28

    申请号:EP09250329.1

    申请日:2009-02-11

    CPC classification number: H01L41/0533 H01L41/23 Y10T29/42

    Abstract: A piezoelectric/electrostrictive element with improved moisture resistance while having less degradation in its piezoelectric/electrostrictive properties and a method of manufacturing such a piezoelectric/electrostrictive element are provided. A laminated vibrator (110) of a piezoelectric/electrostrictive element (10) has a structure in which an electrode film (112), a piezoelectric/electrostrictive film (114), another electrode film (116), another piezoelectric/electrostrictive film (118), and another electrode film (120) are laminated one above the other. In the manufacture of the piezoelectric/electrostrictive element (10), the laminated vibrator (100) and a counter electrode (162) are immersed in an electrodeposition coating fluid (164) containing an insulator coating component so that the electrodeposition coating fluid (164) is brought into contact with the surfaces of the laminated vibrator (100) and the counter electrode (162). Thereafter, voltage is applied between an internal electrode film (134) and the counter electrode (162) to induce electrophoresis of the coating component (128) toward a surface-exposed defect (154), whereby the coating material is selectively electrodeposited on the surface-exposed defect (154).

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