公开(公告)号：EP2381575A1

公开(公告)日：2011-10-26

申请号：EP09834925.1

申请日：2009-12-24

申请人： Daishinku Corporation

发明人： KOHDA, Naoki ,  YOSHIOKA, Hiroki

IPC分类号： H03H9/02 ,  H01L23/02 ,  H03H3/02

CPC分类号： H01L41/332 ,  B01D2325/02 ,  C23C8/40 ,  C23C12/00 ,  H01L23/3731 ,  H01L23/3732 ,  H01L23/3733 ,  H01L31/18 ,  H01L31/1804 ,  H01L41/23 ,  H01L41/25 ,  H01L41/29 ,  H01L41/33 ,  H01L2924/0002 ,  H03H3/02 ,  H03H9/0547 ,  H03H9/0552 ,  H03H9/1035 ,  H03H9/19 ,  H03H2003/045 ,  H03H2003/0457 ,  Y10T29/42 ,  H01L2924/00

摘要： A piezoelectric resonator device includes a piezoelectric resonator plate where an excitation electrode is formed, and an upper lid member and a lower lid member that hermetically seal the excitation electrode, the piezoelectric resonator plate having a joining region where the upper lid member is joined and a joining region where the lower lid member is joined, on front and back main surfaces, the upper lid member having a joining region on one main surface where the piezoelectric resonator plate is joined, and the lower lid member having a joining region on one main surface where the piezoelectric resonator plate is joined. A joining material is formed on each of the joining region of the piezoelectric resonator plate, the joining region of the upper lid member, and the joining region of the lower lid member. The joining region of the piezoelectric resonator plate and the joining region of the upper lid member are joined to each other via a joining material, and the joining region of the piezoelectric resonator plate and the joining region of the lower lid member are joined to each other via a joining material. At least one of a substrate of the joining region of the piezoelectric resonator plate, a substrate of the joining region of the upper lid member, and a substrate of the joining region of the lower lid member has a roughened surface.

摘要翻译： 一种压电谐振装置包括：压电振动片，其中在激励电极上形成，并且在上盖构件和下盖构件并密封所述激励电极，具有在上部盖构件接合的接合区域和所述压电振动板 接合，其中所述下盖构件接合，在正面和背面的主表面区域，一个主表面上具有接合区域的上盖构件，其中所述压电振动板接合，并具有在一个主表面的接合区域中的下盖构件 其中所述压电振动板接合。 的接合材料被形成在每个压电谐振器板，所述上盖构件的接合区域和所述下盖构件的接合区域的接合区域的。 所述压电振动板的接合区域和所述上盖构件的接合区域经由接合材料彼此接合，和压电谐振器板的接合区域和所述下盖构件的接合区域接合到海誓山盟 经由接合材料。 至少所述压电振动板的接合区域的基板中的一个，所述上盖构件的接合区域的基片和所述下盖构件的接合区域的衬底具有粗糙的表面。

公开(公告)号：EP2381575A4

公开(公告)日：2018-03-28

申请号：EP09834925

申请日：2009-12-24

申请人： DAISHINKU CORP

发明人： KOHDA NAOKI ,  YOSHIOKA HIROKI

IPC分类号： H03H9/02 ,  H01L23/02 ,  H03H3/02

CPC分类号： H01L41/332 ,  B01D2325/02 ,  C23C8/40 ,  C23C12/00 ,  H01L23/3731 ,  H01L23/3732 ,  H01L23/3733 ,  H01L31/18 ,  H01L31/1804 ,  H01L41/23 ,  H01L41/25 ,  H01L41/29 ,  H01L41/33 ,  H01L2924/0002 ,  H03H3/02 ,  H03H9/0547 ,  H03H9/0552 ,  H03H9/1035 ,  H03H9/19 ,  H03H2003/045 ,  H03H2003/0457 ,  Y10T29/42 ,  H01L2924/00

摘要： A piezoelectric resonator device includes a piezoelectric resonator plate where an excitation electrode is formed, and an upper lid member and a lower lid member that hermetically seal the excitation electrode, the piezoelectric resonator plate having a joining region where the upper lid member is joined and a joining region where the lower lid member is joined, on front and back main surfaces, the upper lid member having a joining region on one main surface where the piezoelectric resonator plate is joined, and the lower lid member having a joining region on one main surface where the piezoelectric resonator plate is joined. A joining material is formed on each of the joining region of the piezoelectric resonator plate, the joining region of the upper lid member, and the joining region of the lower lid member. The joining region of the piezoelectric resonator plate and the joining region of the upper lid member are joined to each other via a joining material, and the joining region of the piezoelectric resonator plate and the joining region of the lower lid member are joined to each other via a joining material. At least one of a substrate of the joining region of the piezoelectric resonator plate, a substrate of the joining region of the upper lid member, and a substrate of the joining region of the lower lid member has a roughened surface.

公开(公告)号：EP2764617A1

公开(公告)日：2014-08-13

申请号：EP12769100.4

申请日：2012-10-05

申请人： Centre National de la Recherche Scientifique (CNRS) ,  Université de Franche-Comté ,  Centre National d'Etudes Spatiales ,  ENSMM - Ecole Nationale Supérieure de Mécanique et des Microtechniques

发明人： BALLANDRAS, Sylvain ,  ULLIAC, Gwenn ,  EDOUARD-GUICHARDAZ, Blandine ,  BARON, Thomas ,  RAUCH, Jean-Yves

IPC分类号： H03H9/17 ,  H03H3/04 ,  H03H9/13 ,  H03H9/02

CPC分类号： H01L41/08 ,  H01L41/0477 ,  H01L41/18 ,  H03H3/04 ,  H03H9/02157 ,  H03H9/13 ,  H03H9/17 ,  H03H2003/045 ,  Y10T29/42

摘要： A volume wave piezoelectric resonator operating at a predetermined frequency comprises a substrate block (4), a carrier having a plane face (16) and a first thickness e1 and consisting of a first material, a resonant plate (6) having a length L, a width I and a second thickness e2, and consisting of a second piezoelectric material, first and second metal electrodes (12, 14) at least partly covering the resonant plate (6) on each side and least partially facing each other. The resonant plate (6) is fixed perpendicularly in the vicinity of the plane face (16) of the substrate block (4) so ​​that the width of the resonant plate (6) and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the substrate block, the length, the width I, the second thickness of the resonant plate are configured for trapping volume waves at the operating frequency of the resonator and for producing a plane-to-plane type volume wave piezoelectric resonator, i.e. with volume waves propagating in the direction of the thickness of the resonant plate.

摘要翻译： 以预定频率工作的体波压电谐振器包括具有平面，第一厚度并由第一材料构成的衬底块，具有长度，宽度和第二厚度的谐振板，并由第二压电材料构成， 第一和第二金属电极至少部分地覆盖每侧的谐振板并且部分地彼此面对。 谐振板垂直地固定在基板块的平面附近，使得谐振板的宽度和基板块的第一厚度具有相同的方向，并且第一材料，第二材料，第一厚度 基板块的长度，宽度，第二厚度被构造成用于在谐振器的工作频率处捕获体波并且用于产生平面型体积波动压电谐振器。