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    METHOD OF IMAGING A SPECIMEN USING A TRANSMISSION CHARGED PARTICLE MICROSCOPE
    1.
    发明公开
    METHOD OF IMAGING A SPECIMEN USING A TRANSMISSION CHARGED PARTICLE MICROSCOPE 审中-公开

    公开(公告)号：EP3929962A1

    公开(公告)日：2021-12-29

    申请号：EP20182306.9

    申请日：2020-06-25

    申请人： FEI Company

    发明人： Tiemeijer, Peter Christiaan ,  Pechnikova, Evgeniia ,  Geurink, Rudolf ,  Kotchea, Abhay ,  MacCormack, Jamie

    IPC分类号： H01J37/26

    摘要： The disclosure relates to a method of imaging a specimen using a transmission charged particle microscope, said method comprising providing a specimen, and providing a charged particle beam and directing said charged particle beam onto said specimen for generating a flux of charged particles transmitted through the specimen. The method comprises the step of generating and recording a first energy filtered flux of charged particles transmitted through the specimen, wherein said first energy filtered flux of charged particles substantially consists of non-scattered and elastically scattered charged particles. The method as disclosed herein comprises the further step of generating and recording a second energy filtered flux of charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles. Said first and second recorded energy filtered flux are then used for imaging said specimen with increased contrast.

    Method of performing spectroscopy in a transmission charged-particle microscope
    3.
    发明公开
    Method of performing spectroscopy in a transmission charged-particle microscope 审中-公开
    在einem Transmissions-Ladungsträger-Mikroskop的Verfahren zurSpektroskopiedurchführung

    公开(公告)号：EP2993682A1

    公开(公告)日：2016-03-09

    申请号：EP14183576.9

    申请日：2014-09-04

    申请人： FEI COMPANY

    发明人： De Jong, Erwin ,  Lazar, Sorin ,  Tiemeijer, Peter ,  Geurink, Rudolf

    IPC分类号： H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J37/26

    CPC分类号： H01J37/226 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/2007 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2802

    摘要： A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:
    - A specimen holder, for holding a specimen;
    - A source, for producing a beam of charged particles;
    - An illuminator, for directing said beam so as to irradiate the specimen;
    - An imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,
    which method comprises the following steps:
    - Using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array;
    - Providing a radiation sensor in said flux upstream of said aperture device;
    - Using said sensor to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector;
    - Using a sensing result from said sensor to adjust a detection result from said detector.

    摘要翻译： 一种在透射带电粒子显微镜中执行光谱的方法，包括： - 用于保持样品的样品架; - 用于生产带电粒子束的源头; - 照明器，用于引导所述光束以照射所述样本; - 一种成像系统，用于将通过所述样本传输的带电粒子的通量引导到包括用于将所述通量分散到光谱子束的能量分辨阵列中的分散装置的分光装置上，所述方法包括以下步骤： - 使用 可调节孔径装置，以将所述阵列的第一部分允许到检测器，同时阻挡所述阵列的第二部分; - 在所述孔设备上游的所述通量中提供辐射传感器; - 使用所述传感器在所述阵列的所述第二部分的选定区域中执行局部辐射感测，同时由所述检测器检测所述第一部分; - 使用来自所述传感器的感测结果来调整来自所述检测器的检测结果。

    Improved spectroscopy in a transmission charged-particle microscope
    5.
    发明公开
    Improved spectroscopy in a transmission charged-particle microscope 审中-公开
    eeem中的Verbesserte Spektroskopie Transmissionsmikroskop mit geladenen Partikeln

    公开(公告)号：EP2998979A1

    公开(公告)日：2016-03-23

    申请号：EP14185799.5

    申请日：2014-09-22

    申请人： FEI COMPANY

    发明人： De Jong, Erwin ,  Lazar, Sorin ,  Tiemeijer, Peter ,  Geurink, Rudolf

    IPC分类号： H01J37/244 ,  H01J37/26

    CPC分类号： H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

    摘要： A Transmission Charged-Particle Microscope, comprising:
    - A specimen holder, for holding a specimen;
    - A source, for producing a beam of charged particles;
    - An illuminator, for directing said beam so as to irradiate the specimen;
    - An imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising:
    ▪ A dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis;
    ▪ A detector,
    wherein the spectroscopic apparatus comprises an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of:
    - A width of said aperture parallel to said dispersion direction; and
    - A position of a center of said aperture relative to said propagation axis.

    摘要翻译： 透射带电粒子显微镜，包括： - 用于保持样品的样品架; - 用于生产带电粒子束的源头; - 照明器，用于引导所述光束以照射所述样本; - 成像系统，用于将通过所述样本传输的带电粒子的通量引导到分光装置，所述分光装置包括： - 一种分散装置，用于将所述通量分散到基本上平行于传播轴传播的光谱子束的能量分辨阵列 ; - 一种检测器，其中所述分光装置包括用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入所述检测器的所述阵列的子集，所述孔径沿着垂直方向的分散方向限定 通过第一和第二相对边缘到所述传播轴，每个边缘相对于所述传播轴独立地定位，从而允许独立调整以下两者： - 平行于所述分散方向的所述孔的宽度; 以及 - 所述孔的中心相对于所述传播轴的位置。