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    MICRO MOVING ELEMENT COMPRISING TORSION BAR
    4.
    发明公开
    MICRO MOVING ELEMENT COMPRISING TORSION BAR 有权
    MICRO移动元件扭力梁

    公开(公告)号：EP1569023A4

    公开(公告)日：2007-09-12

    申请号：EP02807976

    申请日：2002-10-10

    申请人： FUJITSU LTD

    发明人： TSUBOI OSAMU ,  MIZUNO YOSHIHIRO ,  UEDA SATOSHI ,  SAWAKI IPPEI ,  YAMAGISHI FUMIO ,  SONEDA HIROMITSU ,  KOUMA NORINAO

    IPC分类号： G02B26/08 ,  H02N1/00

    CPC分类号： G02B26/0841 ,  G02B26/085 ,  H02N1/008

    摘要： A micro moving element (X1) comprises a moving section (111), frame (112), which are integrally molded in a material substrate having a laminate structure comprising conductor layers (110a-110c) including a core conductor layer (110b) and insulation layers (110d, 110e) interposed between the conductor layers (110a-110c), and a coupling section (113) that couples them. The moving section (111) includes a first structure derived from the core conductor layer (110b). The frame (112) includes a second structure derived from the core conductor layer (110b). The coupling section (113) includes torsion bars (113a, 113b) derived from the core conductor layer (110b), continuously connected to the first and second structures, and electrically separated from each other.