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    AUF WAFEREBENE HERGESTELLTER CHIP FÜR FLÜSSIGCHROMATOGRAPHIE SOWIE VERFAHREN FÜR SEINE HERSTELLUNG
    2.
    发明公开
    AUF WAFEREBENE HERGESTELLTER CHIP FÜR FLÜSSIGCHROMATOGRAPHIE SOWIE VERFAHREN FÜR SEINE HERSTELLUNG 审中-公开
    ON专为生产液相色谱法晶圆级芯片

    公开(公告)号：EP2496938A1

    公开(公告)日：2012-09-12

    申请号：EP10773113.5

    申请日：2010-11-05

    申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

    发明人： PIECHOTTA, Gundula ,  QUENZER, Hans-Joachim

    IPC分类号： G01N30/60

    CPC分类号： G01N30/6095 ,  G01N2030/528

    摘要： The present invention relates to a method for producing a miniaturized separation column for chromatography purposes, having a porous stationary phase anchored in the column, comprising the following steps: (a) providing a planar substrate made of silicon, glass, glass ceramic material or ceramic material, (b) etching at least one channel structure into the planar substrate, (c) introducing a non-porous precursor material for the porous stationary phase into at least part of the channel structure(s), (d) forming a porous three-dimensional network from the precursor material, (e) covering the channel structure(s) in a liquid-tight manner on the upper face of the planar substrate. The invention further relates to a miniaturized separation column for chromatography purposes, the lateral walls of which are formed by one or more recesses extending in the surface of a planar silicon, glass, glass ceramic or ceramic substrate and one or more covers of said recess(es), and which is filled with a porous stationary chemical or physical phase forming a three-dimensional network and being joined to at least a portion of the column walls, said phase consisting of an inorganic or an organically modified inorganic or an organic material, selected from the group consisting of metals, ceramics, optionally organically modified oxides and organic polymers, to a wafer having a plurality of miniaturized separation channels, from which said separation channels can be produced by division, and to a chip, which in addition to one or more separation columns contains elements that may be required for liquid chromatography.

    MIKROVENTIL
    3.
    发明授权
    MIKROVENTIL 失效
    微型阀

    公开(公告)号：EP0700485B1

    公开(公告)日：1997-08-13

    申请号：EP94916136.8

    申请日：1994-05-21

    申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

    发明人： LISEC, Thomas ,  QUENZER, Hans-Joachim ,  WAGNER, Bernd

    IPC分类号： F15C5/00

    CPC分类号： F15C3/04

    摘要： The present invention relates to a microvalve usable primarily as a pilot valve in pneumatic controls. The prior art solenoid valves used in this field can be miniaturised only at considerably high cost. The microvalve of the invention consists of a first part (1), on the pressure side, with a diaphragm structure (3) as the movable closing component and a second part (2) with an outlet aperture (7) and a seat (5). The diaphragm structure has heating elements and is coated on one side with a material with differing coefficients of heat expansion, in such a way that heating causes the diaphragm to bend against the pressure applied on it. At least one of the two parts has a recesses (6) of defined depth arranged in such a way that with the valve closed hollows are formed which are heated by the heating elements. The microvalve described can be economically produced with semiconductor technology means and has improved switching properties on account of its combined thermomechanical-thermopneumatic method of operation.

    ANORDNUNG MIT VARIABLER KAPAZITÄT
    8.
    发明授权
    ANORDNUNG MIT VARIABLER KAPAZITÄT 有权
    与可变容量安排

    公开(公告)号：EP1307398B1

    公开(公告)日：2004-03-31

    申请号：EP01960141.8

    申请日：2001-08-02

    申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

    发明人： QUENZER, Hans-Joachim ,  WAGNER, Bernd ,  WENK, Beatrice

    IPC分类号： B81B3/00 ,  H01G5/14

    CPC分类号： H01G5/16 ,  H01G5/14 ,  H01G5/18

    摘要： The invention relates to an assembly having a variable capacitance and to a method for operating said assembly. In the assembly, a modifiable covering or a modifiable distance of at least one first (4) and one second electrically conductive region (5) forms a variable capacitance. The first electrically conductive region (4) is formed on or inside a substrate (1) and the second electrically conductive region (5) is formed on or in an actuator element (3) of a first micromechanical actuator (2). Said actuator (2) is arranged on the substrate (1) in such a manner that it can displace the actuator element (3) with the second region (5) along a surface of the substrate (1) to different positions in relation to the first region (4), at which the second region (5) at least partially overlaps the first region (4). In addition, holding means (6, 10, 11) are provided, which pull or push the actuator element (3) into different positions against the substrate (1) or against a mechanical stop (13) on the substrate (1), and they hold said actuator element (3) in these positions. The inventive assembly permits a variable capacitance to be realized which, according to its respective adjustment, exhibits a high level of stability against external influences.