公开(公告)号：EP3618096A1

公开(公告)日：2020-03-04

申请号：EP19204570.6

申请日：2015-07-25

申请人： Hunt, John Andrew ,  Coyle, Steven Thomas ,  Hassel-Shearer, Michael Patrick ,  Hosman, Thijs C.

发明人： Hunt, John Andrew ,  Coyle, Steven Thomas ,  Hassel-Shearer, Michael Patrick ,  Hosman, Thijs C.

IPC分类号： H01J37/305 ,  H01J37/317 ,  C23C14/46 ,  C23C14/50 ,  C23C14/56 ,  C23C14/02 ,  C23C14/54

摘要： Ion beam sample preparation and coating apparatus and methods are described. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.

公开(公告)号：EP3175472A1

公开(公告)日：2017-06-07

申请号：EP15826528.0

申请日：2015-07-25

申请人： Hunt, John Andrew ,  Coyle, Steven Thomas ,  Hassel-Shearer, Michael Patrick ,  Hosman, Thijs C.

发明人： Hunt, John Andrew ,  Coyle, Steven Thomas ,  Hassel-Shearer, Michael Patrick ,  Hosman, Thijs C.

IPC分类号： H01J27/00

CPC分类号： C23C14/46 ,  C23C14/022 ,  C23C14/50 ,  C23C14/505 ,  C23C14/545 ,  C23C14/566 ,  H01J37/3053 ,  H01J37/3178 ,  H01J2237/0822 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/3146 ,  H01J2237/3151

摘要： Disclosed are embodiments of an ion beam sample preparation and coating apparatus and methods. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.

摘要翻译： 公开了离子束样品制备和涂覆设备和方法的实施例。 可以在一个或多个离子束中制备样品，然后可以在同一装置内将涂层溅射到制备的样品上。 真空传输装置可以与设备一起使用，以便在受控环境中将样品传入和传出设备。 公开了改进制备和涂层均匀性的各种方法，包括：旋转样品保持阶段; 调节样品保留阶段; 可变倾斜离子束照射装置，多于一个离子束照射装置，涂层厚度监测，样品的选择性屏蔽以及调节涂层供体支架。

公开(公告)号：EP3207555A1

公开(公告)日：2017-08-23

申请号：EP15850466.2

申请日：2015-10-14

申请人： Hunt, John Andrew ,  Coyle, Steven Thomas ,  Hassel-Shearer, Michael Patrick ,  Hosman, Thijs C.

发明人： Hunt, John Andrew ,  Coyle, Steven Thomas ,  Hassel-Shearer, Michael Patrick ,  Hosman, Thijs C.

IPC分类号： H01J37/20

CPC分类号： H01J37/243 ,  G01N1/44 ,  H01J37/08 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/081 ,  H01J2237/24514 ,  H01J2237/24535 ,  H01J2237/30483 ,  H01J2237/31 ,  H01J2237/3151 ,  H01J2237/316

摘要： Disclosed are embodiments of an ion beam sample preparation and coating apparatus and methods. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.

摘要翻译： 公开了离子束样品制备和涂覆设备和方法的实施例。 可以在一个或多个离子束中制备样品，然后可以在同一装置内将涂层溅射到制备的样品上。 真空传输装置可以与设备一起使用，以便在受控环境中将样品传入和传出设备。 公开了改进制备和涂层均匀性的各种方法，包括：旋转样品保持阶段; 调节样品保留阶段; 可变倾斜离子束照射装置，多于一个离子束照射装置，涂层厚度监测，样品的选择性屏蔽以及调节涂层供体支架。