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1.发明公开INTRODUCTION OF METAL IMPURITY TO CHANGE WORKFUNCTION OF CONDUCTIVE ELECTRODES 审中-公开引言金属杂质修订工作职能引出电极
公开(公告)号：EP1974372A4
公开(公告)日：2009-12-09
申请号：EP07716303
申请日：2007-01-03
Applicant: IBM
Inventor： CHUDZIK MICHAEL P , DORIS BRUCE B , GUHA SUPRATIK , JAMMY RAJARAO , NARAYANAN VIJAY , PARUCHURI VAMSI K , WANG YUN Y , KWONG HON WONG KEITH
IPC: H01L21/336 , H01L21/28 , H01L29/49 , H01L29/51
CPC classification number: H01L29/517 , H01L21/28088 , H01L21/823828 , H01L21/823857 , H01L29/4966 , H01L29/513 , H01L29/78 , H01L2924/0002 , H01L2924/00
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