Electrical X-talk shield for MEMs micromirrors
    3.
    发明公开
    Electrical X-talk shield for MEMs micromirrors 有权
    ElektrischeÜbersprechungsabschirmungfürMEMS Mikrospiegel

    公开(公告)号:EP1479647A2

    公开(公告)日:2004-11-24

    申请号:EP04405318.9

    申请日:2004-05-21

    申请人: JDS Uniphase Inc.

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding (41,42) can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成围绕相同的轴线枢转地安装,仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。 为了限制相邻反射镜之间的电串扰量,屏蔽层(41,42)可以位于电极之间。 屏蔽层可以从基板向上延伸和/或从反射镜的下表面向下延伸。 当提供两种类型的屏蔽时,一组彼此偏移以防止其邻接,并且能够实现重叠效果,这增强了保护。

    Electrode configuration for pivotable MEMS micromirror
    4.
    发明公开
    Electrode configuration for pivotable MEMS micromirror 审中-公开
    Elektridenkonfigurationfürkippbaren MEMS Mikrospiegel

    公开(公告)号:EP2218677A1

    公开(公告)日:2010-08-18

    申请号:EP10002913.1

    申请日:2004-05-21

    申请人: JDS Uniphase, Inc

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相对轴线枢转地安装,仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。

    Electrical X-talk shield for MEMs micromirrors
    5.
    发明公开
    Electrical X-talk shield for MEMs micromirrors 有权
    电串扰屏蔽的MEMS微镜

    公开(公告)号:EP1479647A3

    公开(公告)日:2005-01-05

    申请号:EP04405318.9

    申请日:2004-05-21

    申请人: JDS Uniphase Inc.

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding (41,42) can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

    Configurable optical circuit
    6.
    发明公开
    Configurable optical circuit 审中-公开
    配置的光路

    公开(公告)号:EP1030480A3

    公开(公告)日:2002-06-12

    申请号:EP00810130.5

    申请日:2000-02-16

    申请人: JDS Uniphase Inc.

    发明人: Keyworth, Barrie

    IPC分类号: H04J14/02 G02B6/34

    摘要: A configurable add/drop optical system is disclosed for demulitplexing, adding and/or dropping closely spaced channels carrying optically encoded data. A composite optical signal having data channels corresponding to centre wavelengths λ1, λ2, λ3, λ4, ... λn are separated into two composite optical signals of first of which comprises data channels corresponding to centre wavelengths λ1, λ3, ... λn and a second which comprises data channels corresponding to centre wavelengths λ2, λ4, ... λn-1, by passing the composite signal through an interleaver circuit in a demultiplexing mode of operation. Two such interleaver circuits are optically coupled to one another and controllable, tunable Bragg gratings disposed therebetween are used to route demultiplexed signals along preferred signal paths.

    Interferometric optical device including an optical resonator
    7.
    发明公开
    Interferometric optical device including an optical resonator 审中-公开
    具有光谐振器的干涉光学装置

    公开(公告)号:EP1016884A2

    公开(公告)日:2000-07-05

    申请号:EP99310454.6

    申请日:1999-12-22

    申请人: JDS Uniphase Inc.

    IPC分类号: G02B6/28 H04J14/02

    摘要: A method and circuit is disclosed wherein two waveguides coupled to an optical resonant ring resonator are further coupled such that beams propagating therein interfere with one another to provide a desired output response. In one embodiment, multiplexed channels of light can be demultiplexed by the device described heretofore, or alternatively, the phase relationship between these two beams can be altered prior to their being combined to provide, for example, a linearised output response useful in applications such as wavelength locking. By varying the reflectivity of the FSR and the coupling ratios and/or by varying the phase relationship between the two beams, a variety of desired output responses can be realised. By providing suitable coupling ratios and providing optical path lengths of the two waveguides which are identical between the ring resonator and the couplers coupling the two waveguides as well as having the couplers placed 180 degrees opposite to each other, an interleaver/de-interleaver function is realised. In other embodiments, different forms of optical cavity resonators (etalons) are used instead of the ring resonator.

    Electrode configuration for pivotable MEMS micromirror
    9.
    发明公开
    Electrode configuration for pivotable MEMS micromirror 有权
    可旋转MEMS微镜的电极配置

    公开(公告)号:EP1479646A3

    公开(公告)日:2005-01-05

    申请号:EP04405316.3

    申请日:2004-05-21

    申请人: JDS Uniphase Inc.

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”式MEMS装置包括通过扭转铰链枢转地安装在其中部附近的细长平台。 平台的中间部分和扭转铰链具有小于平台其余部分的宽度的组合宽度,由此这些“钢琴”MEM装置中的几个可以被定位成彼此相邻且绕相同的轴线枢转地安装, 它们之间的小气隙。 在为波长切换应用而特别设计的本发明的优选实施例中,通过使平台围绕两个垂直轴线旋转来提供安装在其上的镜子的更大范围的弓形运动。 根据本发明的优选实施例的MEMS反射镜装置通过使用“内部”万向环结构使得反射镜能够围绕两个垂直轴倾斜,这确保了多个相邻反射镜装置具有高填充因子, 而不必依赖复杂且昂贵的制造工艺。