FURNACE FOR RAPID THERMAL PROCESSING
    3.
    发明公开
    FURNACE FOR RAPID THERMAL PROCESSING 失效
    烤箱快速热处理

    公开(公告)号:EP0898731A1

    公开(公告)日:1999-03-03

    申请号:EP97913384.0

    申请日:1997-12-08

    IPC分类号: H01L21 F27B17 F27D11 G02F1 G02F3

    CPC分类号: H01L21/67115

    摘要: A description is given of a furnace (1) for Rapid Thermal Processing of a wafer (7), in which furnace the wafer (7) is heated by lamps (9), and the heat radiation is reflected by an optical switching device (15, 17) which is in the reflecting state during the heating stage. During the cooling stage of the wafer (7), the heat is absorbed by the switching device (15, 17), which is in the heat-absorbing state. The switching device comprises a switching film of a trivalent metal, such as gadolinium, which is capable of forming hybrides by an exchange of hydrogen. Dependent on the hydrogen concentration of the hybrides, the film reflects or absorbs heat. The hydrogen content in the switching film can be changed by varying the partial pressure of hydrogen, or, preferably, by varying the potential of the switching film forming part of a stack of layers in an electrochemical cell.

    OPTICAL SWITCHING DEVICE
    4.
    发明公开
    OPTICAL SWITCHING DEVICE 失效
    光学开关装置

    公开(公告)号:EP0871926A1

    公开(公告)日:1998-10-21

    申请号:EP97926170.0

    申请日:1997-06-26

    IPC分类号: G02F1 G02F3

    摘要: A description is given of a switching device (1) comprising a transparent substrate (3), a switching film (5) including hydrides of gadolinium or other trivalent metal, and magnesium, covered with a palladium layer (7). By exchange of hydrogen, the switching film can be reversibly switched from a transparent state to a mirror-like state with zero transmission via an intermediate black absorbing state. The conversion between both states is reversible, and this phenomenon can be used, for example, in an optical switching element or sun roof.

    摘要翻译: 对包括透明基板(3),包含钆或其它三价金属的氢化物的开关膜(5)和覆盖有钯层(7)的镁的开关装置(1)进行描述。 通过氢的交换,开关膜可以通过中间黑吸收状态可逆地从零透射状态从透明状态切换到镜状状态。 两种状态之间的转换是可逆的,并且这种现象可以用于例如光学开关元件或天窗中。