公开(公告)号：EP3389084A1

公开(公告)日：2018-10-17

申请号：EP16872705.5

申请日：2016-10-13

申请人： Murata Machinery, Ltd.

发明人： HONDA Osamu ,  YAMADA Keiji ,  NOZAWA Takashi ,  ONO Daisuke

IPC分类号： H01L21/677

CPC分类号： H01L21/67736 ,  B65G43/10 ,  H01L21/677 ,  H01L21/67724 ,  H01L21/67733 ,  H01L21/67769

摘要： A conveyance system includes a track, ceiling conveyance vehicles, and a conveyance controller configured or programmed to output a conveyance instruction for a FOUP to the ceiling conveyance vehicles. When a first FOUP on a downstream port is in a state waiting for collection, and when a FOUP is not placed on an upstream port, the conveyance controller waits without outputting a conveyance instruction instructing collection of the first FOUP until any of the conveyance vehicles conveying a second FOUP to the upstream port has been recognized until a waiting time set in advance has elapsed since the first FOUP changed to the state waiting for collection and outputs the conveyance instruction instructing collection of the first FOUP when the waiting time has elapsed since a point in time when the first FOUP changed to the state waiting for collection.

公开(公告)号：EP3388368A1

公开(公告)日：2018-10-17

申请号：EP16872704.8

申请日：2016-10-13

申请人： Murata Machinery, Ltd.

发明人： HONDA Osamu ,  YAMADA Keiji ,  ONO Daisuke ,  NOZAWA Takashi

IPC分类号： B65G1/00 ,  H01L21/677

CPC分类号： H01L21/67754 ,  B65G1/00 ,  B65G43/00 ,  H01L21/677 ,  H01L21/67724 ,  H01L21/67763

摘要： A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage part and the local vehicle that transfer a FOUP between the storage part and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage part by the local vehicle, a second mode prohibiting transfer to the storage part by any of the ceiling conveyance vehicles and transfer from the storage part to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.