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    CONVEYER SYSTEM
    2.
    发明公开
    CONVEYER SYSTEM 有权
    输送系统

    公开(公告)号：EP2092554A1

    公开(公告)日：2009-08-26

    申请号：EP07831601.5

    申请日：2007-11-06

    申请人： Sinfonia Technology Co., Ltd.

    发明人： MIZOKAWA, Takumi ,  OCHIAI, Mitsutoshi

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67775 ,  H01L21/67763 ,  H01L21/67772

    摘要： An OHT conveyer vehicle places a FOUP (110) on platforms (42a and 42b). A platform ( 61) is moving to a position overlapping with the platform(42a and 42b) by a moving device (63), and then to a position at which an upper surface of the platform (61) is above upper surfaces of the platforms (42a and 42b) by elevation device (62). Therefore, the FOUP (110) is placed on the platform (61). Subsequently, the platform (61) is moving to a position overlapping with platforms (14a and 14b) by the moving device (63), and then to a position at which the platform(61) is lower than the platforms (14a and 14b) by the elevation device (63). Therefore the FOUP (110) is placed on the platforms (14a and 14b).

    摘要翻译： OHT输送机车将FOUP（110）放置在平台（42a和42b）上。 通过移动装置（63），平台（61）移动到与平台（42a和42b）重叠的位置，然后移动到平台（61）的上表面在平台 （42a和42b）通过升降装置（62）。 因此，FOUP（110）被放置在平台（61）上。 随后，平台61通过移动装置63移动到与平台14a和14b重叠的位置，然后移动到平台61低于平台14a和14b的位置， 通过升降装置（63）。 因此FOUP（110）被放置在平台（14a和14b）上。

    INTEGRATED LOAD PORT-CONVEYOR TRANSFER SYSTEM
    3.
    发明公开
    INTEGRATED LOAD PORT-CONVEYOR TRANSFER SYSTEM 审中-公开
    INTEGRATED LAST开幕资助体系

    公开(公告)号：EP1159213A4

    公开(公告)日：2007-01-10

    申请号：EP99966151

    申请日：1999-12-13

    申请人： ASYST TECHNOLOGIES

    发明人： BONORA ANTHONY C ,  GOULD RICHARD H

    IPC分类号： B65G47/46 ,  B65G1/00 ,  B65G47/90 ,  B65G49/07 ,  H01L21/677 ,  B65G37/02 ,  B65G47/34 ,  H01L21/68

    CPC分类号： H01L21/67775 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67763 ,  H01L21/67766 ,  H01L21/67769

    摘要： A transfer system (10) and method (figure 16) for moving an article (12) between a conveyor (14) and a workstation (16). The transfer system (10) includes an elevator system (60) having a lift device (64) configured to engage the article carried by a conveyor (14) and raise the article (12) above the conveyor (14). The lift device (64) is movable between a stand-by position with the lift device (64) positioned for the movement of articles (12) past the lift device (64) along the conveyor (14), and an actuated position with the lift device holding the article (12) above the conveyor. The transfer system (10) also includes a support assembly (62) for supporting the article (12) vicinal a workstation. The support assembly (62) including a shelf (120) for retaining the article (12) at the workstation (16) and a displacement mechanism (126) for moving the shelf (120) between the conveyor (14) and the lift device (64). The method (figure 16) includes moving a support (62) to engage the article (12) and lift the article (12) above the conveyor (14), extending a load port shelf (120) to the conveyor (14) and inserting the shelf (120) between the article (12) and the conveyor (14). After the shelf (120) is extended, the method (figure 16) includes moving the support (62) to deposit the article (12) onto the shelf (120), and after the step of moving the support (62), the method (figure 16) includes retracting the shelf (120) to the load port (22).

    Container and method of transporting substrates using the same
    4.
    发明公开
    Container and method of transporting substrates using the same 审中-公开
    容器和用于在容器中输送基板的方法

    公开(公告)号：EP1739735A1

    公开(公告)日：2007-01-03

    申请号：EP06004224.9

    申请日：2006-03-02

    申请人： CANON KABUSHIKI KAISHA

    发明人： Matsumoto, Ken

    IPC分类号： H01L21/677 ,  H01L21/673 ,  H01L21/683

    CPC分类号： H01L21/67353 ,  G03F1/66 ,  G03F7/70741 ,  G03F7/7075 ,  G03F7/70916 ,  H01L21/67763 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/6831

    摘要： A substrate such as a mask or wafer is transported while it is protected from a particle. Use of the substrate after transportation is facilitated. A container (300) includes a chuck (310) which chucks and holds a substrate (71) such as a mask or wafer, and a cover (320) which forms a storage space (108) together with the chuck (310). The substrate (71) is transported as it is held in the storage space (108) with the cover (320) being mounted on the chuck (310).

    摘要翻译： 甲底物：如掩模或晶片而它是从一个粒子保护被输送。 运输后使用基板变得容易。 一种容器（300）包括一个卡盘（310）其中卡盘和保持基板（71）：其形成的存储空间（108）与所述卡盘（310）一起，诸如掩模或晶圆，和盖（320）。 因为它是在所述存储空间（108）与所述盖（320）被安装在卡盘（310）保持的基片（71）被输送。

    WAFER TREATMENT SYSTEM HAVING LOAD LOCK AND BUFFER
    5.
    发明公开
    WAFER TREATMENT SYSTEM HAVING LOAD LOCK AND BUFFER 审中-公开
    与装载锁定和缓冲晶片处理系统

    公开(公告)号：EP1625609A2

    公开(公告)日：2006-02-15

    申请号：EP04752974.8

    申请日：2004-05-21

    申请人： Axcelis Technologies, Inc.

    发明人： MITCHELL, Robert ,  WEED, Allan ,  GUELER, Richard

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67763 ,  H01L21/67213 ,  H01L21/67745 ,  Y10S414/139 ,  Y10S414/141

    摘要： A transfer system for use with a tool for treating a work-piece at sub-atmospheric pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for treatment of work-pieces placed at a work-piece treatment station within the low pressure region. Multiple work-piece isolation load locks transfer work-pieces, one or two at a time, from a higher pressure region to the lower pressure for treatment and back to said higher pressure subsequent to said treatment. A first robot transfers work-pieces within the low pressure region from the load locks to a treatment station within the low pressure region. Multiple other robots positioned outside the low pressure region transfers work-pieces to and from the multiple work-piece isolation load locks from a source of said work-pieces prior to treatment and to a destination of said work-pieces after said treatment.

    METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING
    6.
    发明公开
    METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING 有权
    处理方法和器件的晶片大口径

    公开(公告)号：EP3082154A1

    公开(公告)日：2016-10-19

    申请号：EP16171862.2

    申请日：2009-01-13

    申请人： Entegris, Inc.

    发明人： GREGERSON, Barry ,  ADAMS, Michael Shawn ,  STEFFENS, Jason Todd

    IPC分类号： H01L21/673 ,  H01L21/67

    CPC分类号： B65D25/103 ,  B65D25/28 ,  B65D43/02 ,  B65D85/70 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67763

    摘要： A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a light closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.

    摘要翻译： 用于大直径晶片的前部开口半导体晶片容器包括容器部分和一个门。 所述容器部包括左闭合侧，光封闭侧，闭合背部，一个开放的前面，和开放的内部包含的时隙用于接收和容纳晶片复数。 门附连到所述容器部关闭打开的前部，并选择性可闩锁到所述容器部分上。 所述容器部包括用于容置大直径的晶片，特别是450mm晶片的装置。 优化的流挂控制被提供，以及增强的结构刚性，晶片座的功能。

    IN/OUT LOAD PORT TRANSFER MECHANISM
    9.
    发明公开
    IN/OUT LOAD PORT TRANSFER MECHANISM 有权
    ON / OFF LOAD开业促销系统

    公开(公告)号：EP1159214A4

    公开(公告)日：2007-06-27

    申请号：EP99966152

    申请日：1999-12-13

    申请人： ASYST TECHNOLOGIES

    发明人： BONORA ANTHONY C ,  GOULD RICHARD H

    IPC分类号： B65G47/46 ,  B65G1/00 ,  B65G47/90 ,  B65G49/07 ,  H01L21/677 ,  B65G37/00

    CPC分类号： H01L21/67775 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67763 ,  H01L21/67766 ,  H01L21/67769

    摘要： A transfer system (10) for moving one or more articles (12) between a conveyor (14) and a station (16). The system (10) includes a transfer assembly (10) having a lifting mechanism (62) configured to engage the article (12) as it is carried by the conveyor (14), lift the article (12) to a raised position above the support (60) and lower the article (12) from the raised position to the conveyor (14). The assembly (10) also includes a displacement device (114) configured to move the article (12) from the raised position to a station (16), position the article (12) at the station (16), and return the article (12) from the station (16) to the raised position above the conveyor (14). The system (10) also includes the method of transferring an article (12) between a conveyor (14) having a pair of spaced rails (116) and a station (16) positioned to one side of the conveyor (14). The method includes engaging the underside of the article (12) between the rails (116) and lifting the article (12) to a raised position and moving the article (12) in a direction perpendicular to the conveyor (14) between the raised position and a position vicinal the station (16).