公开(公告)号：EP2436662B1

公开(公告)日：2018-05-30

申请号：EP10780397.5

申请日：2010-04-27

Applicant: NHK Spring Co., Ltd.

Inventor： SUZUKI, Kohei ,  MIYAJI, Shinya ,  SAITO, Shinji ,  KANEDA, Noriyoshi

IPC: G01R1/067 ,  C04B35/583 ,  G01R1/06 ,  C04B35/587 ,  C04B35/645 ,  G01R3/00

CPC classification number: G01R3/00 ,  C04B35/583 ,  C04B35/587 ,  C04B35/645 ,  C04B2235/3206 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3445 ,  C04B2235/3852 ,  C04B2235/3873 ,  C04B2235/3878 ,  C04B2235/3882 ,  C04B2235/5292 ,  C04B2235/787 ,  C04B2235/80 ,  G01R1/06722 ,  G01R1/06755 ,  Y10T428/252

Abstract: Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300°C in a direction parallel to the direction of orientation is (3 to 5)×10 -6 /°C, or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.

公开(公告)号：EP2594544B1

公开(公告)日：2015-04-08

申请号：EP11806832.9

申请日：2011-07-13

Applicant: NHK Spring Co., Ltd.

Inventor： NAKAMURA, Akira ,  SUZUKI, Kohei ,  MIYAJI, Shinya ,  SAITO, Shinji

IPC: C04B35/583 ,  C04B35/20 ,  G01R1/067 ,  G01R1/073

CPC classification number: C04B35/583 ,  C04B35/20 ,  C04B35/645 ,  C04B35/6455 ,  C04B2235/3206 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3418 ,  C04B2235/3445 ,  C04B2235/386 ,  C04B2235/5292 ,  C04B2235/656 ,  C04B2235/767 ,  C04B2235/77 ,  C04B2235/787 ,  C04B2235/80 ,  C04B2235/96 ,  C04B2235/9607 ,  G01R1/06722 ,  G01R3/00 ,  Y10T428/24273

公开(公告)号：EP2594544A1

公开(公告)日：2013-05-22

申请号：EP11806832.9

申请日：2011-07-13

Applicant: NHK Spring Co., Ltd.

Inventor： NAKAMURA, Akira ,  SUZUKI, Kohei ,  MIYAJI, Shinya ,  SAITO, Shinji

IPC: C04B35/583 ,  C04B35/20 ,  G01R1/067 ,  G01R1/073

CPC classification number: C04B35/583 ,  C04B35/20 ,  C04B35/645 ,  C04B35/6455 ,  C04B2235/3206 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3418 ,  C04B2235/3445 ,  C04B2235/386 ,  C04B2235/5292 ,  C04B2235/656 ,  C04B2235/767 ,  C04B2235/77 ,  C04B2235/787 ,  C04B2235/80 ,  C04B2235/96 ,  C04B2235/9607 ,  G01R1/06722 ,  G01R3/00 ,  Y10T428/24273

Abstract: There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member.

Abstract translation: 提供了一种陶瓷构件，其是含有顽磁和氮化硼作为组成的烧结体，其中氮化硼沿单向取向，使用该陶瓷构件形成的探针保持架以及陶瓷构件的制造方法。 在陶瓷构件中，取向度的指标不小于0.8。 这样做可以提供一种具有自由加工性能，热膨胀系数接近于硅的陶瓷构件和高强度的陶瓷构件，以及使用陶瓷构件形成的探针保持器， 陶瓷构件的制造方法。

公开(公告)号：EP2436662A1

公开(公告)日：2012-04-04

申请号：EP10780397.5

申请日：2010-04-27

Applicant: NHK Spring Co., Ltd.

Inventor： SUZUKI, Kohei ,  MIYAJI, Shinya ,  SAITO, Shinji ,  KANEDA, Noriyoshi

IPC: C04B35/583 ,  G01R1/06

CPC classification number: G01R3/00 ,  C04B35/583 ,  C04B35/587 ,  C04B35/645 ,  C04B2235/3206 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3445 ,  C04B2235/3852 ,  C04B2235/3873 ,  C04B2235/3878 ,  C04B2235/3882 ,  C04B2235/5292 ,  C04B2235/787 ,  C04B2235/80 ,  G01R1/06722 ,  G01R1/06755 ,  Y10T428/252

Abstract: Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300°C in a direction parallel to the direction of orientation is (3 to 5)×10 -6 /°C, or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.

Abstract translation: 提供一种陶瓷构件，其是至少包含镁橄榄石和氮化硼作为主要成分，并且其中氮化硼沿一个方向取向的烧结体，通过使用该陶瓷构件形成的探针支架，以及陶瓷构件的制造方法 。 在陶瓷构件中，取向偏好指数等于或低于0.07，并且在与取向方向平行的方向上的20〜300℃的热膨胀系数为（3〜5）×10 -6 / 或基于JIS R 1601的三点弯曲强度等于或高于250MPa。

公开(公告)号：EP2249167A1

公开(公告)日：2010-11-10

申请号：EP09714184.0

申请日：2009-02-26

Applicant: NHK Spring Co., Ltd.

Inventor： KAZAMA, Toshio ,  NAKAYAMA, Hiroshi ,  MIYAJI, Shinya ,  SUZUKI, Kohei

IPC: G01R1/073 ,  H01L21/66 ,  H05K3/46

CPC classification number: G01R1/07378 ,  G01R31/2889 ,  H05K3/4605 ,  H05K3/467 ,  H05K2201/068

Abstract: A wiring substrate that allows wiring at a fine pitch and has a coefficient of thermal expansion close to the coefficient of thermal expansion of silicone, and a probe card that includes the wiring substrate are provided. To this end, there are provided a wiring substrate that includes a ceramic substrate having a coefficient of thermal expansion of 3×10 -6 to 5×10 -6 /°C and one or more thin-film wiring sheets stacked on one surface of the ceramic substrate, and a probe head on which a plurality of conductive proves are arranged in accordance with wiring on the thin-film wiring sheet, which holds individual probes while preventing the probes from coming off and allowing both ends of each probe to be exposed, and which is stacked on the wiring substrate while one end of each probe is brought into contact with the thin-film wiring sheet.

Abstract translation: 提供允许以细间距布线并且具有接近硅树脂的热膨胀系数的热膨胀系数的布线基板和包括布线基板的探针卡。 为此，提供了一种布线基板，其包括热膨胀系数为3×10 -6至5×10 -6 /℃的陶瓷基板和在一个表面上堆叠的一个或多个薄膜布线片 陶瓷基板和探针头，根据薄膜布线板上的布线布置有多个导电证明的探针头，其保持各个探针，同时防止探针脱落并且允许每个探针的两端暴露 并且在每个探针的一端与薄膜布线片接触的同时层叠在布线基板上。

公开(公告)号：EP2093576A1

公开(公告)日：2009-08-26

申请号：EP07850562.5

申请日：2007-12-13

Applicant: NHK Spring Co., Ltd.

Inventor： KAZAMA, Toshio ,  KAWARABAYASHI, Tomohiro ,  ISHIKAWA, Shigeki ,  MIYAJI, Shinya

IPC: G01R1/06 ,  G01R1/073

CPC classification number: G01R1/0466 ,  G01R1/0483 ,  G01R3/00

Abstract: To provide an easily manufactured conductive contact holder and a conductive contact unit capable of supporting a high frequency signal and a highly integrated and downsized inspection object, and a method of manufacturing the conductive contact holder. To achieve the object, there is provided a holder substrate made of a conductive material and having an opening for holding a conductive contact for inputting and outputting a signal to and from a circuit structure and a holding member formed by filling the opening with an insulating material, smoothing the surface of the insulating material, and forming a hole through the insulating material for inserting the conductive contact.

Abstract translation: 以提供容易地制造导电性触头支架和能够支持高频信号和一个高度集成和小型化检查对象，和制造该导电性触头支架的制造方法的导电性接触器单元。 为了达到上述目的，提供由导电材料制成的，并具有在开口用于保持导电性接触器，用于输入和输出廷的信号和从电路结构和在绝缘材料中的保持器的基板的保持部件通过与填充所述开口来形成 ，平滑所述绝缘材料的表面上，和用于插入导电性接触形成穿过所述绝缘材料中的孔。