公开(公告)号：EP3612000A1

公开(公告)日：2020-02-19

申请号：EP18785237.1

申请日：2018-04-03

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  SEKIYA, Kenji ,  TAKAHARA, Go ,  AIKAWA, Naoya ,  KISARA, Yuta ,  TATSUMI, Arata

IPC: H05B3/72 ,  H05B3/20 ,  H05B3/30 ,  H05B3/48

Abstract: A heater unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate and a second substrate joined together, a groove arranged on at least one join surface of the first substrate and the second substrate, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：EP2695972B1

公开(公告)日：2019-06-05

申请号：EP12768423.1

申请日：2012-04-06

Applicant: NHK Spring Co., Ltd.

Inventor： HIRANO, Satoshi ,  YAMAUCHI, Yuichiro ,  AKABAYASHI, Masaru ,  HANAMACHI, Toshihiko

IPC: C23C28/02 ,  C23C24/04 ,  B05B7/14 ,  B32B15/01 ,  C23C14/02 ,  C23C14/16 ,  C23C28/00

公开(公告)号：EP2690195A1

公开(公告)日：2014-01-29

申请号：EP12760790.1

申请日：2012-03-22

Applicant: NHK Spring Co., Ltd.

Inventor： HIRANO, Satoshi ,  YAMAUCHI, Yuichiro ,  AKABAYASHI, Masaru ,  SAITO, Shinji ,  HANAMACHI, Toshihiko

IPC: C23C24/04 ,  B32B15/01 ,  C22F1/04 ,  C22F1/08 ,  C23C28/02 ,  H01B5/02 ,  H01B13/00

CPC classification number: H05K1/092 ,  B32B15/017 ,  B32B15/018 ,  C23C24/04 ,  C23C28/021 ,  C23C28/023 ,  C23C28/321 ,  C23C28/322 ,  H01B13/30

Abstract: A lamination having a high interface strength, in which a copper film is laminated on an aluminum substrate, or a lamination in which an aluminum film is laminated on a copper substrate, are manufactured by a cold spray method. A lamination 10 of the present invention includes: a substrate 1 formed of aluminum or aluminum alloy; an intermediate layer 2 formed of any one metal or nonmetal selected from the group consisting of silver, gold, chromium, iron, germanium, manganese, nickel, silicon, and zinc, or an alloy containing the any one metal, on a surface of the substrate 1; and a film layer 3 formed by accelerating powder material of copper or copper alloy together with gas heated to a temperature lower than a melting point of the powder material and spraying and depositing a solid-phase powder material onto a surface of the intermediate layer 2.

Abstract translation: 通过冷喷涂法制造在铝基板上层压有铜膜的高界面强度的层压体，或者在铜基板上层压铝膜的层压体。 本发明的层叠体10包括：由铝或铝合金形成的基板1; 由选自银，金，铬，铁，锗，锰，镍，硅和锌的任何一种金属或非金属形成的中间层2或含有任何一种金属的合金在 基板1; 以及通过加热铜或铜合金的粉末材料以及加热到低于粉末材料的熔点的温度的气体而形成的膜层3，并且将固相粉末材料喷射并沉积到中间层2的表面上。

公开(公告)号：EP3900867A1

公开(公告)日：2021-10-27

申请号：EP19900978.8

申请日：2019-12-13

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  FUJINO, Daisuke ,  TAKIMOTO, Masaru ,  ARAKI, Yoshihito ,  FUJII, Masahiro

IPC: B23K20/00

Abstract: A joining method according to the present invention is a joining method of joining a main body which is made of aluminum or an aluminum alloy and is formed with a passage through which a medium for promoting heat exchange is circulated and a cover which is made of aluminum or an aluminum alloy and covers the passage of the main body. The method includes: a covering step of covering the main body with the cover; and a diffusion bonding step of joining the main body and the cover by diffusion bonding under a condition in which a joining temperature is 500°C or higher and 640°C or lower, and a joining surface pressure is 0.7 MPa or higher.

公开(公告)号：EP3866565A1

公开(公告)日：2021-08-18

申请号：EP19870485.0

申请日：2019-10-01

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/68 ,  C23C14/50 ,  C23C16/46 ,  H01L21/31 ,  H05B3/48 ,  H01L21/3065

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：EP2592647A1

公开(公告)日：2013-05-15

申请号：EP11803639.1

申请日：2011-07-06

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko

IPC: H01L21/683 ,  C23C16/455 ,  C23C16/458 ,  C23C24/02 ,  F28F3/12 ,  H01L21/205

CPC classification number: B23P15/26 ,  C23C16/45565 ,  C23C16/4586 ,  C23C24/04 ,  F28F3/12 ,  H01L21/67109 ,  Y10T29/4935

Abstract: A plate with a passage and the like capable of shortening a process time than a previous one and of suppressing leakage from or contamination to the passage are provided. The plate with the passage is a plate in which the passage for causing a fluid to circulate therein is formed, and includes a body plate formed of a metal or an alloy and in which a groove serving as the passage is provided, a cover plate that covers the groove, and a deposition layer that is formed such that metal or alloy powder is accelerated with a gas and is sprayed on the body plate and the cover plate in a solid phase, and covers the cover plate.

Abstract translation: 提供了能够缩短处理时间而不是先前的通路等并且抑制通道的泄漏或污染的板。 具有通道的板形成有用于使流体在其中循环的通道的板，并且包括由金属或合金形成的主体板，其中设置有用作通道的槽，盖板，其中 覆盖凹槽，以及形成为使得金属或合金粉末被气体加速并以固相喷涂在主体板和盖板上并且覆盖盖板的沉积层。

公开(公告)号：EP3871823A1

公开(公告)日：2021-09-01

申请号：EP19875649.6

申请日：2019-10-23

Applicant: NHK Spring Co., Ltd.

Inventor： TAKIMOTO, Masaru ,  HANAMACHI, Toshihiko ,  NAKAYAMA, Junichi

IPC: B23K20/12 ,  F28F3/12 ,  B23K101/14

Abstract: A joined body according to the present invention includes: a main body section including a wall section that forms a passage along which a medium for accelerating heat exchange flows; and a cover configured to cover a surface of the main body section on which the passage is formed. The cover includes: a covering section provided on a side facing the main body section and configured to cover the surface of the main body section on which the passage is formed; a groove section provided on the side facing the main body section and configured to accommodate an end portion of the wall section; and a stirred joint section provided on a side opposite to a side on which the covering section and the groove section are provided. The stirred joint section is at least partly frictionally stirred by a depth reaching a bottom of the groove section from a surface on a side opposite to the side facing the main body section, and bonded to the end portion of the wall section.

公开(公告)号：EP3611999A1

公开(公告)日：2020-02-19

申请号：EP18784228.1

申请日：2018-04-03

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  SEKIYA, Kenji ,  HASHIMOTO, Daisuke ,  HIRANO, Satoshi ,  TAKIMOTO, Masaru ,  TAKAHARA, Go ,  ARAKI, Yoshihito ,  TATSUMI, Arata ,  KAWASAKI, Takashi ,  TOYAMA, Yuki ,  ANZAI, Satoshi

IPC: H05B3/48 ,  H05B3/10

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：EP3370477A1

公开(公告)日：2018-09-05

申请号：EP16859467.9

申请日：2016-09-28

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  AIKAWA, Naoya

IPC: H05B3/74 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/683 ,  H05B3/18

CPC classification number: H01L21/6831 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/67017 ,  H01L21/67098 ,  H01L21/67103 ,  H05B3/18 ,  H05B3/28 ,  H05B3/74

Abstract: A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.

公开(公告)号：EP2695972A1

公开(公告)日：2014-02-12

申请号：EP12768423.1

申请日：2012-04-06

Applicant: NHK Spring Co., Ltd.

Inventor： HIRANO, Satoshi ,  YAMAUCHI, Yuichiro ,  AKABAYASHI, Masaru ,  HANAMACHI, Toshihiko

IPC: C23C28/02 ,  B05D1/10 ,  B32B15/01 ,  C23C14/14 ,  C23C24/04

CPC classification number: B05D1/12 ,  B05B7/1486 ,  B05D1/36 ,  B22F2007/042 ,  B32B15/01 ,  B32B15/16 ,  C23C14/025 ,  C23C14/16 ,  C23C24/04 ,  C23C28/021 ,  C23C28/023 ,  C23C28/42 ,  Y10T428/12076

Abstract: Provided is a method for manufacturing a lamination, in manufacturing a lamination in which a metal film is formed on a substrate using the cold spray method, having high adhesion strength between the substrate and the metal film. A lamination 10 according to the present invention includes a substrate 1 formed of a metal or alloy, an intermediate layer 2 formed on a surface of the substrate and is formed of a metal or alloy that is softer than the substrate 1, and a metal film 3 deposited by accelerating a powder material of a metal or alloy together with a gas heated to a temperature lower than the melting point of the powder material and spraying it onto the intermediate layer 2 while keeping it in a solid phase.

Abstract translation: 本发明提供一种层叠体的制造方法，该制造方法在制造在基板上利用冷喷涂法形成金属膜的基板与金属膜的粘接强度高的层叠体。 根据本发明的叠层10包括由金属或合金形成的基板1，形成在基板表面上的中间层2，并且由比基板1更软的金属或合金形成，并且金属膜 通过将金属或合金的粉末材料与加热到低于粉末材料熔点的气体一起加速并将其喷涂到中间层2上，同时保持其处于固相。