公开(公告)号：EP0809284A4

公开(公告)日：2001-04-18

申请号：EP96942663

申请日：1996-12-27

申请人： NIPPON OXYGEN CO LTD

发明人： TODA MASAYUKI ,  OHMI TADAHIRO ,  ISHIHARA YOSHIO

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67253 ,  G03F7/7075 ,  G03F7/70933 ,  G03F7/70991 ,  H01L21/67242 ,  H01L21/67784 ,  Y10T29/41

摘要： A method and device by which the yield of a thin plate-like substrate of a semiconductor integrated circuit, liquid crystal panel, etc., is improved by always transferring the substrate to each processing device in a highly clean damage-free state when the substrate is subjected to various kinds of treatment. A substrate is transferred through a gas tunnel through which a purging gas composed of in insert gas or a mixed gas of an inert gas and oxygen gas is made to flow. The concentrations of impurities in the gas tunnel are measured with a semiconductor laser detector, and the transfer of the substrate is controlled based on the obtained measured data.

公开(公告)号：EP0889515A4

公开(公告)日：2004-10-20

申请号：EP97912528

申请日：1997-11-21

申请人： NIPPON OXYGEN CO LTD ,  TODA MASAYUKI ,  OHMI TADAHIRO

发明人： TODA MASAYUKI ,  OHMI TADAHIRO ,  ISHIHARA YOSHIO

IPC分类号： B65G49/00 ,  B65G49/07 ,  H01L21/677 ,  H01L21/68 ,  H01L21/00

CPC分类号： H01L21/67126 ,  H01L21/67724 ,  H01L21/67736

摘要： When a thin sheet-like substrate S is conveyed between conveying chambers (2) equipped with a processing apparatus (1) and kept in an inert gas atmosphere by using a conveying robot (30) equipped with an accommodation chamber (3) capable of accommodating the thin sheet-like substrate (S) in an inert gas atmosphere, a connection chamber (4) is interposed between the accommodation chamber (3) and the conveying chamber (2) when the thin sheet-like substrate (S) is transferred between the accommodation chamber (3) of the conveying robot (30) and the conveying chamber (2) on the side of the processing apparatus (1), and is vacuumized, and then an inert gas is introduced. Thereafter, gate valves (GV1 and GV2) of the accommodation chamber (3) and the conveying chamber (2) are opened and the thin sheet-like substrate (S) is carried in and out.