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公开(公告)号：EP3275527A1
公开(公告)日：2018-01-31
申请号：EP17181941.0
申请日：2017-07-18
发明人： FUJIKAWA, Shigenori , ROMAN, Selyanchyn , SENZAKI, Takahiro , NOGUCHI, Takuya , OGATA, Toshiyuki
CPC分类号： B01D71/44 , B01D53/228 , B01D67/0083 , B01D67/0093 , B01D71/70 , B01D2323/30 , C08G77/16 , C08G77/18 , C08G77/20 , C08G77/398 , C08G77/58 , C08L43/04
摘要： The present invention provides a gas-permeable membrane comprising a partial structure represented by formula (I) or formula (II), wherein R 1 and R 2 each independently represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkenyloxy group having 2 to 6 carbon atoms, an aryl group or an aryloxy group, M 1 , M 2 and M 3 each independently represents a metal atom, ml represents an integer, n1, n2 and n3 each independently represents an integer of 1 to 3, * represents a bonding hand, a composition for forming the gas-permeable membrane and a production process of the gas-permeable membrane.
摘要翻译： 本发明提供一种透气膜，其包含由式（I）或式（II）表示的部分结构，其中R 1和R 2各自独立地表示氢原子，具有1至6个碳原子的烷基，具有 2至6个碳原子的烷氧基，具有1至6个碳原子的烷氧基，具有2至6个碳原子的烯氧基，芳基或芳氧基，M1，M2和M3各自独立地表示金属原子，ml表示整数 n1，n2和n3各自独立地表示1〜3的整数，*表示粘合手，用于形成透气膜的组合物和透气膜的制造方法。
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公开(公告)号：EP1895576A1
公开(公告)日：2008-03-05
申请号：EP06766824.4
申请日：2006-06-16
申请人： TOKYO OHKA KOGYO CO., LTD. , Riken
发明人： MATSUMARU, Shogo, TOKYO OHKA KOGYO CO., LTD. , OGATA, Toshiyuki, TOKYO OHKA KOGYO CO., LTD. , ISHIKAWA, Kiyoshi, TOKYO OHKA KOGYO CO., LTD. , HADA, Hideo, TOKYO OHKA KOGYO CO., LTD. , FUJIKAWA, Shigenori , KUNITAKE, Toyoki
IPC分类号： H01L21/3065
CPC分类号： H01L21/0273 , G03F7/405
摘要： There are provided a coating material which improves an etching resistance of a pattern in an etching process using a pattern formed on a substrate as a mask.
The material is a pattern coating material for an etching process using a pattern formed on a substrate as a mask, including a metal compound (W) which can produce a hydroxyl group on hydrolysis.摘要翻译： 提供一种涂覆材料，其使用在基板上形成的图案作为掩模，在蚀刻工艺中提高图案的耐蚀刻性。 该材料是使用在基材上形成的图案作为掩模的蚀刻工艺的图案涂布材料，其包括在水解时可产生羟基的金属化合物（W）。
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公开(公告)号：EP1895576B1
公开(公告)日：2014-07-23
申请号：EP06766824.4
申请日：2006-06-16
申请人： TOKYO OHKA KOGYO CO., LTD. , Riken
发明人： MATSUMARU, Shogo, , OGATA, Toshiyuki, , ISHIKAWA, Kiyoshi, , HADA, Hideo, , FUJIKAWA, Shigenori , KUNITAKE, Toyoki
IPC分类号： G03F7/40 , H01L21/3065
CPC分类号： H01L21/0273 , G03F7/405
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公开(公告)号：EP2977099B1
公开(公告)日：2020-06-03
申请号：EP15173691.5
申请日：2015-06-24
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5.发明公开COMPOSITE LAYER MATERIAL, METHOD FOR MANUFACTURING MEMBRANE, AND METHOD FOR MANUFACTURING LAYERED BODY 审中-公开复合层材料，制造方法膜及其制造方法的一层BODY
公开(公告)号：EP3020754A1
公开(公告)日：2016-05-18
申请号：EP14822451.2
申请日：2014-07-09
CPC分类号： B32B27/06 , B01D67/0002 , B01D69/06 , B01D69/10 , B01D71/46 , B01D71/60 , B29C39/14 , B29D99/005 , B29K2079/085 , B29L2031/755 , B32B7/06 , B32B27/08 , B32B27/28 , B32B27/38 , B32B38/10 , B32B2037/243 , B32B2307/7166 , C08J5/18
摘要： The composite layer material (10) is made up of at least two laminated layers. One of outermost layers is a support film (2) that is removable from another layer and has a self-supporting property.
摘要翻译： 复合层材料（10）是由至少两个层压层。 一个最外层的是一个支持电影（2）确实是从另一个层移除，并且具有自支撑性能。
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公开(公告)号：EP2977099A1
公开(公告)日：2016-01-27
申请号：EP15173691.5
申请日：2015-06-24
摘要： To provide a membrane filter including a thin film having a nanometer order thickness as a base, which is easy to increase the size and also has enough strength for use as a filter. The membrane filter is formed by laminating a thin film having a thickness of 1 to 1,000 nm with a support film which is a porous film having a thickness of 1 to 1,000 µm, which is made of a photosensitive composition or a cured product of the photosensitive composition, and has a plurality of hole portions penetrating in the thickness direction.
摘要翻译： 提供一种膜过滤器，其包括具有纳米级厚度的薄膜作为基底，其容易增加尺寸并且还具有足够的强度用作过滤器。 膜过滤器是通过将厚度为1〜1000nm的薄膜与由感光性组合物或感光性物质的固化物形成的厚度为1〜1000μm的多孔膜的支撑膜层叠而形成的 并且具有沿厚度方向贯穿的多个孔部。
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