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    BESCHLEUNIGUNGSSENSOR
    2.
    发明公开
    BESCHLEUNIGUNGSSENSOR 失效
    加速度传感器。

    公开(公告)号：EP0649538A1

    公开(公告)日：1995-04-26

    申请号：EP93914592.0

    申请日：1993-06-30

    申请人： ROBERT BOSCH GMBH

    发明人： MAREK, Jiri ,  WILLMANN, Martin ,  BANTIEN, Frank ,  SCHUBERT, Dietrich ,  OFFENBERG, Michael ,  RUDOLF, Félix

    IPC分类号： G01P15

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0828

    摘要： The proposal is for an acceleration sensor consisting of an upper plate (1), a central plate (2) and a lower plate (3). The sensor has a movable electrode (4) built out from the central plate (2). The assembly of the plates is simplified by the use of a closed dielectric layer (10) on the upper plate (1) and the lower plate (3) since the plates do not have to be mutually adjusted. The use of stops (17) prevents the jamming of the seismic mass (33) on the upper (1) or lower plate (3). The use of local oxidation (18) reduces the stray capacitance.

    MIKROMECHANISCHE STRUKTUR
    3.
    发明公开
    MIKROMECHANISCHE STRUKTUR 审中-公开
    微机械结构

    公开(公告)号：EP2435786A1

    公开(公告)日：2012-04-04

    申请号：EP10702076.0

    申请日：2010-01-20

    申请人： Robert Bosch GmbH

    发明人： LIEBING, Stefan ,  SCHUBERT, Dietrich ,  FUERST, Wolfgang ,  RURLAENDER, Stefan

    IPC分类号： G01C19/56 ,  G01P15/125

    CPC分类号： G01P15/125 ,  G01P2015/0814

    摘要： What is proposed is a micromechanical structure, more particularly an acceleration sensor, comprising a substrate, a seismic mass that is movable relative to the substrate, and at least one anchoring element that is fixedly connected to the substrate, wherein the seismic mass is fixed to the substrate by means of the anchoring element, and wherein at least one spring element is arranged between the seismic mass and the anchoring element, and wherein, furthermore, the anchoring element has at least one stop element for interaction with at least one counter-stop element of the seismic mass.

    MEHRACHSIGER MIKROMECHANISCHER BESCHLEUNIGUNGSSENSOR
    4.
    发明公开
    MEHRACHSIGER MIKROMECHANISCHER BESCHLEUNIGUNGSSENSOR 有权

    公开(公告)号：EP2106551A2

    公开(公告)日：2009-10-07

    申请号：EP07822570.3

    申请日：2007-11-14

    申请人： Robert Bosch GmbH

    发明人： CLASSEN, Johannes ,  FRANKE, Axel ,  SCHUBERT, Dietrich ,  KEHR, Kersten ,  REICHENBACH, Ralf

    IPC分类号： G01P15/125

    CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/084

    摘要： The invention relates to a micromechanic acceleration sensor, comprising a substrate (1), an elastic membrane (5), which extends in parallel to the substrate plane, is partially connected to the substrate and comprises a surface region, which can be deflected perpendicular to the substrate plane. The invention further comprises a seismic mass (6), wherein the center of gravity thereof is outside of the plane of the elastic membrane (5). The seismic mass (6) extends at a distance across substrate regions, which are located outside of the region of the elastic membrane (5) and comprise an arrangement made of a plurality of electrodes (3a, 3b, 3c, 3d), which form a capacitor with opposing regions of the seismic mass (6) in a circuit. In the central region, the seismic mass (6) is fastened in the surface region of the elastic membrane (5), which can be deflected perpendicular to the substrate plane, to the elastic membrane (5).

    摘要翻译： 传感器具有平行于衬底平面延伸的弹性膜（5），与衬底（1）连接，其中膜包括垂直于平面移动的平面区域。 震动块（6），其旋转点位于膜的平面之外，其中基底区域位于膜的平面区域的外侧。 地震质量被固定在膜的平面区域的中心区域。 一组电极（3a，3c）以电路技术方式形成具有相对于地震块的区域的冷凝器。

    BESCHLEUNIGUNGSSENSOR
    5.
    发明公开
    BESCHLEUNIGUNGSSENSOR 有权

    公开(公告)号：EP2027474A1

    公开(公告)日：2009-02-25

    申请号：EP07727691.3

    申请日：2007-04-03

    申请人： Robert Bosch GmbH

    发明人： SCHUBERT, Dietrich ,  CLASSEN, Johannes ,  TEBJE, Lars ,  SEELHORST, Johannes

    IPC分类号： G01P15/08 ,  G01P15/125

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

    摘要： The present invention relates to an acceleration sensor with a seismic mass (1) having a first and a second wing (2, 3), which can be rotated about at least one torsion web (4), and with a base substrate (13), wherein the wings (2, 3) are formed in such a manner that, on account of their mass distributions, different torques are exerted on the at least one torsion web (4). The seismic mass (1) and the base substrate are formed in such a manner that damping torques of the same magnitude for torsion and for torsion of the same magnitude in the opposite direction act on the at least one torsion web (4). Therefore, torques of the same magnitude for accelerations of the same magnitude in opposite directions act on the acceleration sensor.

    摘要翻译： 本发明涉及一种具有震动质量（1）的加速度传感器，该震动质量具有可围绕至少一个扭转腹板（4）旋转的第一和第二翼（2,3）以及基础基板（13） 其中，所述翼部（2,3）以这样的方式形成，即由于它们的质量分布，在所述至少一个扭转腹板（4）上施加不同的扭矩。 震动质量块（1）和基础基底以这样的方式形成，即，在至少一个扭转腹板（4）上作用相同大小的扭转和相反大小的扭转的阻尼扭矩。 因此，对于加速度传感器，相同大小的加速度相反的方向的转矩作用于加速度传感器。

    BESCHLEUNIGUNGSSENSOR MIT EINGESCHRÄNKTER BEWEGLICHKEIT IN VERTIKALER RICHTUNG
    7.
    发明授权
    BESCHLEUNIGUNGSSENSOR MIT EINGESCHRÄNKTER BEWEGLICHKEIT IN VERTIKALER RICHTUNG 有权
    行动不便的垂直方向的加速度传感器

    公开(公告)号：EP1242826B1

    公开(公告)日：2005-03-30

    申请号：EP00969205.4

    申请日：2000-08-25

    申请人： ROBERT BOSCH GMBH

    发明人： RETTIG, Rasmus ,  KOHN, Oliver ,  FISCHER, Frank ,  SCHUBERT, Dietrich

    IPC分类号： G01P15/08

    CPC分类号： B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

    摘要： The invention relates to an acceleration sensor with an oscillating structure that is moveably suspended from a substrate and can be deflected under the effect of acceleration. An oscillating level of the oscillating structure is situated essentially in parallel in relation to a substrate level. The acceleration sensor also comprises evaluation means for detecting a deflection of the oscillating structure, whereby said deflection is caused by acceleration. A deflection movement of the oscillating structure (12) is situated in an essentially vertical manner in relation to the oscillating level (x-, y-level) of the oscillating structure (12). Stopper means (36) limit said movement and can be embodied as a bridge-shaped structure between finger-shaped, moveable electrodes. The bridge-shaped structure supports a fixed, finger-shaped electrode from below. The stopper means can also engage with an annular step of a lateral stopper.

    BESCHLEUNIGUNGSSENSOR MIT EINGESCHRÄNKTER BEWEGLICHKEIT IN VERTIKALER RICHTUNG
    8.
    发明公开
    BESCHLEUNIGUNGSSENSOR MIT EINGESCHRÄNKTER BEWEGLICHKEIT IN VERTIKALER RICHTUNG 有权
    行动不便的垂直方向的加速度传感器

    公开(公告)号：EP1242826A1

    公开(公告)日：2002-09-25

    申请号：EP00969205.4

    申请日：2000-08-25

    申请人： ROBERT BOSCH GMBH

    发明人： RETTIG, Rasmus ,  KOHN, Oliver ,  FISCHER, Frank ,  SCHUBERT, Dietrich

    IPC分类号： G01P15/08

    CPC分类号： B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

    摘要： The invention relates to an acceleration sensor with an oscillating structure that is moveably suspended from a substrate and can be deflected under the effect of acceleration. An oscillating level of the oscillating structure is situated essentially in parallel in relation to a substrate level. The acceleration sensor also comprises evaluation means for detecting a deflection of the oscillating structure, whereby said deflection is caused by acceleration. A deflection movement of the oscillating structure (12) is situated in an essentially vertical manner in relation to the oscillating level (x-, y-level) of the oscillating structure (12). Stopper means (36) limit said movement and can be embodied as a bridge-shaped structure between finger-shaped, moveable electrodes. The bridge-shaped structure supports a fixed, finger-shaped electrode from below. The stopper means can also engage with an annular step of a lateral stopper.