DISPOSITIF POUR LE REVÊTEMENT D'UN OU PLUSIEURS FILS PAR UN PROCÉDÉ DE DÉPÔT EN PHASE VAPEUR

    公开(公告)号:EP3377669A1

    公开(公告)日:2018-09-26

    申请号:EP16809993.5

    申请日:2016-11-18

    申请人: Safran Ceramics

    IPC分类号: C23C14/56 C23C16/54

    摘要: The invention relates to a device (1) for the coating of one or more wires (2) using a vapour phase deposition method, said device comprising at least: a treatment chamber (4) extending along a longitudinal axis (X) and comprising at least one treatment zone (4a) located between an internal circumferential wall (5) and an external circumferential wall (7) and in which at least one wire (2) is intended to be coated using a vapour phase deposition method; a conveyor system designed to transport said at least one wire (2) through the treatment zone (4a); an injection device designed to inject a treatment gas phase (10a) into the treatment zone (4a) through at least one inlet port (7a) provided in the internal (5) or external (7) circumferential wall; a discharge device designed to discharge the residual gas phase (11a) from the treatment zone (4a) through at least one outlet port (8a) provided in the internal (5) or external (7) circumferential wall, said inlet port (7a) and said outlet port (8a) being located in the same plane (P) perpendicular to the longitudinal axis (X) of the treatment chamber (4) and being offset in the circumferential direction (C) of the treatment chamber (4).