摘要:
A piezoelectric element which includes an adhesion layer made of composite oxide having perovskite structure including at least one of bismuth, manganese, iron, and titanium; a first electrode provided on the adhesion layer and made of metal preferentially oriented in a (100) face; a piezoelectric body layer provided on the first electrode and made of composite oxide having perovskite structure preferentially oriented in the (100) face; and a second electrode provided on the piezoelectric body layer.
摘要:
A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and a piezoelectric element. The piezoelectric element comprises a platinum first electrode (60), a piezoelectric layer (70) comprising a complex oxide having a perovskite structure and comprising bismuth, barium, iron, manganese and titanium, and a second electrode (80). In addition, a layered compound portion (75) comprising iron, barium, titanium and oxygen is disposed between the piezoelectric layer and the first electrode.
摘要:
A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and a piezoelectric element. The piezoelectric element includes a first electrode (60) made of platinum, a piezoelectric layer (70) on the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth, and a second electrode (80) on the piezoelectric layer. An oxide (65) containing bismuth and platinum is disposed at the interface of the piezoelectric layer (70) with the first electrode (60).
摘要:
A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and a piezoelectric element. The piezoelectric element includes a first electrode (60) made of platinum, a piezoelectric layer (70) on the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth, and a second electrode (80) on the piezoelectric layer. An oxide (65) containing bismuth and platinum is disposed at the interface of the piezoelectric layer (70) with the first electrode (60).
摘要:
A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature is set to be Tc1 and a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature is set to be Tc2, in which the absolute value of the difference between Tc1 and Tc2 |Tc1-Tc2| is equal to or lower than 50°C, and a composition near an MPB line is provided in a phase diagram that employs a composition ratio of a first component to a second component for the horizontal axis and temperature for the vertical axis.
摘要:
A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature is set to be Tc1, a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature is set to be Tc2, and a third component that is configured to have a complex oxide with the perovskite structure in which the component is formed as the same crystal system as the second component, and Curie temperature is set to be Tc3, in which Tc1 is higher than Tc2, and Tc3 is equal to or higher than Tc1.