CRACK-RESISTANT THERMAL BEND ACTUATOR
    3.
    发明公开
    CRACK-RESISTANT THERMAL BEND ACTUATOR 有权
    抗裂热弯曲致动器

    公开(公告)号:EP2490896A1

    公开(公告)日:2012-08-29

    申请号:EP09848585.7

    申请日:2009-08-25

    IPC分类号: B41J2/04

    CPC分类号: B41J2/14427

    摘要: A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.