SUBSTRATE FOR EPITAXIAL GROWTH, MANUFACTURING METHOD THEREFOR, AND SUBSTRATE FOR SUPERCONDUCTOR WIRE
    6.
    发明公开
    SUBSTRATE FOR EPITAXIAL GROWTH, MANUFACTURING METHOD THEREFOR, AND SUBSTRATE FOR SUPERCONDUCTOR WIRE 审中-公开
    衬底外延生长,生产工艺和基材超导线材

    公开(公告)号:EP2905362A4

    公开(公告)日:2016-06-29

    申请号:EP13843999

    申请日:2013-08-23

    摘要: An objective of the present invention is to provide a copper substrate for epitaxial growth, which has higher biaxial crystal orientation, and a method for manufacturing the same. The substrate for epitaxial growth of the present invention contains a biaxially crystal-oriented copper layer, wherein the full width at half maximum ”Æ of a peak based on the pole figure of the copper layer is within 5° and the tail width ”² of the peak based on the pole figure is within 15°. Such a substrate for epitaxial growth is manufactured by a 1 st step of performing heat treatment of a copper layer so that ”Æ is within 6° and the tail width ”² is within 25°, and after the 1 st step, a 2 nd step of performing heat treatment of the copper layer at a temperature higher than the temperature for heat treatment in the 1 st step, so that ”Æ is within 5° and the tail width ”² is within 15°.

    摘要翻译: 本发明的一个目的是提供一种用于外延生长,它具有较高的双轴结晶配向,以及用于制造它的方法提供了一种铜基板。 用于本发明的外延生长用基板包含双轴取向晶体的铜层,worin半峰全宽“AE基于所述铜层的极点图中的峰的是在5°以内和尾部宽度”²的 根据极图的峰值是在15°。 外延生长这样的基板是由铜层进行热处理的第1步制成的,使得“AE为6度和尾宽度内”²是在25°,第1个步骤后,一个第二 在温度高于该温度下在第1个步骤中的热处理进行铜层的热处理,使工序“Æ是在5°以内和尾部宽度”²是15°以内。