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公开(公告)号：EP2263792A1
公开(公告)日：2010-12-22
申请号：EP09718093.9
申请日：2009-03-06
申请人： Toyo Tanso Co., Ltd.
发明人： HIRAIWA, Jiro , TAKEBAYASHI, Hitoshi , YOSHIMOTO, Osamu , TANAKA, Noriyuki , FUJITA, Ichiro , SASAKI, Hiroyoshi , MORI, Kazutaka
IPC分类号： B01J19/00 , B01D53/68 , C08J7/12 , C23C8/08 , H01L21/3065
CPC分类号： H01L21/6719 , B01J4/008 , H01L21/67017 , H01L21/67109
摘要： A surface treatment apparatus 100 includes a diluent gas supplier 1, a fluorine gas supplier 2, a mixer 5 which mixes a diluent gas with a fluorine gas, and a reactor 6 which treats a treatment target by using a mixed gas generated by the mixer 5. A diluent gas supplied from a diluent gas supplier is heated by a heater 8, and the heated diluent gas is mixed with a fluorine gas supplied from a fluorine gas supplier, in the mixer 5. The mixed gas is supplied to the reactor 6. The gas in the reactor 6 is supplied from the reactor 6 to flow paths 219, 220, 221, and 222 by an exhauster 207. The valves 223, 224, 225, and 226 are serially opened, so that the gas in the reactor 6 is supplied to a harm removal apparatus 208 while the gas flow rate is being adjusted by the flow paths 219, 220, 221, and 222.
摘要翻译： 表面处理装置100包括稀释气体供给体1，氟气供给体2，混合稀释气体与氟气的混合器5以及通过使用由混合器5产生的混合气体来处理处理对象物的反应器6 从稀释气体供给装置供给的稀释气体由加热器8加热，在混合器5中将加热后的稀释气体与氟气供给体供给的氟气混合。混合气体供给反应器6。 反应器6中的气体通过排气器207从反应器6供应到流动路径219,220,221和222.阀223,224,225和226串联打开，使得反应器6中的气体 在通过流路219,220,221和222调节气体流量的同时被供给到危害消除装置208。
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公开(公告)号：EP2476783A1
公开(公告)日：2012-07-18
申请号：EP10813517.9
申请日：2010-09-02
申请人： Toyo Tanso Co., Ltd.
发明人： YOSHIMOTO, Osamu , HONGU, Makoto , OHKUBO, Hiroshi
CPC分类号： C25B15/02 , C23F2213/30
摘要： An electrolytic apparatus includes an electrolyzer, a heater, and a blower. The electrolyzer accommodates an electrolytic bath. The heater is provided in the electrolyzer while being electrically insulated from the electrolyzer. Similarly, the blower is provided in the electrolyzer while being electrically insulated from the electrolyzer. The heater is turned on so that a temperature of the electrolyzer rises. The heater is turned off and the blower is turned on so that a temperature of the electrolyzer falls. The heater and the blower are switched between ON and OFF so that the temperature of the electrolyzer is kept constant.
摘要翻译： 电解装置包括电解槽，加热器和鼓风机。 电解槽容纳电解槽。 加热器设置在电解槽中，同时与电解槽电绝缘。 类似地，鼓风机设置在电解槽中，同时与电解槽电绝缘。 加热器开启，电解槽的温度上升。 加热器关闭，鼓风机开启，电解槽的温度下降。 加热器和鼓风机在ON和OFF之间切换，使得电解槽的温度保持恒定。
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公开(公告)号：EP2012345A1
公开(公告)日：2009-01-07
申请号：EP07708131.3
申请日：2007-02-07
申请人： Toyo Tanso Co., Ltd.
发明人： HIRAIWA, Jiro , YOSHIMOTO, Osamu , HAYAKAWA, Hiroshi , TOJO, Tetsuro , OKABE, Tsuneyuki , ASANO, Takanobu , WADA, Shinichi , NAKAO, Ken , KATO, Hitoshi
CPC分类号： F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses 3a to 3e through a gas supplying system 2 including a storage tank 12 that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators 1a to 1e. When one or more of the on-site fluorine gas generators 1a to 1e are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses 3a to 3e from the storage tank 12 storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses 3a to 3e. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and the cost performance is superior.
摘要翻译： 氟气发生器通过包括存储在现场氟气发生器1a至1e中产生的预定量的氟气的储罐12的气体供应系统2与半导体制造装置3a至3e连接。 当一个或多个现场氟气发生器1a至1e停止时，从存储预定量氟气的储罐12向半导体制造装置3a至3e供应氟气，以保持操作 半导体制造装置3a〜3e。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置的半导体制造厂，成本表现优异。
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公开(公告)号：EP2474644B1
公开(公告)日：2015-02-25
申请号：EP10813516.1
申请日：2010-09-02
申请人： Toyo Tanso Co., Ltd.
发明人： YOSHIMOTO, Osamu
IPC分类号： C23C16/455 , C23C16/44 , C25B15/08 , C25B1/24
CPC分类号： C23C16/45561 , F17C5/00 , F17C2205/0142 , F17C2205/0323 , F17C2221/01 , F17C2250/03 , F17C2250/043 , Y10T137/877
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5.发明公开GAS GENERATION DEVICE AND GAS GENERATION METHOD 审中-公开GASERZEUGUNGSVORRICHTUNG UND GASERZEUGUNGSVERFAHREN
公开(公告)号：EP2559790A1
公开(公告)日：2013-02-20
申请号：EP11768584.2
申请日：2011-03-23
申请人： Toyo Tanso Co., Ltd.
摘要： A control device receives an output signal from a liquid level sensor disposed in an anode chamber. This output signal indicates whether the liquid level of the electrolytic bath in the anode chamber is higher than a reference level. When the liquid level of the electrolytic bath in the anode chamber is higher than the reference level, the control device increases, by a prescribe value, the frequency of a compressor driving voltage that is generated in an inverter circuit. This increases the rotational speed of a motor in the compressor, increases the discharge pressure of hydrogen gas being discharged from the compressor, and decreases the pressure inside the cathode chamber. As a result, the liquid level of the electrolytic bath in the cathode chamber rises, and the liquid level of the electrolytic bath in the anode chamber falls below the reference level.
摘要翻译： 控制装置从设置在阳极室中的液位传感器接收输出信号。 该输出信号表示阳极室中的电解液的液面高于参考水平。 当阳极室中的电解液的液位高于参考水平时，控制装置以规定值增加在逆变器电路中产生的压缩机驱动电压的频率。 这增加了压缩机中的电动机的转速，增加了从压缩机排出的氢气的排出压力，并降低了阴极室内的压力。 结果，阴极室中的电解液的液面升高，阳极室中的电解液的液面下降到基准水平以下。
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公开(公告)号：EP1932949A1
公开(公告)日：2008-06-18
申请号：EP06767483.8
申请日：2006-06-28
申请人： TOYO TANSO CO., LTD.
摘要： A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the rawmaterial supply pipe can be prevented.
摘要翻译： 一种氟/氟化物气体发生器，其具有由包含阳极室和阴极室的电解池中含有氟化氢的混合熔融盐形成的电解质，并且通过电解电解产生含氟气体的氟/氟化物气体发生器包括：供给原料供给管 电解原料，到达电解池中的电解质的内部，设置在原料供给管的中间的常闭阀，以及设有常开阀的旁通管，将原料供给管 在常闭阀的下游侧到电解池的气相区域。 因此，防止电解液被吸入到氟/氟化物气体发生器中的原料供给管中，并且可以防止原料供给管内的电解质的凝固。
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公开(公告)号：EP2474644A1
公开(公告)日：2012-07-11
申请号：EP10813516.1
申请日：2010-09-02
申请人： Toyo Tanso Co., Ltd.
发明人： YOSHIMOTO, Osamu
IPC分类号： C23C16/455 , C23C16/44 , C25B15/08 , C25B1/24
CPC分类号： C23C16/45561 , F17C5/00 , F17C2205/0142 , F17C2205/0323 , F17C2221/01 , F17C2250/03 , F17C2250/043 , Y10T137/877
摘要： A fluorine gas generation system includes a plurality of fluorine gas supply systems and a controller. Each of the fluorine gas supply systems includes a fluorine gas generation apparatus. Each of the fluorine gas supply systems is connected to a CVD device group. The fluorine gas generation apparatus includes a fluorine gas generator and a buffer tank. An opening/closing valve is inserted through a piping. The other end of the piping is branched into a plurality of pipings. Each of the pipings is connected to CVD devices. Pipings in the adjacent fluorine gas supply systems are connected to each other via a piping. An opening/closing valve is inserted through each of the pipings.
摘要翻译： 氟气生成系统包括多个氟气供给系统和控制器。 每个氟气供应系统包括氟气产生装置。 每个氟气供应系统连接到CVD装置组。 氟气产生装置包括氟气发生器和缓冲罐。 打开/关闭阀通过管道插入。 管道的另一端分支成多个管道。 每个管道都连接到CVD设备。 相邻氟气供给系统中的管道经由管道相互连接。 通过每个管道插入开闭阀。
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