Method of fluorescence imaging
    5.
    发明公开
    Method of fluorescence imaging 审中-公开
    韦尔法罕zur Erzeugung fluoreszierender Bilder

    公开(公告)号:EP1998165A1

    公开(公告)日:2008-12-03

    申请号:EP07109459.3

    申请日:2007-06-01

    Abstract: Method of fluorescence imaging comprising:
    a) illuminating a sample to excite its fluorescence and acquiring an image thereof;
    b) based on spectral and spatial information from the sample's fluorescence image, segmenting the image into regions of similar spectral properties;
    c) for each image segment, exciting the fluorescence of the corresponding sample region, and detecting the corresponding fluorescence;
    d) based on modelling, determining expected fluorescence parameters from the fluorescence signals detected for each region;
    e) scanning the sample and determining final fluorescence parameters based on said expected fluorescence parameters from step d).

    Abstract translation: 荧光成像方法包括:a)照射样品以激发其荧光并获得其图像; b)基于来自样品荧光图像的光谱和空间信息,将图像分割成具有相似光谱性质的区域; c)对于每个图像段,激发相应样品区域的荧光,并检测相应的荧光; d)基于建模,根据为每个区域检测的荧光信号确定预期的荧光参数; e)基于来自步骤d)的所述预期荧光参数扫描样品并确定最终荧光参数。

    MEASUREMENT OF CRITICAL DIMENSION
    7.
    发明公开
    MEASUREMENT OF CRITICAL DIMENSION 审中-公开
    测量临界尺寸

    公开(公告)号:EP2726849A2

    公开(公告)日:2014-05-07

    申请号:EP12806995.2

    申请日:2012-06-12

    Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

    NEAR REAL TIME OPTICAL PHASE CONJUGATION
    8.
    发明公开
    NEAR REAL TIME OPTICAL PHASE CONJUGATION 有权
    快速实时光相位共轭

    公开(公告)号:EP2478466A4

    公开(公告)日:2014-04-16

    申请号:EP10816257

    申请日:2010-09-14

    Inventor: HENG XIN

    Abstract: An optical system and associated method enable near real time optical phase conjugation. In the method, a translucent medium is illuminated by a sample illumination beam. Light scattered by the medium is directed to an electronic image sensor while a reference beam is also directed to the electronic image sensor. The scattered light and the reference beam form an interference pattern at the electronic image sensor. A digital representation of the interference pattern is recorded using the electronic image sensor, and the characteristics of a conjugate of the sample beam are computed from the numerical representation. A conjugate beam having the computed characteristics is generated using a configurable optical element and directed back to the translucent medium. The generation of the conjugate beam may be accomplished using a spatial light modulator.

    Real time optical correlation system
    10.
    发明公开
    Real time optical correlation system 失效
    实时光学相关系统

    公开(公告)号:EP0587020A3

    公开(公告)日:1994-08-24

    申请号:EP93113897.8

    申请日:1993-08-31

    Abstract: An optical correlation unit (10) for correlating the images of an inspection object and a reference object. The unit uses two phase modulating reflective spatial light modulators (12a, 12b). A first spatial light modulator (12a) receives electronic input in the form of image data representing the inspection object. It modulates incoming light (15) with this input and reflects the modulated output to a first Fourier transform lens (13). This lens provides the optical input to second spatial light modulator (12b), whose electronic input is transform data presenting the complex conjugate of the Fourier transform of the reference image. The electronic input modulates the optical input, resulting in the Fourier product of the two images, which is then transformed to provide correlation data.

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