公开(公告)号：EP0914560B1

公开(公告)日：2005-08-24

申请号：EP97925125.3

申请日：1997-05-23

Applicant: Société Nationale d'Etude et de Construction de Moteurs d' Aviation

Inventor： LATISCHEV, Leonid Aleckseevich ,  IAKUBOV, Akhmet Mialikovich ,  JACOUPOV, Aidar Beksultanovich ,  KHARTOV, Sergey Anatolievich ,  VALENTIAN, Dominique

IPC: F03H1/00 ,  H05H1/54

CPC classification number: F03H1/0075 ,  H01J27/143 ,  H05H1/54

Abstract: The invention concerns a device for concentrating ion beams for a hydromagnetic propulsion means with closed electron drift comprising: a) a flared magnetic polar part (63) substantially truncated, open at its two ends and designed to be located downstream of the hydromagnetic propulsion means output plane, comprising a ring-shaped ionisation and acceleration channel (1) and peripheral (3) and central (4) polar parts arranged on either side of the ring-shaped channel (1) to generate a substantially radial magnetic field in an output plane perpendicular to the ring-shaped channel (1) axis; and b) a supplementary peripheral magnetic circuit (60) connecting the flared magnetic polar part (63) downstream end with the peripheral polar part (3), the flared magnetic polar part (63) co-operating with the supplementary peripheral magnetic circuit (60) and the peripheral (3) and central (4) polar parts to define the shape of the magnetic field downstream of the ring-shaped channel (1) so as to force the ion beams emitted by the ring-shaped channel (1) to remain inside a substantially conical zone whereof the predetermined top angle is defined by the flared magnetic polar part (63) top angle.

Abstract translation: 本发明涉及一种用于具有闭合电子漂移的水力磁力推进装置的离子束集中装置，包括：a）基本上截头的喇叭形磁极部分（63），其两端敞开并且设计成位于磁流动推进装置输出端的下游 包括布置在所述环形通道（1）的任一侧上的环形电离和加速通道（1）和外围设备（3）以及中心（4）极性部件，以在输出平面中产生基本上径向的磁场 垂直于所述环形通道（1）的轴线; 和b）将扩口磁极部分（63）下游端与外围极性部分（3）连接的辅助外围磁路（60），扩口磁极部分（63）与辅助外围磁路（60） ）和周边（3）和中央（4）极性部分，以限定环形通道（1）下游的磁场形状，以迫使由环形通道（1）发射的离子束到达 保持在基本上圆锥形的区域内，其中预定的顶角由喇叭形磁极部分（63）顶角限定。

公开(公告)号：EP0174058A3

公开(公告)日：1987-09-30

申请号：EP85302181

申请日：1985-03-28

Applicant: KYOTO UNIVERSITY

Inventor： Yoshikawa, Kiyoshi ,  Toku, Hisayuki ,  Ueda, Makoto ,  Tamagaki, Hiroshi

IPC: H01J27/02 ,  H05H01/54 ,  H05H01/24

CPC classification number: H05H1/54 ,  H01J27/143 ,  H01J37/08

Abstract: The anode means of a Hall accelerator with a main discharge area has coaxial cylindrical electrodes aligned with the longitudinal axis of the main discharge area and an auxiliary electromagnet surrounding the electrodes, and an electric field is applied across the cylindrical electrodes while the auxiliary electromagnet produces an axial magnetic field therebetween so that a preionization discharge area is formed in communication with the main discharge area.

Abstract translation: 具有主放电区域的霍尔加速器的阳极装置具有与主放电区域的纵向轴线对准的同轴圆柱形电极和围绕电极的辅助电磁体，并且在圆柱形电极之间施加电场，而辅助电磁体产生 其间形成有与主放电区域连通的前置放电区域。

公开(公告)号：EP1825491B1

公开(公告)日：2008-09-24

申请号：EP05818170.2

申请日：2005-11-07

Applicant: Guardian, Industries Corp.

Inventor： LUTEN, Henry, A. ,  VEERASAMY, Vijayen, S.

IPC: H01J27/14 ,  H01J3/04 ,  H01J37/08

CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J27/143

Abstract: In certain example embodiments of this invention, there is provide an ion source including an anode (25) and a cathode (5). In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between the anode and cathode, there is less undesirable build-up on the anode and/or cathode during operation of the ion source so that the source can run more efficiently. Moreover, in certain example embodiments, an insulator (35) such as a ceramic or the like is provided between the anode and cathode.

公开(公告)号：EP1894221A1

公开(公告)日：2008-03-05

申请号：EP06758543.0

申请日：2006-04-25

Applicant: Guardian, Industries Corp.

Inventor： WALTON, Hugh, A.

IPC: H01J27/02 ,  H01J37/08

CPC classification number: H01J27/143 ,  H01J27/024 ,  H01J2237/083

Abstract: In certain example embodiments of this invention, there is provided an ion source including an anode (25) and a cathode (5) . In certain example embodiments, a multi-piece outer cathode (5b') is provided. The multi-piece outer cathode (5b') allows precision adjustments to be made, thereby permitting adjustment of the magnetic gap between the inner and outer cathodes. This allows improved performance to be realized, and/or prolonged operating life of certain components. This may also permit multiple types of gap adjustment to be performed with different sized outer cathode- end pieces. In certain example embodiments, cathode fabrication costs may also be reduced.

公开(公告)号：EP1556879A2

公开(公告)日：2005-07-27

申请号：EP03809578.2

申请日：2003-10-20

Applicant: GUARDIAN INDUSTRIES CORP. ,  ADVANCED ENERGY INDUSTRIES, INC.

Inventor： ADVANCED ENERGY INDUSTRIES, INC. ,  LUTEN, Henry, A. ,  VEERASAMY, Vijayen, S. ,  FRATI, Maximo ,  SHAW, Denise, R.

IPC: H01J27/02 ,  H01J37/08 ,  H01J37/32

CPC classification number: H01J27/143

Abstract: A method and/or system for cleaning an ion source is/are provided. In certain embodiments of this invention, both the anode and cathode of the ion source are negatively biased during at least part of a cleaning mode. Ions generated are directed toward the anode and/or cathode in order to remove undesirable build-ups from the same during cleaning.

公开(公告)号：EP0095879B1

公开(公告)日：1987-08-19

申请号：EP83302940.8

申请日：1983-05-23

Applicant: International Business Machines Corporation ,  Kaufman, Harold Richard

Inventor： Kaufman, Harold Richard ,  Cuomo, Jerome John

IPC: H01J27/02 ,  H01J37/08

CPC classification number: H01J27/143 ,  H01J37/08

公开(公告)号：EP2368257A4

公开(公告)日：2016-03-09

申请号：EP09836710

申请日：2009-12-08

Applicant: GEN PLASMA INC

Inventor： MADOCKS JOHN

IPC: H01J27/14 ,  H01J37/08 ,  H01J37/305 ,  H01J37/317 ,  H01J37/32 ,  H01J37/34

CPC classification number: H01J37/08 ,  H01J27/143 ,  H01J37/3053 ,  H01J37/317 ,  H01J37/32862 ,  H01J37/3405 ,  H01J2237/081

公开(公告)号：EP2433002A1

公开(公告)日：2012-03-28

申请号：EP10728782.3

申请日：2010-05-19

Applicant: Snecma ,  Institute Of Fundamental Technological Research Polish Academy Of Sciences ,  Centre National d'Etudes Spatiales ,  Centre National de la Recherche Scientifique

Inventor： BARRAL, Serge ,  ZURBACH, Stéphan J.

IPC: F03H1/00

CPC classification number: F03H1/0075 ,  F03H1/0062 ,  H01J27/143 ,  H05H1/54

Abstract: The invention relates to a Hall effect plasma thruster including a main annular ionization and acceleration channel (120) having an open downstream end (129), at least one cathode, an annular anode that is concentric with the main annular channel (120), a pipe and a dispenser for feeding an ionizable gas into the channel (120), and a magnetic circuit for generating a magnetic field in the main annular channel (120). The main annular channel (120) includes portions of inner (127) and outer (128) annular walls located in the vicinity of the open end and (129) each including an assembly of conductive or semiconducting rings (150) juxtaposed in the form of blades separated by thin layers of insulation (152).

Abstract translation: 霍尔效应等离子体推进器包括用于电离和加速的主环形通道，其形成开放的下游端，至少一个阴极，与主环形通道同心的环形阳极，用于向可变化气体供给通道的管道和歧管，以及 用于在主环形通道中产生磁场的磁路。 主环形通道包括限定开口端的内部和外部环形壁部分，每个环形壁部分包括由精细绝缘层隔开的叠片形式的并置导电或半导电环的组合。

公开(公告)号：EP2057300A4

公开(公告)日：2010-10-27

申请号：EP07835800

申请日：2007-06-12

Applicant: GUARDIAN INDUSTRIES

Inventor： MURPHY NESTOR P ,  ROCK DAVID

IPC: H01J7/24

CPC classification number: H01J37/08 ,  H01J27/024 ,  H01J27/143 ,  H01J2237/31

Abstract: An ion source capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions is provided. The ion source includes at least one anode and at least one cathode. In certain example embodiments, the anode may have a recess formed therein in which ions to be included in the ion beam may accelerate. Walls of the recess optionally may be insulated using, for example, ceramic. One or more holes may be provided to allow a supply of gas to flow into the recess, and those holes optionally may be tapered such that they narrow towards the recess. Thus, certain example embodiments produce an ion source having a higher energy efficiency (e.g., having increasing ion energy).

公开(公告)号：EP2092544A2

公开(公告)日：2009-08-26

申请号：EP07873561.0

申请日：2007-10-19

Applicant: Applied Process Technologies, Inc.

Inventor： MADOCKS, John

IPC: H01J27/00

CPC classification number: H01J27/143 ,  H01J37/08 ,  H01J2237/082 ,  H01J2237/31 ,  H01J2237/3146

Abstract: A closed drift ion source is provided, having an anode that serves as both the center magnetic pole and as the electrical anode. The anode has an insulating material cap that produces a closed drift region to further increase the electrical impedance of the source. The ion source can be configured as a round, conventional ion source for space thruster applications or as a long, linear ion source for uniformly treating large area substrates. A particularly useful implementation uses the present invention as an anode for a magnetron sputter process.