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    MASK-LESS FABRICATION OF VERTICAL THIN FILM BATTERIES
    1.
    发明授权
    MASK-LESS FABRICATION OF VERTICAL THIN FILM BATTERIES 有权

    公开(公告)号：EP2936608B1

    公开(公告)日：2018-10-03

    申请号：EP13865636.8

    申请日：2013-12-17

    申请人： Applied Materials, Inc.

    发明人： SONG, Daoying ,  JIANG, Chong ,  KWAK, Byung Sung Leo

    IPC分类号： H01M6/40 ,  H01M4/04 ,  H01M10/058 ,  H01M10/0585 ,  H01M10/04 ,  C23C14/08 ,  C23C14/34

    CPC分类号： H01M6/40 ,  C23C14/088 ,  C23C14/34 ,  H01M4/0426 ,  H01M10/0436 ,  H01M10/0585

    摘要： A method of fabricating a thin film battery may comprise: depositing a first stack of blanket layers on a substrate, the first stack comprising a cathode current collector, a cathode, an electrolyte, an anode and an anode current collector; laser die patterning the first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; blanket depositing an encapsulation layer over the one or more second stacks; laser patterning the encapsulation layer to open up contact areas to the anode current collectors on each of the one or more second stacks; blanket depositing a metal pad layer over the encapsulation layer and the contact areas; and laser patterning the metal pad layer to electrically isolate the anode current collectors of each of the one or more thin film batteries. For electrically non-conductive substrates, cathode contact areas are opened-up through the substrate.

    MASK-LESS FABRICATION OF VERTICAL THIN FILM BATTERIES
    9.
    发明公开
    MASK-LESS FABRICATION OF VERTICAL THIN FILM BATTERIES 审中-公开
    MASKENLOSE HERSTELLUNG VON VERTIKALENDÜNNSCHICHTBATTERIEN

    公开(公告)号：EP2936608A1

    公开(公告)日：2015-10-28

    申请号：EP13865636.8

    申请日：2013-12-17

    申请人： Applied Materials, Inc.

    发明人： SONG, Daoying ,  JIANG, Chong ,  KWAK, Byung Sung Leo

    IPC分类号： H01M10/058 ,  H01M10/0585

    CPC分类号： H01M6/40 ,  C23C14/088 ,  C23C14/34 ,  H01M4/0426 ,  H01M10/0436 ,  H01M10/0585

    摘要： A method of fabricating a thin film battery may comprise: depositing a first stack of blanket layers on a substrate, the first stack comprising a cathode current collector, a cathode, an electrolyte, an anode and an anode current collector; laser die patterning the first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; blanket depositing an encapsulation layer over the one or more second stacks; laser patterning the encapsulation layer to open up contact areas to the anode current collectors on each of the one or more second stacks; blanket depositing a metal pad layer over the encapsulation layer and the contact areas; and laser patterning the metal pad layer to electrically isolate the anode current collectors of each of the one or more thin film batteries. For electrically non-conductive substrates, cathode contact areas are opened-up through the substrate.

    摘要翻译： 一种制造薄膜电池的方法可以包括：在衬底上沉积第一层覆盖层，第一堆叠包括阴极集电器，阴极，电解质，阳极和阳极集电器; 激光模具图案化第一堆叠以形成一个或多个第二堆叠，每个第二堆叠形成分离的薄膜电池的芯; 在所述一个或多个第二堆叠上毯覆盖地沉积封装层; 激光图案化所述封装层以在所述一个或多个第二堆叠中的每一个上打开与所述阳极集电体的接触区域; 在所述封装层和所述接触区域上覆盖金属焊盘层; 以及激光图案化所述金属焊盘层以电隔离所述一个或多个薄膜电池中的每一个的阳极集电器。 对于非导电衬底，阴极接触区域通过衬底开放。