公开(公告)号：EP1330860A4

公开(公告)日：2005-11-23

申请号：EP01983106

申请日：2001-10-08

申请人： CYMER INC

发明人： MORTON RICHARD G

IPC分类号： H01S3/03 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC分类号： H01S3/225 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0388 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223

摘要： A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part having the general shape of a prior art anode with a trench shaped cavity at the top and a second part comprised of lead rich brass and disposed in the trench shape cavity.

公开(公告)号：EP0732719B1

公开(公告)日：2000-12-20

申请号：EP96103215.8

申请日：1996-03-01

申请人： OSRAM SYLVANIA INC.

发明人： Schoenback, Karl H. ,  Peterkin, Frank E. ,  Byszewski, Wojciech W. ,  Dharamsi, Amin N.

IPC分类号： H01J1/02 ,  H01J61/09 ,  H01S3/06 ,  H01S3/03

CPC分类号： H01J3/025 ,  H01J1/025 ,  H01J3/04 ,  H01J17/04 ,  H01J17/06 ,  H01J27/08 ,  H01J61/067 ,  H01J61/09 ,  H01J61/12 ,  H01J61/305 ,  H01J61/66 ,  H01J61/72 ,  H01J61/78 ,  H01S3/03 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/2383

公开(公告)号：EP0152570B1

公开(公告)日：1990-08-29

申请号：EP84114844.8

申请日：1984-12-06

申请人： SIEMENS AKTIENGESELLSCHAFT

发明人： Brumme, Gerhard, Dr.,Dipl.-Phys.

IPC分类号： H01S3/038 ,  H01S3/0971 ,  H01S3/08

CPC分类号： H01S3/09716 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/081

公开(公告)号：EP1649565A2

公开(公告)日：2006-04-26

申请号：EP04778954.0

申请日：2004-07-21

申请人： Cymer, Inc.

发明人： STEIGER, Thomas, D. ,  BROWN, Joshua, C. ,  DUFFEY, Thomas, P. ,  GILLESPIE, Walter, D. ,  MORTON, Richard, G. ,  DYER, Timothy, S.

IPC分类号： H01S3/097 ,  H01R43/00 ,  H01S3/00

CPC分类号： H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

摘要： A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.

摘要翻译： 公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），其可以包括铜和铜合金阴极体，该铜阴极体具有包含用于包含铜的阴极的放电覆盖区（74）的上弯曲区域和 下部包含铜合金。

公开(公告)号：EP1256149A4

公开(公告)日：2005-12-07

申请号：EP01901827

申请日：2001-01-05

申请人： CYMER INC

发明人： PARTLO WILLIAM N ,  FOMENKOV IGOR V ,  HUEBER JEAN-MARC ,  BOR ZSOLT ,  ONKELS ECHEARD D ,  CATES MICHAEL C ,  UJAZDOWSKI RICHARD C ,  FLEUROV VLADIMIR B ,  GAIDARENKO DMITRI V

IPC分类号： H01S3/03 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/04 ,  H01S3/22 ,  H01S3/223

CPC分类号： G03F7/70025 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382

摘要： The invention incorporates methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rates. The major cause of wavelength chirp in high pulse rate gas discharge lithography lasers as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. During burst mode operation, the laser gas temperature in prior art lasers changes. This in turn changes the location of the coincident pressure waves from pulse to pulse, which ultimately alters the beam direction, causing the grating in the LNP to reflect back to the discharge region light at a slightly different wavelength. A solution to the problem is to include in the laser chamber structural elements to moderate or disperse the pressure waves and to maintain a constant laser gas temperature. One embodiment has a laser gas discharge chamber with baffles (70), heat exchanger (40), and a fan (38).

公开(公告)号：EP1395793A1

公开(公告)日：2004-03-10

申请号：EP02746487.4

申请日：2002-06-11

申请人： Honeywell International Inc.

发明人： SEIBER, Bruce, A. ,  CALLAGHAN, Timothy, J. ,  ROCK, Paul, O.

IPC分类号： G01C19/66 ,  H01S3/083 ,  H01S3/038

CPC分类号： G01C19/661 ,  H01S3/0305 ,  H01S3/034 ,  H01S3/0382 ,  H01S3/083 ,  H01S3/0835 ,  H01S3/223

摘要： A gas discharge tube such as a ring laser gyroscope includes a block. A cathode has an inwardly extending foot that engages the block. Additionally, or alternatively, an insulator is arranged to inhibit shorting between plasma in the block and a flange of the cathode.

公开(公告)号：EP0350728A3

公开(公告)日：1990-11-28

申请号：EP89111931.5

申请日：1989-06-30

申请人： W.R. Grace & Co.-Conn.

发明人： Spencer, Nicholas David ,  Dolhert, Leonard Edward

IPC分类号： C04B35/00 ,  C25B11/04 ,  H01S3/03 ,  C01B13/36 ,  C01G51/00

CPC分类号： H01S3/0388 ,  C04B35/01 ,  C25B11/04 ,  H01S3/0382

摘要： An extremely pure powder of an oxide of two or more metals, homogeneous at the atomic level, is shaped and compressed (for example, compacted by cold isostatic pressing) to provide greenware which is sintered to provide finished ceramic articles such as laser cathodes and electrodes for chlorine/caustic electrolysis. For example, pure mixed oxide powder consisting of La 0.7 Sr 0.3 CoO₃ is shaped to a tube, which is cold-­isostatically pressed at 20,000 psi, then sintered to provide a cathode for a CO₂ laser. The starting oxides can be prepared by (1) reacting in water, soluble salts of two or more metals with quaternary ammonium carbonate; the metals being those that form water-insoluble carbonates, thereby to precipitate mixed carbonates of the metals; (2) recovering and drying the precipitate; and (3) calcining the precipitate to provide mixed metal oxides homogeneous at the atomic level and substantially free from extraneous contaminants.

摘要翻译： 两种或更多种在原子级均匀的金属的氧化物的非常纯的粉末被成型和压缩（例如通过冷等静压）压实），以提供烧结的生坯，以提供最终的陶瓷制品例如激光阴极和电极 用于氯/苛性电解。 例如，由La0.7Sr0.3CoO3组成的纯混合氧化物粉末成形为管，其以20,000psi冷等静压，然后烧结以提供用于CO 2激光器的阴极。 起始氧化物可以通过（1）在水中，两种或多种金属的可溶性盐与碳酸季铵反应来制备; 金属是形成水不溶性碳酸盐的金属，从而沉淀金属的混合碳酸盐; （2）回收和干燥沉淀物; 和（3）煅烧沉淀物以提供在原子级别均匀且基本上不含外来污染物的混合金属氧化物。

公开(公告)号：EP0178810A3

公开(公告)日：1987-07-29

申请号：EP85306812

申请日：1985-09-25

申请人： Kawase, Hiromi

发明人： Kawase, Hiromi

IPC分类号： H01S03/03 ,  H01S03/22

CPC分类号： H01S3/0385 ,  H01S3/031 ,  H01S3/0382

摘要： 57 A hollow-cathode type metal ion laser (100) for producing white light includes a gas-filled tubular envelope (1) and a hollow-cathode (3) located within the tubular envelope (1). The hollow cathode (3) has holes (4) formed in a side wall portion thereof and a bore therein (3a). The hollow-cathode type metal ion laser preferably includes a plurality of metal-containing reservoirs (7) for diffusing vapour of the metal into the bore (3a) through the holes (4). Each of the metal-containing reservoirs (7) forms a portion of the tubular envelope (1) and is preferably disposed next to one of the holes (4). Further, each of the metal-containing reservoirs (7) preferably extends downwardly. Main anodes (5), one near each of the holes, are preferably disposed one within each of the metal-containing reservoirs (7). The tubular envelope (1) preferably includes sub-anodes (6) disposed one within each end portion (1b, 1c) of the tubular envelope (1) to confine the metal vapour within the bore (3a).

公开(公告)号：EP0178810A2

公开(公告)日：1986-04-23

申请号：EP85306812.0

申请日：1985-09-25

申请人： Kawase, Hiromi

发明人： Kawase, Hiromi

IPC分类号： H01S3/038 ,  H01S3/227

CPC分类号： H01S3/0385 ,  H01S3/031 ,  H01S3/0382

摘要： 57 A hollow-cathode type metal ion laser (100) for producing white light includes a gas-filled tubular envelope (1) and a hollow-cathode (3) located within the tubular envelope (1). The hollow cathode (3) has holes (4) formed in a side wall portion thereof and a bore therein (3a). The hollow-cathode type metal ion laser preferably includes a plurality of metal-containing reservoirs (7) for diffusing vapour of the metal into the bore (3a) through the holes (4). Each of the metal-containing reservoirs (7) forms a portion of the tubular envelope (1) and is preferably disposed next to one of the holes (4). Further, each of the metal-containing reservoirs (7) preferably extends downwardly. Main anodes (5), one near each of the holes, are preferably disposed one within each of the metal-containing reservoirs (7). The tubular envelope (1) preferably includes sub-anodes (6) disposed one within each end portion (1b, 1c) of the tubular envelope (1) to confine the metal vapour within the bore (3a).

公开(公告)号：EP1330860B1

公开(公告)日：2009-06-17

申请号：EP01983106.4

申请日：2001-10-08

申请人： Cymer, Inc.

发明人： MORTON, Richard, G.

IPC分类号： H01S3/225 ,  H01S3/038

CPC分类号： H01S3/225 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0388 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223

摘要： A gas discharge laser having an elongated cathode (84) and an elongated anode (83) with porous insulating layer (46) covering the anode discharge surface. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (46)(over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part (40) having the general shape of a prior art anode with a trench shaped cavity at the top and a second part (42) comprised of lead rich brass and disposed in the trench shape cavity.