摘要:
A method for producing a single-crystalline film made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, comprising the steps of preparing a target made of a material for the single-crystalline film, preparing a foundation made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, irradiating upon the target, thereby gasifying molecules constituting the target by dissociation and evaporation thereof, and epitaxially growing the single-crystalline film on the foundation.
摘要:
A process is described of forming an electroluminescent (EL) display panel formed from an EL laminate having a phosphor layer (22) sandwiched between a front and a rear set of intersecting address lines (14,24), the rear address lines (12) being formed on a substrate (12) having sufficient rigidity to support the laminate and the phosphor layer being separated from the rear address lines by one or more dielectric layers (18,20); the process comprising the steps of: (a) providing a substrate formed with a plurality of through holes (32) patterned to be proximate the ends of the address lines to be subsequently formed; (b) forming a conductive path through each of the through holes in the substrate to provide for electrical connection of each address line, subsequently formed, to the voltage driving circuit (30); (c) forming the rear spaced address lines (14) on the substrate (12), one end of each line ending adjacent a through hole (32) and being electrically connected with the conductive path therethrough; (d) forming a dielectric layer (18,20) on the rear address lines (14); (e) forming the phosphor layer (22) above the dielectric layer: (f) optionally forming a transparent dielectric layer on the phosphor layer; and then (g) forming the front spaced address lines (24) on the underlying phosphor or transparent dielectric layer, one end of each line ending adjacent a through hole and being electrically connected with the conductive path therethrough. The invention also describes a method for laser scribing a pattern in a planar laminate (preferably an EL panel) having at least one overlying layer (e.g. a transparent layer for forming the front address lines (24)) and at least one underlying layer (e.g. a phosphor layer (22)); the method comprising: applying a focused laser beam on the overlying layer side of the laminate, said laser beam having a wavelength which is substantially unabsorbed by the overlying layer (24) but which is absorbed by the underlying layer (22), such that at least a portion of the underlying layer (22) is directly ablated and the overlying layer (24) is indirectly ablated throughout its thickness (thereby forming individual front address lines (24)).
摘要:
The first feature of the present invention resides in that in a method of semiconductor crystallization, comprising a characteristic determining step of applying first crystallizing energy to a predetermined area of an amorphous semiconductor thin film to determine the size of an area so as to form a single crystal nucleus on the area; and a polycrystalline semiconductor thin film forming step of forming a polycrystalline semiconductor thin film from the amorphous semiconductor thin film, the polycrystalline semiconductor thin film forming step, comprises: a film forming step of forming an amorphous semiconductor thin film on the surface of a substrate; a first crystallizing step of applying first crystallizing energy at regular intervals on the area having the size determined by the characteristic determining step of the amorphous semiconductor thin film; and a second crystallizing step of applying second crystallizing energy to the amorphous semiconductor thin film to grow the crystal of the amorphous semiconductor thin film from the crystal nucleus formed by the first crystallizing step.
摘要:
A method of forming a polycrystalline silicon thin film improved in crystallinity and a channel of a transistor superior in electrical characteristics by the use of such a polycrystalline silicon thin film. An amorphous silicon layer of a thickness preferably of 30 nm to 50 nm is formed on a substrate. Next, substrate heating is performed to set the amorphous silicon layer to preferably 350°C to 500°C, more preferably 350°C to 450°C. Then, at least the amorphous silicon layer is exposed to laser light of an excimer laser in an extent greater than approximiately 10 cm 2 by single shot exposure. The energy density is 100 mJ/cm 2 to 500 mJ/cm 2 , preferably 280 mJ/cm 2 to 330 mJ/cm 2 . The pulse width is 80 ns to 200 ns, preferably 140 ns to 200 ns, so as to directly anneal the amorphous silicon layer and form a polycrystalline silicon thin film. The total energy of the laser used for the irradiation of excimer laser light is at least 5J, preferably at least 10J. A surface treatment laser appraratus and different surface treatments e.g. oxidation or nitridation are also described.
摘要:
There is provided a high quality epitaxial wafer on which the density of microscopic defects in the epitaxial layer is reduced to keep the gate oxide integrity thereof sufficiently high and to reduce the leakage current at the P-N junction thereof when devices are incorporated, thereby improving the yield of such devices. In an epitaxial wafer obtained by forming an epitaxial layer on a substrate, the density of IR laser scatterers is 5 x 10⁵ pieces/cm³ or less throughout the epitaxial layer.
摘要翻译:提供了一种高质量的外延晶片,其中外延层中的微观缺陷的密度降低,以保持其栅极氧化物完整性足够高,并且当器件被并入时,其PN结处的漏电流减小,从而提高产量 的这种设备。 在通过在衬底上形成外延层获得的外延晶片中,IR激光散射体的密度在整个外延层中为5×10 5个/ cm 3或更小。
摘要:
A process for bulk conversion of a solid polycrystalline ceramic body to a single crystal body which comprises heating only a portion of said polycrystalline ceramic body with a localized energy source, without melting the entire said polycrystalline ceramic body, at a temperature and for a time sufficient to convert said polycrystalline ceramic body to said single crystal body. In one embodiment of the invention, a dense polycrystalline alumina (PCA) article is converted to sapphire via a solid state conversion process. A CO₂ laser energy source has been successfully employed as a localized energy source.
摘要:
A process of epitaxially growing a semiconductor Si, Ge or SiGe single crystal layer on a semiconductor (Si or Ge) single crystal substrate, comprising the steps of: allowing a raw material gas (e.g., Si2H6 , GeH4) for the layer and a fluoride gas (e.g., Si2F6 , GeF4 , BF) of at least one element selected from the group consisting of the semiconductor element of the layer and a dopant for the layer to simultaneously flow over the substrate; and applying an ultraviolet light to the substrate to decompose the gases by an ultraviolet light excitation reaction to deposit the layer on the surface of the substrate heated at a temperature of from 250 to 400 DEG C. Prior to the epitaxial growth of the semiconductor layer, the substrate is cleaned by allowing the fluoride gas to flow over the substrate having a temperature of from a room temperature to 500 DEG C, and by irradiating an ultraviolet light to the substrate to remove a natural oxide layer from the substrate surface.
摘要:
A Bi-Sr-Ca-Cu-O ceramic superconductor contains 0112 phases which are finely dispersed in a 2212-phase matrix with its c-axis oriented perpendicular to a growth direction. A method of preparing a Bi-Sr-Ca-Cu-O ceramic superconductor comprises the steps of growing crystals under conditions satisfying:
G/R ≧ 1 and G·R ≧ 10000
where G (K/cm) represents the temperature gradient at a solid-liquid interface and R (mm/h) represents the rate of crystal growth, and annealing the grown crystals in an atmosphere having oxygen partial pressure of at least 0.05 atm. within a temperature range of 800 to 860°C for at least 2 hours.