公开(公告)号：EP4449084A1

公开(公告)日：2024-10-23

申请号：EP22908204.5

申请日：2022-11-18

申请人： Applied Materials Inc;

发明人： HILKENE, Martin ,  HOWELLS, Samuel

IPC分类号： G01L21/12 ,  H01J37/32

公开(公告)号：EP3760995B1

公开(公告)日：2023-09-27

申请号：EP20181568.5

申请日：2020-06-23

发明人： HOFMANN, Peter, Dr.

IPC分类号： G01L21/00 ,  G01L21/16 ,  G01L21/24 ,  G01L27/00 ,  G01L21/12 ,  G01L21/30

公开(公告)号：EP2898318B1

公开(公告)日：2020-07-22

申请号：EP13762520.8

申请日：2013-09-17

申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives

发明人： RUELLAN, Jérémie ,  DURAFFOURG, Laurent ,  ARCAMONE, Julien ,  ANDREUCCI, Philippe ,  COLINET, Eric

IPC分类号： G01N27/18 ,  G01N30/66 ,  G01L21/12 ,  G01N33/00

公开(公告)号：EP2288894A1

公开(公告)日：2011-03-02

申请号：EP09745456.5

申请日：2009-05-13

申请人： Helmholtz-Zentrum Berlin für Materialien und Energie GmbH

发明人： RODRIGUEZ-ALVAREZ, Humberto ,  KÖTSCHAU, Immo

IPC分类号： G01L21/12 ,  H01L31/18

CPC分类号： G01L21/12 ,  H01L31/0322 ,  H01L31/20 ,  Y02E10/541 ,  Y02P70/521

摘要： In order to efficiently produce especially semiconducting chalcogenide layers for use in CIS solar cells, a reaction box is inserted into the reaction chamber of a rapid thermal processing (RTP) vacuum furnace. The quality of the layer to be produced is regulated with the help of the process pressure (P
P ) which is determined
in situ by optically measuring the deflection of a membrane in the reaction box, said membrane being used as a pressure sensor. However, said measurement is erroneous because of the large temperature variations during RTP and can be used only with a membrane having a certain minimum size. According to the invention, a separate pressure measuring unit (08) is provided outside the RTP vacuum furnace (05). Said pressure measuring unit (08) can be gas-tightly connected to the reaction box (02) via a supply pipe (11) and comprises a measuring chamber (09) and a pressure sensor (10), preferably a Pirani-type thermal conductivity gauge (15). At least the supply pipe (11) is kept, by means of a heating device (12), at a constant temperature (T
A ) that is thermally disconnected from the RTP, lies below the process temperature (T
P ) but above the condensation temperature (T
K ) of the process gas, and is transferred to the process gas as the measured temperature (T
M ) when the process gas penetrates into the pressure measuring unit (08).

公开(公告)号：EP2237009A1

公开(公告)日：2010-10-06

申请号：EP09705829.1

申请日：2009-01-30

申请人： The Ritsumeikan Trust

发明人： KIMATA, Masafumi

IPC分类号： G01L21/12

CPC分类号： G01L21/12

摘要： A micro vacuum gauge includes a substrate, a floating structure that is held above the substrate by a supporting structure extending from the substrate in a state where the floating structure is thermally isolated from the substrate, a heat generator that is arranged in the floating structure to generate heat, and a temperature sensor that is arranged in the floating structure to measure a difference in temperature between the substrate and the floating structure. A second member having a lower emissivity than a first member surrounding the heat generator and the temperature sensor is formed at least on a surface of the floating structure by being joined to the first member.

摘要翻译： 微型真空计包括衬底，浮动结构，其通过在浮动结构与衬底热隔离的状态下从衬底延伸的支撑结构保持在衬底上;散热结构，布置在浮动结构中 产生热量，以及布置在浮动结构中以测量衬底和浮动结构之间的温度差的温度传感器。 通过与第一构件接合，至少在浮动结构的表面上形成具有低于围绕发热体的第一构件和温度传感器的较低的发射率的第二构件。

公开(公告)号：EP1728059A1

公开(公告)日：2006-12-06

申请号：EP05731265.4

申请日：2005-03-18

申请人： Intel Corporation

发明人： ARANA, Leonel ,  ZOU, Yuelin, Lee ,  HECK, John

IPC分类号： G01L11/00 ,  G01L21/12 ,  G01M3/32 ,  H05K5/06

CPC分类号： G01L11/002 ,  G01L21/12 ,  G01M3/186 ,  G01M3/3272 ,  H01L2224/48091 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

摘要： A microfabricated vacuum sensor may be formed using semiconductor integrated circuit processes. The sensor may be formed inside an enclosure with a microfabricated component. The sensor may then be used to measure the pressure within the enclosure.

公开(公告)号：EP1476737A2

公开(公告)日：2004-11-17

申请号：EP03739633.0

申请日：2003-02-07

申请人： SAES GETTERS S.p.A.

发明人： GIANNANTONIO, Roberto ,  FUMAGALLI, Alessandro ,  GALLIANI, Gianluca ,  RIZZI, Enea

IPC分类号： G01L21/00 ,  G01L21/12

CPC分类号： G01L21/12 ,  E04B1/803 ,  Y02A30/242 ,  Y02B80/12

摘要： Vacuum panel comprising a discontinuous or porous filling material (5) enclosed between at least two barrier sheets (6) mutually joined along the edges, between which are gas-tightly arranged one or more rheophores (7, 7') suitable for electrically powering at least one device (1, 2, 3, 3', 4, 4') arranged inside the vacuum panel, in particular a sensor for measuring the pressure (P) of the residual gases in the panel itself.

公开(公告)号：EP0379841B1

公开(公告)日：1993-09-15

申请号：EP89810928.5

申请日：1989-12-08

申请人： BALZERS AKTIENGESELLSCHAFT

发明人： Stocker, Rudolf, Dr. ,  Schaedler, Walter

IPC分类号： G01L21/12 ,  G01L21/22

CPC分类号： G01L21/12 ,  G01L21/22

公开(公告)号：EP3667280B1

公开(公告)日：2024-02-28

申请号：EP19213844.4

申请日：2019-12-05

发明人： Sato, Takanobu ,  Nakajima, Toyoaki ,  Miyashita, Takeshi ,  Fukuhara, Masahiro ,  Yoshizawa, Hideki

IPC分类号： G01L21/12 ,  G01L19/08 ,  G01L19/12

公开(公告)号：EP4016034A1

公开(公告)日：2022-06-22

申请号：EP22156549.2

申请日：2019-02-25

申请人： MKS Instruments, Inc.

发明人： BRUCKER, Gerardo, A. ,  SWINNEY, Timothy, C.

IPC分类号： G01L21/12

摘要： A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.