公开(公告)号：EP4269788B1

公开(公告)日：2024-12-18

申请号：EP23168121.4

申请日：2023-04-14

Inventor： DOWNS, John ,  MOHAJERI, Mahdi ,  JADIDIAN, Bahram

IPC: F03G7/06 ,  H01J7/18

公开(公告)号：EP4437566A1

公开(公告)日：2024-10-02

申请号：EP22896202.3

申请日：2022-11-22

Applicant: Gaia Securities Limited

Inventor： EGELY, Gyorgy

IPC: G21B3/00 ,  H01J17/06 ,  H01J37/32 ,  H01J7/02

CPC classification number: H05H1/00 ,  H05H1/48 ,  G21B3/006

公开(公告)号：EP4407651A1

公开(公告)日：2024-07-31

申请号：EP22871990.2

申请日：2022-09-21

Applicant: Beijing NAURA Microelectronics Equipment Co., Ltd.

Inventor： WEI, Jing ,  CHEN, Xing ,  ZHANG, Yu ,  WEI, Gang ,  SHAN, Guodao ,  ZHONG, Chenyu ,  YOU, Yanyan ,  YANG, Jing

IPC: H01J7/24

Abstract: The present disclosure provides a power control method and device of a lower RF power supply, and semiconductor process equipment. The method includes, when a processing chamber starts semiconductor processing, with a predetermined power compensation equation and according to a pre-obtained first RF circuit parameter set of a reference chamber and a second RF circuit parameter set of a present processing chamber performing the semiconductor processing, obtaining a power compensation coefficient of the present processing chamber relative to the reference chamber; according to the power compensation coefficient and a power setting value of the lower RF power supply of the present processing chamber, calculating a power compensation value of the present processing chamber relative to the reference chamber, and controlling the lower RF power supply to output the power compensation value. In the technical solution of the present disclosure, processing result consistency of different processing chambers can be improved.

公开(公告)号：EP3567617B1

公开(公告)日：2024-07-03

申请号：EP19173433.4

申请日：2019-05-09

IPC: H01F27/02 ,  H01F38/14 ,  H01J7/02 ,  B60L53/12 ,  H01F27/36 ,  H02J50/10 ,  H02J7/00 ,  H02J50/70 ,  B60L53/302

CPC classification number: H01F27/02 ,  H01F38/14 ,  H02J50/10 ,  B60L53/12 ,  H02J7/0042 ,  B60L53/302 ,  H02J50/70 ,  Y02T10/7072 ,  Y02T10/70 ,  Y02T90/14 ,  Y02T90/12 ,  H01F27/366

公开(公告)号：EP3518275B1

公开(公告)日：2023-06-07

申请号：EP18153198.9

申请日：2018-01-24

Inventor： RIEPE, Dirk ,  KANIGOWSKI, Uwe ,  LOESENBECK, Jan Boris ,  KAEMMERER, Sven

IPC: H01J61/56 ,  H01J61/72 ,  H01J61/28 ,  H01J5/54 ,  H01J7/44 ,  C02F1/32 ,  H01J61/52

公开(公告)号：EP3304573B1

公开(公告)日：2021-05-12

申请号：EP16800701.1

申请日：2016-05-26

Inventor： SCHULTZ, William ,  DELGADO, Gildardo ,  ROSE, Garry

IPC: H01J37/065 ,  H01J3/02 ,  H01J3/40 ,  H01J7/18 ,  H01J37/28

公开(公告)号：EP3405591B1

公开(公告)日：2019-04-24

申请号：EP17727550.0

申请日：2017-05-25

Applicant: Saes Getters S.p.A.

Inventor： GALLITOGNOTTA, Alessandro ,  CODA, Alberto

IPC: C22C1/04 ,  C22C16/00 ,  H01J7/18 ,  H01J61/26 ,  B22F9/02 ,  B22F1/00

公开(公告)号：EP2427700B1

公开(公告)日：2019-01-23

申请号：EP10720733.4

申请日：2010-05-07

Applicant: Siemens Concentrated Solar Power Ltd.

Inventor： BARKAI, Menashe

IPC: H01J7/18 ,  H01J29/94 ,  F24S40/46 ,  F24S40/40

公开(公告)号：EP2142294B1

公开(公告)日：2018-06-06

申请号：EP08719398.3

申请日：2008-04-01

Applicant: SAES GETTERS S.p.A.

Inventor： GIANNANTONIO, Roberto ,  CATTANEO, Lorena

IPC: B01J20/02 ,  B01J20/04 ,  B01J20/06 ,  B01J20/16 ,  B01J20/18 ,  B01J20/26 ,  B01J20/28 ,  B01J20/30 ,  H01J7/18 ,  H05B33/04 ,  H01L23/26 ,  B82Y30/00

CPC classification number: B01J20/26 ,  B01J20/041 ,  B01J20/046 ,  B01J20/06 ,  B01J20/16 ,  B01J20/18 ,  B01J20/261 ,  B01J20/262 ,  B01J20/28007 ,  B01J20/28023 ,  B01J20/28026 ,  B01J20/28028 ,  B01J20/30 ,  B82Y30/00 ,  H01J7/183 ,  H01L23/26 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

Abstract: There is described a method for the removal of gaseous contaminants from the housings of devices sensitive to the presence of such contaminants by means of nanostructured sorbers, wherein the sorber is in the form of a fiber containing an active material at its inside. Nanostructured sorbers and their manufacturing method are also described.

公开(公告)号：EP3144954A4

公开(公告)日：2018-01-03

申请号：EP15791920

申请日：2015-05-04

Applicant: TYCO ELECTRONICS (SHANGHAI) CO LTD

Inventor： WANG SHAOYONG ,  SONG YUMING ,  DAI FENG ,  ZOU LI

IPC: H01F38/14 ,  H01F1/34 ,  H01F27/28 ,  H01J7/00

CPC classification number: H01F38/14 ,  H01F1/342 ,  H01F27/2823 ,  H01J7/00

Abstract: The present disclosure discloses a wireless power transmission device including a first coil and a second coil electromagnetically coupled to the first coil without contacting therewith. At least a portion of one of the first coil and the second coil passes through at least a portion of a space defined by the other of the first coil and the second coil. In the present disclosure, since one of a transmitting coil and a receiving coil passes through the other of the transmitting coil and the receiving coil, strength of electromagnetic coupling between the two coils can be improved so as to increase the strength of electromagnetic coupling between the coils without increasing sizes thereof.