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公开(公告)号：EP0895706B2
公开(公告)日：2008-08-06
申请号：EP97921060.6
申请日：1997-04-25
申请人： Jettec AB
IPC分类号： H05G2/00
摘要： A method for generating X- or EUV-radiation via laser plasma emission, in which at least one target (17) is generated in a chamber, and at least one pulsed laser beam (3) is focused on the target (17) in the chamber. The target is generated in the form of a jet (17) of a liquid, and the laser beam (3) is focused on a spatially continuous portion of the jet (17). An apparatus for generating X- or EUV-radiation via laser plasma emission according to the method comprises a means for generating at least one laser beam (3), a chamber, a means (10) for generating at least one target (17) in the chamber, and a means (13) for focusing the laser beam (3) on the target (17) in the chamber (8). The target-generating means (10) is adapted to generate a jet (17) of a liquid. The focusing means (13) is adapted to focus the laser beam (3) on a spatially continuous portion of the jet (17).
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2.发明公开
公开(公告)号：EP4398684A1
公开(公告)日：2024-07-10
申请号：EP22864649.3
申请日：2022-08-31
申请人： Kyocera Corporation
摘要： A plasma-resistant laminate of the present disclosure includes a substrate, a membrane electrode formed on the substrate, and a dielectric layer formed on the membrane electrode, the substrate includes sapphire, the dielectric layer includes an oxide including yttrium, and the membrane electrode is made of an active metal, a constituent element of the substrate or the dielectric layer, or a laminate thereof.
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3.发明公开METHOD AND SYSTEM FOR REAL-TIME CALCULATING PHASE SHIFT SIGNAL, PLASMA DIAGNOSTIC METHOD AND SYSTEM 审中-公开实时计算相移信号的方法和系统，等离子体诊断方法和系统
公开(公告)号：EP3297408A1
公开(公告)日：2018-03-21
申请号：EP15894634.3
申请日：2015-06-11
发明人： YAN, Zhou
摘要： A method and a system for calculating a dynamically phase-shifted signal in real-time, wherein the method comprises following steps: respectively segmenting intermediate frequency signals of a measurement channel and a reference channel; respectively reading the intermediate frequency signals of the measurement channel and the reference channel for a current time period, and converting the intermediate frequency signals of the measurement channel and the reference channel into digital signals by A/D conversion; respectively converting the obtained digital signals of the measurement channel and the reference channel for the current time period into frequency domain signals by Fourier transform, meanwhile respectively finding accurate frequencies for the current time period; according to the accurate frequencies for the current time period, performing conjugate calculation on the frequency domain signals of the reference channel and the measurement channel for the current time period to obtain a phase difference. The method and the system for calculating the dynamically phase-shifted signal in real-time can realize unattended and reliable phase calculation and phase output in real time. The diagnostic method and the system for the nuclear fusion plasma using the method and the system for calculating the phase-shifted signal in real-time can further reliably realize the unattended and real-time measurement of the electron density and the current density.
摘要翻译： 一种实时计算动态相移信号的方法和系统，其中该方法包括以下步骤：分别对测量通道和参考通道的中频信号进行分段; 在当前时间段分别读取测量通道和参考通道的中频信号，并通过A / D转换将测量通道和参考通道的中频信号转换为数字信号; 通过傅立叶变换将获取的当前时间段的测量通道和参考通道的数字信号分别转换为频域信号，同时分别找到当前时间段的精确频率; 根据当前时间段的精确频率，对参考通道的频域信号和当前时间段的测量通道进行共轭计算，得到相位差。 实时计算动态相移信号的方法和系统可以实现无人值守可靠的相位计算和相位输出。 使用实时计算移相信号的方法和系统的核聚变等离子体的诊断方法和系统可以进一步可靠地实现对电子密度和电流密度的无人值守实时测量。
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公开(公告)号：EP2733347A1
公开(公告)日：2014-05-21
申请号：EP12814802.0
申请日：2012-07-13
申请人： Imagineering, Inc.
发明人： IKEDA, Yuji
CPC分类号： F02P23/045 , F02M27/042 , F02P3/01 , F02P23/04 , H05H1/00 , H05H1/04 , H05H1/46 , H05H2001/463
摘要： To downsize an electromagnetic wave generation device in a plasma generation device that generates electromagnetic wave plasma by emitting to a target space an electromagnetic wave amplified by means of a solid state amplifying element. The plasma generation device includes the electromagnetic wave generation device that outputs the electromagnetic wave amplified by means of the solid state amplifying element, and an emission antenna for emitting the electromagnetic wave outputted from the electromagnetic wave generation device to the target space. The plasma generation device causes the emission antenna to emit the electromagnetic wave to the target space, thereby generating the electromagnetic wave plasma. The plasma generation device has a characteristic that an output waveform of the electromagnetic wave generation device has a peak during a rise, and is adapted to output the electromagnetic wave to the emission antenna without reducing the peak during the rise of the output waveform.
摘要翻译： 为了使等离子体产生装置中的电磁波产生装置小型化，该等离子体产生装置通过向目标空间发射通过固态放大元件放大的电磁波来产生电磁波等离子体。 等离子体产生装置包括：电磁波产生装置，输出由固态放大元件放大的电磁波;以及发射天线，用于将从电磁波产生装置输出的电磁波发射到目标空间。 等离子体产生装置使发射天线将电磁波发射到目标空间，由此产生电磁波等离子体。 等离子体产生装置具有这样的特性，即电磁波产生装置的输出波形在上升期间具有峰值，并且适于在不减小输出波形上升期间的峰值的情况下将电磁波输出到发射天线。
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公开(公告)号：EP0895706B1
公开(公告)日：2003-06-04
申请号：EP97921060.6
申请日：1997-04-25
申请人： Jettec AB
IPC分类号： H05G2/00
摘要： A method for generating X- or EUV-radiation via laser plasma emission, in which at least one target (17) is generated in a chamber, and at least one pulsed laser beam (3) is focused on the target (17) in the chamber. The target is generated in the form of a jet (17) of a liquid, and the laser beam (3) is focused on a spatially continuous portion of the jet (17). An apparatus for generating X- or EUV-radiation via laser plasma emission according to the method comprises a means for generating at least one laser beam (3), a chamber, a means (10) for generating at least one target (17) in the chamber, and a means (13) for focusing the laser beam (3) on the target (17) in the chamber (8). The target-generating means (10) is adapted to generate a jet (17) of a liquid. The focusing means (13) is adapted to focus the laser beam (3) on a spatially continuous portion of the jet (17).
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公开(公告)号：EP0685117B1
公开(公告)日：1996-09-04
申请号：EP94907553.5
申请日：1994-02-11
CPC分类号： H01L33/346 , H01L2924/0002 , H05H1/00 , H01L2924/00
摘要： A plasma is generated by applying a voltage on mutually spaced apart spots of a microporous body. This may be done for example by applying a 50 to 100 V voltage through a microporous layer of a silicium wafer.
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公开(公告)号：EP3427333A1
公开(公告)日：2019-01-16
申请号：EP16798303.0
申请日：2016-10-20
申请人： Raytheon Company
发明人： STRATIS, Glafkos K. , VANDERWYST, Anton , SUNNE, Wayne L. , DERRICK, David G. , EDMISTON, James P. , MANZI, David G. , CHOE, Howard C. , SAMUEL, Alphonso A.
CPC分类号： H01Q3/34 , B64C1/36 , B64C30/00 , B64G1/62 , B64G1/66 , F42B15/10 , F42B15/12 , F42B15/34 , G01B7/06 , G01N9/24 , H01Q1/281 , H01Q1/42 , H01Q21/20 , H01Q21/28 , H05H1/00 , H05H1/0062
摘要： A sensor system and method of reducing plasma-induced communication inhibition for a main antenna includes using auxiliary antennas for detecting a density of plasma that affects operation of the main antenna, and re-orienting an electromagnetic field around the main antenna in response to the density detected to reduce effect of the plasma on the main antenna. The auxiliary antennas are also operable for data link communication and switchable such if the density of the plasma inhibits receipt or sending of signals by one of the auxiliary antennas, another one of the auxiliary antennas may be used for data link communication.
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9.发明公开DIELECTRIC BARRIER DISCHARGE PLASMA METHOD AND APPARATUS FOR SYNTHESIZING METAL PARTICLES 审中-公开用于合成金属颗粒的介质阻挡放电等离子体方法和设备
公开(公告)号：EP3233338A1
公开(公告)日：2017-10-25
申请号：EP15868777.2
申请日：2015-12-15
申请人： Université Laval
CPC分类号： C25C7/06 , B22F1/0014 , B22F1/0018 , B22F9/12 , B22F9/16 , B22F2301/255 , B22F2999/00 , C25C1/20 , C25C5/02 , C25C7/00 , C25C7/02 , H05H1/00 , H05H1/2406 , H05H2001/2412 , H05H2242/10 , H05H2245/124 , B22F9/24 , B22F2202/13 , B22F2201/013 , B22F2201/02 , B22F2201/03 , B22F2201/04 , B22F2201/05 , B22F2201/10 , B22F2201/50
摘要： A dielectric barrier discharge (DBD) plasma apparatus for synthesizing metal particles is provided. The DBD plasma apparatus includes an electrolyte vessel for receiving an electrolyte solution comprising metal ions; an electrode spaced-apart from the electrolyte vessel; a dielectric barrier interposed between the electrolyte vessel and the electrode such that, when the electrolyte solution is present in the electrolyte vessel, the dielectric barrier and an upper surface of the electrolyte solution are spaced-apart from each other and define a discharge area therebetween; and gas inlet and outlet ports in fluid communication with the discharge area such that supplying gas in the discharge area while applying an electrical potential difference between the electrode and the electrolyte solution cause a plasma to be produced onto the electrolyte solution, the plasma interacting with the metal ions and synthesizing metal particles. A method for synthesizing metal particles using a DBD plasma apparatus is also provided.
摘要翻译： 提供了用于合成金属颗粒的介质阻挡放电（DBD）等离子体装置。 DBD等离子体装置包括用于接收包含金属离子的电解质溶液的电解质容器; 与电解质容器间隔开的电极; 置于电解质容器和电极之间的电介质阻挡层，使得当电解质溶液存在于电解质容器中时，电介质阻挡层和电解质溶液的上表面彼此间隔开并在其间限定放电区; 以及与排放区域流体连通的气体入口和出口端口，使得在排放区域中供应气体的同时在电极和电解质溶液之间施加电势差，导致在电解质溶液上产生等离子体，等离子体与 金属离子和合成金属颗粒。 还提供了使用DBD等离子体装置合成金属颗粒的方法。
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公开(公告)号：EP4442286A1
公开(公告)日：2024-10-09
申请号：EP24168230.1
申请日：2024-04-03
CPC分类号： A61L2/22 , A61L2202/1520130101 , A61L2202/1420130101 , A61L2/24 , A61L9/22 , A61L2209/11120130101 , F24F8/30 , H05H1/00 , A61L2/14 , A61L2202/2520130101
摘要： The present invention relates to a method for carrying out, tracing, monitoring and controlling an airborne disinfection treatment of surfaces of a confined environment, using a system of devices and a decontaminant.
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