公开(公告)号：JP2009193896A

公开(公告)日：2009-08-27

申请号：JP2008035441

申请日：2008-02-18

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： MORITA YUTAKA ,  TAKEUCHI RYOZO ,  YOKOSUKA TOSHIYUKI

IPC: H05H7/14 ,  H01J37/06 ,  H05H5/03

CPC classification number: H05H7/00 ,  H01J37/026 ,  H01J37/04 ,  H01J2237/004 ,  H01J2237/0203 ,  H01J2237/04735

Abstract: PROBLEM TO BE SOLVED: To restrain electric discharge, if any, generated between acceleration electrodes, since scores of kilovolts of voltage is applied between the acceleration electrodes in a charged particle accelerator.
SOLUTION: In the charged particle accelerator, a part or the whole of the accelerator electrodes are covered by a discharge restraining layer made of ceramic with a high melting point in comparison with the metal or an alloy. Fine particles of impurities are accelerated with an electric field by a ceramic discharge restraining layer or an alloy discharge restraining layer, and metal vapor is hardly generated from the electrode in collision with the electrode. The electric discharge between the electrodes is restrained since they hardly become ionized plasma.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：为了抑制在加速电极之间产生的放电（如果有的话），因为在带电粒子加速器中的加速电极之间施加了几千伏特的电压。 解决方案：在带电粒子加速器中，与金属或合金相比，部分或全部加速电极被由具有高熔点的陶瓷制成的放电抑制层覆盖。 通过陶瓷放电抑制层或合金放电抑制层，通过电场加速杂质的细小颗粒，与电极碰撞时几乎不会从电极产生金属蒸气。 电极之间的放电由于几乎不变成电离等离子体而被抑制。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2009115724A

公开(公告)日：2009-05-28

申请号：JP2007291460

申请日：2007-11-09

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOSHINARI KIYOMI ,  HIRABAYASHI TSUDOI ,  YOKOSUKA TOSHIYUKI ,  KOBAYASHI KINYA

IPC: G01N27/62

Abstract: PROBLEM TO BE SOLVED: To provide a mass spectrograph and a mass spectrometry capable of performing analysis in real time by reducing the number of parent ion species that should be dissociated for mass spectrometry.
SOLUTION: The mass spectrograph 1 has: a mass spectrometry section 13 for performing mass spectrometry of dissociated ions obtained by separating a substance included in a sample 10 and dissociating parent ions selected from ionized ion species; and a database 7 for storing the mass-to-charge ratio of ion species acquired by the mass spectrometry section 13 and characteristic data capable of identifying a plurality of ion species acquired by a preprocessing system. In the mass spectrometry section 13, the selection of parent ions and the mass spectrometry of dissociated ions are repeated by replacing the dissociated ions with ion species and parent ions that are not ion species that can be identified from the database 7 are selected. In the database 7, the mass-to-charge ratio of ion species where a substance labeled by a reagent has been ionized and characteristic data is reproduced, and the reproduced mass-to-charge ratio is rewritten from the increase/decrease in the number of masses when the substance is labeled by the reagent.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供能够通过减少用于质谱分离的母离子种类的数量来实时进行分析的质谱仪和质谱仪。 质谱仪1具有：用于对通过分离样品10中包含的物质并离解选自离子化离子物质的亲本离子获得的离解离子进行质谱分析的质谱部13; 以及数据库7，用于存储由质谱分析部13获取的离子种类的质荷比和能够识别由预处理系统获取的多种离子种类的特征数据。 在质谱分析部分13中，通过用离子种类代替离解的离子并选择不能从数据库7中识别的离子种类的亲本离子，重复离子离子的选择和质谱分离。 在数据库7中，将通过试剂标记的物质离子化的离子物质的质荷比与再生特征数据进行比较，并且从数量的增加/减少重写质量 - 质荷比 当物质被试剂标记时。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2005091344A

公开(公告)日：2005-04-07

申请号：JP2004152693

申请日：2004-05-24

Applicant: Hitachi High-Technologies Corp ,  Hitachi Ltd ,  株式会社日立ハイテクノロジーズ ,  株式会社日立製作所

Inventor： YOSHINARI KIYOMI ,  YOKOSUKA TOSHIYUKI ,  SANO AKIHIRO ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI ,  KOBAYASHI KINYA ,  UCHIDA NORITAKA

IPC: G01N27/62 ,  H01J49/26

CPC classification number: G01N33/6851 ,  G01N33/6848

Abstract: PROBLEM TO BE SOLVED: To avoid a peptide ion as a tandem mass spectrometry analysis target derived from the large quantity of a manifested protein previously measured, when structures of a protein and a peptide are analyzed by tandem mass spectrometry, and automatically determine and process the peptide as the tandem mass spectrometry analysis target derived from the small quantity of the protein conventionally difficult to be analyzed in real-time during measurement. SOLUTION: A process for selecting a peptide peak not measured as the next tandem analysis target is implemented in real time during the measurement, by automatically storing data of the protein previously measured and the peptide derived from it in an internal database, accurately comparing them with measured data and determining an isotope peak. The duplicated measurement of the peptide derived from the same protein is avoided. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了避免肽离子作为源自大量先前测量的表现蛋白质的串联质谱分析目标，当通过串联质谱法分析蛋白质和肽的结构时，并自动确定 并且作为来自在测量期间通常难以实时分析的少量蛋白质的串联质谱分析目标进行处理。 解决方案：在测量期间，通过自动将先前测量的蛋白质的数据和从其获得的肽准确地存储在内部数据库中，准确地实现了用于选择未被测量为下一个串联分析目标的肽峰的方法。 将其与测量数据进行比较并确定同位素峰。 避免了衍生自相同蛋白质的肽的重复测量。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2013120169A

公开(公告)日：2013-06-17

申请号：JP2011269519

申请日：2011-12-09

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  RI AKIRA ,  KAZUMI HIDEYUKI ,  KOBAYASHI KINYA

IPC: G01B15/04 ,  G01B15/00 ,  H01J37/22 ,  H01J37/28

Abstract: PROBLEM TO BE SOLVED: To provide a pattern measuring device and a computer program capable of performing highly accurate measurement of a pattern height, without depending on existence of electrification, etc.SOLUTION: A pattern measuring device and a computer program are configured: to detect a portion separated away from an edge of the pattern and having a predetermined signal strength, according to a detection signal obtained by scanning a specimen with an electron beam; and to derive a height of the pattern on the basis of positional information of the portion. With this configuration, highly accurate measurement of a pattern height can be performed without depending on existence of electrification, etc.

Abstract translation: 要解决的问题：提供一种图案测量装置和能够对图案高度进行高精度测量的计算机程序，而不依赖于电气化的存在等。解决方案：图案测量装置和计算机 程序被配置为：根据通过用电子束扫描样本获得的检测信号来检测远离图案的边缘并具有预定信号强度的部分; 并且基于该部分的位置信息导出图案的高度。 利用这种配置，可以在不依赖于电气化等的情况下进行高精度的图案高度的测量。（C）2013，JPO＆INPIT

公开(公告)号：JP2012252913A

公开(公告)日：2012-12-20

申请号：JP2011125475

申请日：2011-06-03

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： TSUNO NATSUKI ,  KAZUMI HIDEYUKI ,  MOCHIZUKI YUZURU ,  MIWA TAKAFUMI ,  KIMURA YOSHINOBU ,  YOKOSUKA TOSHIYUKI

IPC: H01J37/22 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/265 ,  G01B15/04 ,  H01J37/28 ,  H01J2237/24585 ,  H01J2237/2803

Abstract: PROBLEM TO BE SOLVED: To improve selectivity and image quality of sample information obtained from a secondary electronic signal in a method for observing structure and characteristics of a sample by an electron microscope.SOLUTION: Superposition of unnecessary information is prevented and high quality image observation is realized by intermittently irradiating with the electron beam and selecting a secondary electron signal which reflects necessary sample information based on detection time in a transient response of the secondary electron obtained by an intermittent electron beam irradiation, when evaluating structure observation or material characteristics of the sample using the electron beam.

Abstract translation: 要解决的问题：通过电子显微镜观察样品的结构和特性的方法的方法，提高从二次电子信号获得的样品信息的选择性和图像质量。 解决方案：防止不必要的信息的叠加，并通过间歇地照射电子束来实现高质量的图像观察，并且选择二次电子信号，该二次电子信号基于在二次电子的瞬态响应中基于检测时间反映所需的样本信息 当使用电子束评估样品的结构观察或材料特​​性时，间歇电子束照射。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2010117377A

公开(公告)日：2010-05-27

申请号：JP2010044603

申请日：2010-03-01

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOSHINARI KIYOMI ,  YOKOSUKA TOSHIYUKI ,  SANO AKIHIRO ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI ,  KOBAYASHI KINYA ,  UCHIDA NORITAKA

IPC: G01N27/62 ,  G01N33/00 ,  G01N33/68 ,  H01J49/04

CPC classification number: G01N33/6851 ,  G01N33/6848 ,  H01J49/0031 ,  H01J49/0036 ,  H01J49/004

Abstract: PROBLEM TO BE SOLVED: To avoid a peptide ion derived from a protein that has already been measured and that is expressed in great quantities as a tandem mass spectroscopy target, and to determine a peptide or the like derived from a minute amount of protein, which has heretofore been difficult to analyze as a tandem mass spectroscopy target, automatically within the real time of measurement, during the structural analysis of a protein or peptide by tandem mass spectroscopy. SOLUTION: Data concerning a protein that has already been measured and a peptide derived from the protein are automatically stored in an internal database. The stored data are collated with measured data with high accuracy to determine an isotope peak. In this way, the process of selecting a peptide peak that has not been measured as the target for the next tandem analysis can be performed within the real time of measurement and a redundant measurement of peptides derived from the same protein can be avoided. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 待解决的问题：为了避免衍生自已经测量并且作为串联质谱目标大量表达的蛋白质的肽离子，并且确定衍生自微量量的肽的肽等 蛋白质在蛋白质或肽通过串联质谱法的结构分析期间，在测量的实际时间内自动地被分析为串联质谱目标。 解决方案：已经测量的蛋白质和源自蛋白质的肽的数据被自动存储在内部数据库中。 存储的数据与测量数据以高精度进行核对以确定同位素峰。 以这种方式，可以在测量的实时内进行未被测定为下一个串联分析的靶标的肽峰的过程，并且可以避免衍生自相同蛋白质的肽的冗余测量。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2007218692A

公开(公告)日：2007-08-30

申请号：JP2006038461

申请日：2006-02-15

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOSHINARI KIYOMI ,  TERUI YASUSHI ,  YOKOSUKA TOSHIYUKI ,  KOBAYASHI KINYA ,  HIRABAYASHI TSUDOI

IPC: G01N27/62 ,  G01N30/72

CPC classification number: H01J49/02 ,  H01J49/004

Abstract: PROBLEM TO BE SOLVED: To provide a tandem type mass analyzing system capable of performing fluctuation analysis with high efficiency by a tandem type mass analyzer. SOLUTION: A predetermined number of m/z regions are set, all of ions contained in the m/z regions are collectively separated at every m/z region and mass analysis is performed to acquire measured MS 2 data. The measured MS 2 data is compared with the reference MS 2 data stored in a reference database to detect the difference between both of them. Mass analysis not separating all of ions contained in the m/z region where a fluctuation component is detected is performed with respect to the m/z region to acquire measured MS 1 data and the measured MS 1 data is compared with reference MS 1 data to detect the difference between these data. Parent ions considered to be the cause of the fluctuation component are estimated from the difference and separated to perform mass analysis. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种能够通过串联式质量分析器以高效率进行波动分析的串联型质量分析系统。 解决方案：设置预定数量的m / z区域，m / z区域中包含的所有离子在每个m / z区域被共同分离，并进行质量分析以获得测量的MS SP>数据。 将测量的MS 2 数据与存储在参考数据库中的参考MS 2 数据进行比较，以检测它们之间的差异。 对于m / z区域进行不分离检测出波动成分的m / z区域中包含的所有离子的质量分析，得到测定的MS 1 数据，测定的MS 1 数据与参考MS 1 数据进行比较，以检测这些数据之间的差异。 被认为是波动成分的原因的父离子是从差异估计出来的，分离出来进行质量分析。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006177877A

公开(公告)日：2006-07-06

申请号：JP2004373475

申请日：2004-12-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  KOBAYASHI KINYA ,  YOSHINARI KIYOMI ,  OTAKE ATSUSHI ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI

IPC: G01N27/62

CPC classification number: H01J49/004 ,  H01J49/0031

Abstract: PROBLEM TO BE SOLVED: To determine whether a measured object is a material required by a user within a real time of measurement when a material (especially protein, sugar chain, or the like) is analyzed.
SOLUTION: In a mass spectrometry system using a tandem mass spectrometry device, a specific material obtained by sample separation is ionized, the spectrum acquired by mass spectrometry of it is compared with a previously recorded specific spectrum, whether both match with each other is determined, and, when they match with each other, the specific ion is further ionized and detail analysis is performed. The present invention discloses the mass spectrometry method, the diagnosis system and inspection system using the mass spectrometry system, and the program for making a computer for controlling these systems attain a desired function.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 待解决的问题：当分析材料（特别是蛋白质，糖链等）时，确定测量对象是否是在测量的实际时间内用户所需的材料。 解决方案：在使用串联质谱装置的质谱系统中，通过样品分离获得的特定材料被电离，将通过其质谱获得的光谱与先前记录的特定光谱进行比较，两者是否彼此匹配 并且当它们彼此匹配时，特定离子被进一步电离并进行细节分析。 本发明公开了使用质谱系统的质谱法，诊断系统和检查系统，以及用于制造控制这些系统的计算机的程序达到期望的功能。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005241251A

公开(公告)日：2005-09-08

申请号：JP2004047172

申请日：2004-02-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  HIRABAYASHI TSUDOI ,  TERUI YASUSHI ,  KOBAYASHI KINYA ,  YOSHINARI KIYOMI

IPC: G01N27/62 ,  G01N30/72 ,  G01N30/86 ,  G01N30/88 ,  H01J49/00

CPC classification number: H01J49/0036 ,  H01J49/004

Abstract: PROBLEM TO BE SOLVED: To solve the problems in the present mass spectrometry system wherein it cannot be determined during measurement whether information necessary for analysis is sufficient or not when analyzing a material (especially a protein, a sugar chain or the like), and it is difficult to determine an isomer having a completely equal mass or a compound having a very similar mass only from MS data. SOLUTION: In this system, it is determined during the actual time of measurement whether a retention time of LC (or GC) of a peptide generated when a protein is subjected to enzymatic hydrolysis agrees with a predicted retention time estimated from an amino acid sequence predicted from MS 2 mass spectrum data, thereby determines the quality (information quantity) of the MS 2 mass spectrum data. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题为了解决在分析材料（特别是蛋白质，糖链等）时在测量中不能确定分析所需的信息是否足够的本质谱系统中的问题， ，并且难以从MS数据确定具有完全相同质量的异构体或具有非常相似质量的化合物。 解决方案：在该系统中，在实际测量时间确定蛋白质经受酶促水解后产生的肽的LC（或GC）的保留时间是否与从氨基酸估计的预测保留时间一致 由MS 2质谱数据预测的酸序列，从而确定MS 2质谱数据的质量（信息量）。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2010205864A

公开(公告)日：2010-09-16

申请号：JP2009048719

申请日：2009-03-03

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YOKOSUKA TOSHIYUKI ,  TSUCHIYA TSUGUTOSHI ,  TAGO KAZUATSU ,  RI AKIRA ,  KOBAYASHI KINYA

IPC: H01L21/66 ,  G01N23/225 ,  H01J37/22

Abstract: PROBLEM TO BE SOLVED: To provide an image forming apparatus that forms an image which is reflected of the influence due to electrostatic charging, or the like, without having to irradiate a charged particle beam on a sample.
SOLUTION: The image forming apparatus acquires information of an area including the irradiation range of a charged particle beam from the design data of a semiconductor device and calculates the quantity of electrons that are detected at a pixel section, when the charge particle beam is applied to the sample, in pixel units for the irradiation range of the charged particle beam on the basis of the information; and arranges the luminance information that is obtained, based on the quantity of electron so as to form an image.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供一种形成图像的图像形成装置，其形成由于静电充电等引起的影响的图像，而不必将样品上的带电粒子束照射。 解决方案：图像形成装置从半导体装置的设计数据获取包括带电粒子束的照射范围的区域的信息，并计算在像素部分处检测的电子量，当电荷粒子束 基于该信息，以像素为单位对带电粒子束的照射范围施加于样本; 并且基于电子量排列获得的亮度信息，以形成图像。 版权所有（C）2010，JPO＆INPIT