公开(公告)号：JP4528317B2

公开(公告)日：2010-08-18

申请号：JP2007193244

申请日：2007-07-25

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 祐介 大南 ,  裕史 宮井 ,  康弘 郡司

IPC: H01J37/28 ,  H01J37/22

CPC classification number: G01N23/225 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24495 ,  H01J2237/2487 ,  H01J2237/2817

公开(公告)号：JP4464857B2

公开(公告)日：2010-05-19

申请号：JP2005108765

申请日：2005-04-05

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 淳 ▲高▼根 ,  佐藤　　貢 ,  山口　　聡 ,  俊一 渡辺 ,  弘之 田中 ,  成人 砂子沢 ,  博実 稲田

IPC: H01J37/22

CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/15 ,  H01J2237/2487 ,  H01J2237/2826

公开(公告)号：JP2007208202A

公开(公告)日：2007-08-16

申请号：JP2006028720

申请日：2006-02-06

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： FUKUDA MUNEYUKI ,  SHOJO TOMOYASU ,  FUKADA ATSUKO ,  TAKAHASHI NORIJI

IPC: H01L21/66 ,  G01N23/225 ,  H01J37/28

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/0048 ,  H01J2237/21 ,  H01J2237/2487 ,  H01J2237/2817

Abstract: PROBLEM TO BE SOLVED: To allow for an easy and quick selection of an inspection recipe suitable for sampling from among many inspection recipes.
SOLUTION: A computational unit 14 displays many inspection recipes on the GUI 16. The inspection recipe includes a setting value used for controlling a charged particle column irradiating a charged particle beam to a sample and many characteristics values. For display, many inspection recipes are arranged on the coordinate system specified by many axes having characteristics values (charge robustness, defect detection speed, defect detection accuracy and others) which have the mutual trade-off relationship.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：允许从许多检验配方中轻松快速地选择适合于采样的检查配方。 计算单元14在GUI 16上显示许多检查配方。检查配方包括用于控制向样品照射带电粒子束的带电粒子列的设定值和许多特征值。 为了显示，在具有具有相互权衡关系的特征值（电荷稳健性，缺陷检测速度，缺陷检测精度等）的许多轴指定的坐标系上布置许多检查配方。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006032202A

公开(公告)日：2006-02-02

申请号：JP2004211415

申请日：2004-07-20

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： SUZUKI MAKOTO ,  TANIMOTO NORIFUMI ,  SASAKI HIROKO

IPC: H01J37/28 ,  H01L21/66

CPC classification number: H01J37/21 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam device allowing accurate condition setting to be easily carried out in a short time.
SOLUTION: This charge particle beam device used for detecting a generation signal generated from a sample and including secondary electrons to obtain an image is provided with: an input means for inputting a current value and a voltage value to be applied to a charged particle optical system through which a charged particle beam flows; a storage means for storing the shape, position and properties of the charged particle optical system and accuracy of the current or the voltage to be applied; an electromagnetic field calculation means for carrying out electromagnetic field calculation in the vicinity of a charged particle beam path; a charged particle beam track calculation means for calculating the track of the charged particle beam in the calculated electromagnetic field; a storage means for storing the result of the track calculation; and a control part for controlling the charged particle optical system based on the calculation result.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种允许在短时间内容易地执行精确状态设置的带电粒子束装置。 解决方案：用于检测从样品产生的并包括二次电子以获得图像的产生信号的电荷粒子束装置具有：输入装置，用于输入电流值和施加到带电的电压值的电压值 带电粒子束流过的粒子光学系统; 存储装置，用于存储带电粒子光学系统的形状，位置和特性以及要施加的电流或电压的精度; 用于在带电粒子束路径附近进行电磁场计算的电磁场计算装置; 带电粒子束轨迹计算装置，用于计算所计算的电磁场中的带电粒子束的轨迹; 用于存储轨道计算结果的存储装置; 以及用于基于计算结果控制带电粒子光学系统的控制部分。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005338043A

公开(公告)日：2005-12-08

申请号：JP2004161276

申请日：2004-05-31

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： AGEMURA TOSHIHIDE ,  SATO MITSUGI

IPC: G01N23/225 ,  G01N23/00 ,  G01N27/00 ,  G01R31/302 ,  G01R31/307 ,  H01J37/147 ,  H01J37/153 ,  H01J37/22 ,  H01J37/28 ,  H01L21/66

CPC classification number: G01R31/307 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/28 ,  H01J2237/2817

Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam device having a little degradation of resolution even in image shifting beyond ±75 μm and a defect inspection device having a CAD navigation function interlocking with image shifting function, in a defect inspection device combining a plurality of probes measuring electrical property of samples including minute circuit wiring patterns with a charged particle ray device.
SOLUTION: In order to communicate between an image processing means which performs image processing of charged particle beam images and a memory means which stored information about circuit wiring patterns, a means using a coordinates transforming image shift movement into sample stage movement is introduced into CAD navigation function. Thus, device user's usability is improved remarkably.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了提供即使在超过±75μm的图像偏移中也具有很小的分辨率劣化的带电粒子束装置和具有与图像移位功能互锁的CAD导航功能的缺陷检查装置，在缺陷检查装置 组合测量包括微电路布线图案的样品的电特性的多个探针与带电粒子射线装置。 解决方案：为了在执行带电粒子束图像的图像处理的图像处理装置和存储有关电路布线图案的信息的存储装置之间进行通信，引入使用坐标转换图像移位运动进入样本台移动的装置 进入CAD导航功能。 因此，设备用户的可用性得到显着改善。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2014064756A

公开(公告)日：2014-04-17

申请号：JP2012212135

申请日：2012-09-26

Applicant: Toshiba Corp ,  株式会社東芝 ,  Toshiba Medical Systems Corp ,  東芝メディカルシステムズ株式会社

Inventor： OIKAWA DAIZO ,  ISHIYAMA FUMIO

IPC: A61B6/03

CPC classification number: H01J35/025 ,  A61B6/032 ,  A61B6/405 ,  A61B6/4241 ,  A61B6/54 ,  A61B6/542 ,  A61B6/58 ,  G05F1/10 ,  G05F1/565 ,  H01J37/241 ,  H01J37/248 ,  H01J37/3023 ,  H01J2237/2487 ,  H05G1/32 ,  H05G1/46

Abstract: PROBLEM TO BE SOLVED: To provide an X-ray CT apparatus in which a photon energy distribution of emitted X-rays is flattened.SOLUTION: The X-ray CT apparatus includes an X-ray tube, a detector, a data collection part, a tube voltage generation part and a grid control part. The X-ray tube emits X-rays so as to irradiate a subject with the X-rays. The detector has a plurality of detection elements detecting photons which constitute the X-rays. The data collection part counts the number of the detected photons and collects projection data based on the result of the count. The tube voltage generation part applies a tube voltage to the X-ray tube while changing it within a prescribed cycle. The grid control part controls the grid voltage to reduce tube current when the tube voltage is increased, and controls the grid voltage to increase the tube current when the tube voltage is reduced. The X-ray CT apparatus flattens photon energy distribution of X-rays emitted from the X-ray tube.

Abstract translation: 要解决的问题：提供其中发射的X射线的光子能量分布变平的X射线CT装置。解决方案：X射线CT装置包括X射线管，检测器，数据收集部分， 管电压产生部分和电网控制部分。 X射线管发射X射线，以便用X射线照射被摄体。 检测器具有检测构成X射线的光子的多个检测元件。 数据采集​​部分对检测到的光子的数量进行计数，并根据计数结果收集投影数据。 管电压产生部件在规定的周期内变更时，向X射线管施加管电压。 电网控制部分控制电网电压以减小管电压增加时的管电流，并且当管电压降低时控制电网电压以增加管电流。 X射线CT装置平滑X射线管发射的X射线的光子能量分布。

公开(公告)号：JP5308624B2

公开(公告)日：2013-10-09

申请号：JP2006520256

申请日：2004-07-12

Applicant: アプライド マテリアルズ イスラエル リミテッド

Inventor： ズヴィカ ローゼンベルグ， ,  オヴァディャ メナデヴァ， ,  アヴィラム タム，

IPC: G01N23/225 ,  G01B15/04 ,  G01R31/305 ,  G01R31/307 ,  H01J37/28 ,  H01L21/66

CPC classification number: H01J37/1478 ,  G01B15/04 ,  G01N23/2251 ,  G01R31/307 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2487 ,  H01J2237/2611 ,  H01J2237/2814 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: A system and method for determining a cross sectional feature of a measured structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method starts by a first step of scanning, at a first tilt state, a first portion of a reference structural element and at least the first traverse section of the measured structural element, to determine a first relationship between the reference structural element and the first traverse section. The first step is followed by a second step of scanning, at a second tilt state, a second portion of a reference structural element and at least the second traverse section of the measured structural element, to determine a second relationship between the reference structural element and the second traverse section. The method ends by a third step of determining a cross sectional feature of the measured structural element in response to the first and second relationships.

公开(公告)号：JP4993849B2

公开(公告)日：2012-08-08

申请号：JP2004161276

申请日：2004-05-31

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 佐藤　　貢 ,  寿英 揚村

IPC: G01N23/225 ,  G01R31/302 ,  G01N23/00 ,  G01N27/00 ,  G01R31/307 ,  H01J37/147 ,  H01J37/153 ,  H01J37/22 ,  H01J37/28 ,  H01L21/66

CPC classification number: G01R31/307 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/28 ,  H01J2237/2817

Abstract: In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.

公开(公告)号：JP4791840B2

公开(公告)日：2011-10-12

申请号：JP2006028720

申请日：2006-02-06

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 敦子 深田 ,  智康 猩々 ,  宗行 福田 ,  範次 高橋

IPC: H01L21/66 ,  G01N23/225 ,  H01J37/28

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/0048 ,  H01J2237/21 ,  H01J2237/2487 ,  H01J2237/2817

Abstract: An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes settings for controlling charged particle columns which irradiate charged particles on samples with a plurality of characteristics. Plural inspection recipes are arranged and displayed on a coordinate system which is specified by a plurality of axes having characteristic values (robustness variable of charge up, throughput of defect inspection, and accuracy of defect inspection) which have mutually trade-off relationships.

公开(公告)号：JP4312910B2

公开(公告)日：2009-08-12

申请号：JP34309499

申请日：1999-12-02

Applicant: 株式会社ルネサス東日本セミコンダクタ ,  株式会社日立製作所

Inventor： 重昭 土方 ,  健二 渡辺 ,  英利 西山 ,  真理 野副 ,  孝治 阿部

IPC: G01N23/225 ,  G01Q30/02 ,  G01N21/956 ,  G01N23/20 ,  G01Q30/04 ,  G01Q30/20 ,  G01R1/06 ,  G01R31/302 ,  H01L21/027 ,  H01L21/66

CPC classification number: G06T7/0004 ,  G01N23/20 ,  G06T2207/30148 ,  H01J2237/2487 ,  H01J2237/2817

Abstract: A pattern inspection system for inspecting a substrate surface on which a predetermined pattern is formed with radiation of an electron beam and an optical beam. the pattern inspection system includes a radiation and which radiates an electron beam to the substrate, a detection unit which detects a secondarily generated signal attributable to the radiation of the electron beam, a retrieval unit which retrieves an image from the signal detected by the detection unit, and an image processing unit which classifies the retrieved image depending on a type of the image.