Glass plate with thin film, its production method, and photoelectric conversion device using the glass plate
    7.
    发明专利
    Glass plate with thin film, its production method, and photoelectric conversion device using the glass plate 审中-公开
    具有薄膜的玻璃板,其制造方法和使用玻璃板的光电转换装置

    公开(公告)号:JP2005029464A

    公开(公告)日:2005-02-03

    申请号:JP2004181265

    申请日:2004-06-18

    IPC分类号: C03C17/245 C23C16/42

    摘要: PROBLEM TO BE SOLVED: To provide a glass plate on which an SiOC film of which light absorption is suppressed has been formed. SOLUTION: A thin film 2 containing silicon, oxygen, and carbon is formed on a glass plate 1. In the thin film 2, the ratio of a silicon-carbon bonding state to the whole silicon bonding state is set at 10-45%, and preferably, the ratio of a metallic silicon bonding state to the whole silicon bonding state is set at 10% or lower. Preferably, the glass plate with the thin film is produced by a chemical vapor deposition (CVD) method using a raw material gas mixture containing a silicon-containing substance (especially monosilane), an unsaturated hydrocarbon, oxygen, and if necessary carbon dioxide. COPYRIGHT: (C)2005,JPO&NCIPI

    摘要翻译: 要解决的问题:提供一种玻璃板,其上形成有抑制光吸收的SiOC膜。 解决方案:在玻璃板1上形成含有硅,氧和碳的薄膜2.在薄膜2中,硅 - 碳键合状态与整个硅键合状态的比率设定为10- 45%,优选将金属硅键合状态与整体硅键合状态的比率设定为10%以下。 优选地,具有薄膜的玻璃板通过使用含有含硅物质(特别是硅烷),不饱和烃,氧和必要的二氧化碳的原料气体混合物的化学气相沉积(CVD)法来制造。 版权所有(C)2005,JPO&NCIPI