Electron gun, electron beam drawing device, article manufacturing method, and electron beam device
    9.
    发明专利
    Electron gun, electron beam drawing device, article manufacturing method, and electron beam device 审中-公开
    电子枪,电子束绘图装置,制品制造方法和电子束装置

    公开(公告)号:JP2012009428A

    公开(公告)日:2012-01-12

    申请号:JP2011117137

    申请日:2011-05-25

    Inventor: IMAOKA NOBURO

    Abstract: PROBLEM TO BE SOLVED: To provide an electron gun which is advantageous in brightness uniformity of a crossover.SOLUTION: The electron gun has a cathode, a bias electrode and an anode arranged in order along a common axis. An electron emission surface of the cathode is shaped such that a second region outside a first region including points on the axis has a radius of curvature (second radius of curvature) larger than a radius of curvature of the first region (first radius of curvature), and the brightness of the crossover is more uniform than when the first region and second region both have the first radius of curvature.

    Abstract translation: 要解决的问题:提供一种有利于交叉的亮度均匀性的电子枪。 解决方案:电子枪具有阴极,偏置电极和阳极,沿着公共轴排列。 阴极的电子发射表面成形为使得包括轴上的点的第一区域之外的第二区域具有大于第一区域的曲率半径(第一曲率半径)的曲率半径(第二曲率半径) 并且所述交叉的亮度比所述第一区域和所述第二区域均具有所述第一曲率半径时的亮度更均匀。 版权所有(C)2012,JPO&INPIT

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