摘要:
PROBLEM TO BE SOLVED: To provide a resist composition that can produce a resist pattern that has an excellent mask error factor (MEF).SOLUTION: A compound is shown by formula (I), a resin has a structural unit that originates in the compound, and a resist composition includes the resin. In the formula (I), Rdenotes a hydrogen atom or a methyl group; r denotes an integer 1 or 2; Adenotes a group shown by formula (a-g1); s is an integer of 0-2; Adenotes an aliphatic hydrocarbon group; Adenotes a single bond or an aliphatic hydrocarbon group; and Xdenotes an oxygen atom, a carbonyl group, a carbonyloxy group, an oxycarbonyl group or oxycarbonyloxy group, wherein Ais a single bond, s=1 and Xis an oxygen atom; and Rdenotes a group that is unstable to an acid.
摘要:
PROBLEM TO BE SOLVED: To provide a radiation-sensitive composition which is highly sensitive, has high resolution, and can form resist coating films formable of resist patterns excellent in nano-edge roughness. SOLUTION: The radiation-sensitive composition comprises a compound represented by general formula (1) (wherein, A is a single bond or the like; R 1 is H or the like; R 2 is 11 to 25C alkyl or the like; R 3 is alkyl), a solvent, and a radiation-sensitive acid-generating agent. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译:要解决的问题:提供高灵敏度,高分辨率的辐射敏感性组合物,并且可以形成可形成纳米边缘粗糙度优异的抗蚀剂图案的抗蚀剂涂膜。 解决方案:辐射敏感性组合物包含由通式(1)表示的化合物(其中,A为单键等; R 1为H等; R SP > 2 SP>为11至25C烷基等; R 3为烷基),溶剂和辐射敏感性产酸剂。 版权所有(C)2011,JPO&INPIT
摘要:
At the present invention relates to a new process for the preparation of the (S)-naproxen 4-nitrooxybutyl ester and to new intermediates obtained and used therein. The invention further relates to the use of the new intermediates for the manufacturing of pharmaceutically active compounds such as (S)-naproxen 4-nitrooxybutyl ester. The invention also relates to the use of (S)-naproxen 4-nitrooxybutyl ester prepared according to the process of the present invention for the manufacturing of a medicament for the treatment of pain.
摘要:
A sulfonate compound having formula (1) is novel wherein R 1 to R 3 are H, F or C 1-20 alkyl or fluoroalkyl, at least one of R 1 to R 3 contains F. A polymer comprising units derived from the sulfonate compound is used as a base resin to formulate a resist composition which is sensitive to high-energy radiation, maintains high transparency at a wavelength of up to 200 nm, and has improved alkali dissolution contrast and plasma etching resistance