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267 条记录 (耗时 0.053 秒)

    Inspection system using small-sized catadioptric objective
    1.
    发明专利
    Inspection system using small-sized catadioptric objective 审中-公开
    使用小尺寸目标的检查系统

    公开(公告)号：JP2014167657A

    公开(公告)日：2014-09-11

    申请号：JP2014115886

    申请日：2014-06-04

    申请人： Kla-Encor Corp ,  ケーエルエー−テンカー コーポレイション

    发明人： CHUANG YUNG-HO ,  JOSEPH J ARMSTRONG ,  DAVID R SHAFER

    IPC分类号： G02B21/04 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  G02B20060101 ,  G02B5/00 ,  G02B13/14 ,  G02B17/00 ,  G02B17/08 ,  G02B21/02 ,  G02B21/08 ,  G02B21/16 ,  G03F7/20

    CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G02B5/001 ,  G02B17/0808 ,  G02B17/0812 ,  G02B17/0856 ,  G02B17/0892 ,  G02B21/02 ,  G03F7/70225 ,  G03F7/70341

    摘要： PROBLEM TO BE SOLVED: To disclose a system using a small-sized catadioptric objective.SOLUTION: The system uses various subsystems besides a small-sized objective to allow enhanced imaging. The subsystems include subsystems for illumination, imaging, autofocus, positioning, sensor, data acquisition, and data analysis. The objective is employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and elements of the objective are less than 100 mm in diameter. The objective comprises a focusing lens group (1607), at least one field lens (1605), and a Mangin mirror arrangement (1601). The field lens (1605) is oriented to receive focused light energy from the focusing lens group (1607) and provide intermediate light energy. This invention imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90 to a specimen for imaging purposes, and the invention may be employed in various environments.

    摘要翻译： 要解决的问题：公开使用小尺寸反射折射物镜的系统。解决方案：该系统除了小尺寸物镜之外还使用各种子系统，以增强成像效果。 子系统包括用于照明，成像，自动对焦，定位，传感器，数据采集和数据分析的子系统。 该目的是通过红外光范围具有波长在约190纳米的波长的光能，并且目标的元件的直径小于100mm。 该目的包括聚焦透镜组（1607），至少一个场透镜（1605）和漫反射镜布置（1601）。 场透镜（1605）被定向为接收来自聚焦透镜组（1607）的聚焦光能并提供中间光能。 为了成像目的，本发明赋予数值孔径超过0.65并且高达约0.90的受控光能，并且本发明可用于各种环境中。

    Immersion lithographic apparatus, device manufacturing method
    2.
    发明专利
    Immersion lithographic apparatus, device manufacturing method 有权

    公开(公告)号：JP5510596B2

    公开(公告)日：2014-06-04

    申请号：JP2013127364

    申请日：2013-06-18

    申请人： 株式会社ニコン

    发明人： マイケル ビナード，

    IPC分类号： H01L21/027 ,  G02B20060101 ,  G03B27/32 ,  G03B27/42 ,  G03B27/58 ,  G03F7/20 ,  H01L21/68

    CPC分类号： G03F7/70341 ,  G03B27/52 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/70733

    摘要： An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.

    Immersion exposure apparatus, liquid immersion exposure method, a device manufacturing method, and manufacturing method of the liquid immersion exposure apparatus
    5.
    发明专利
    Immersion exposure apparatus, liquid immersion exposure method, a device manufacturing method, and manufacturing method of the liquid immersion exposure apparatus 有权
    空值

    公开(公告)号：JP4775402B2

    公开(公告)日：2011-09-21

    申请号：JP2008111219

    申请日：2008-04-22

    申请人： 株式会社ニコン

    发明人： マイケル ビナード，

    IPC分类号： H01L21/027 ,  G02B20060101 ,  G03B27/32 ,  G03B27/42 ,  G03B27/58 ,  G03F7/20

    CPC分类号： G03F7/70341 ,  G03B27/52 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/70733

    摘要： An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.

    摘要翻译： 公开了一种用于在光刻机（10）中的工件（208）更换期间将浸没流体（212）保持在与投影透镜（16）相邻的间隙中的装置和方法。 该装置和方法包括：光学组件（16），其被配置成将图像投影到工件（208）和台架组件（202）上，所述工作台组件（202）包括工件台（204），所述工件台被配置为支撑邻近光学 总成（16）。 设置环境系统（26）以从台架组件（202）上的光学组件（16）和工件（208）之间的间隙提供和去除浸没流体（212）。 在完成工件（208）的曝光之后，交换系统（216）移除工件（208）并用第二工件代替它。 提供了浸没液体容纳系统（214），以在移除第一工件（208）期间和第二工件的更换期间将浸没液体（212）保持在间隙中。

    Micro-optic security and image presentation system
    6.
    发明专利
    Micro-optic security and image presentation system 有权
    微光安全和图像呈现系统

    公开(公告)号：JP2011175259A

    公开(公告)日：2011-09-08

    申请号：JP2011026985

    申请日：2011-02-10

    申请人： Visual Physics Llc ,  ビジュアル フィジクス エルエルシー

    发明人： STEENBLIK RICHARD A ,  HURT MARK J ,  JORDAN GREGORY R

    IPC分类号： G02B3/00 ,  B32B3/30 ,  B42D15/10 ,  D21H21/42 ,  D21H21/44 ,  G02B20060101 ,  G02B27/10 ,  G02B27/22

    CPC分类号： B42D25/41 ,  B42D25/00 ,  B42D25/29 ,  B42D25/342 ,  B42D2033/24 ,  B42D2035/08 ,  B42D2035/20 ,  B42D2035/44 ,  B44F1/06 ,  B44F1/10 ,  D21H21/44 ,  G02B3/0031 ,  G02B3/0043 ,  G02B3/0056 ,  G02B27/06 ,  G02B27/2214 ,  Y10T29/49826

    摘要： PROBLEM TO BE SOLVED: To provide an optical material that visibly enhances a function of products and packaging to authenticate bills and documents. SOLUTION: A film material utilizing a regular two-dimensional array of non-cylindrical lenses 1 to enlarge micro-images, called icons 4, to form a synthetically magnified image through the united performance of a multiplicity of individual lens/icon image systems. The synthetic magnification micro-optic system includes one or more optical spacers 5, a micro-image formed of a periodic planar array of a plurality of image icons 4 having an axis of symmetry about at least one of its planar axes and positioned on or next to the optical spacer 5, and a periodic planar array of image icon focusing elements 1 having the axis of symmetry about at least one of its planar axes, the axis of symmetry being the same planar axis as that of the micro-image planar array. A number of distinctive visual effects, such as three-dimensional and motion effects, can be provided by the system. COPYRIGHT: (C)2011,JPO&INPIT

    摘要翻译： 要解决的问题：提供明显增强产品和包装功能以验证纸币和文件的光学材料。 解决方案：使用非柱面透镜1的规则二维阵列的薄膜材料，以通过多个单独的透镜/图标图像的联合表现来扩大微图像（称为图标4）以形成合成放大图像 系统。 合成放大微光学系统包括一个或多个光学间隔物5，由多个图像图标4的周期性平面阵列形成的微图像，其具有围绕其平面轴线中的至少一个并位于或接下来的对称轴 以及周围平面阵列的图像图标聚焦元件1，其具有关于其平面轴的至少一个的对称轴，对称轴与微图像平面阵列的平面轴相同。 系统可以提供许多独特的视觉效果，如三维和运动效果。 版权所有（C）2011，JPO＆INPIT

    Estimation of target orientations with depth detection
    7.
    发明专利
    Estimation of target orientations with depth detection 有权
    空值

    公开(公告)号：JP4546956B2

    公开(公告)日：2010-09-22

    申请号：JP2006516618

    申请日：2004-06-14

    申请人： 本田技研工業株式会社

    发明人： ヨウディン ズ ,  キクオ フジムラ

    IPC分类号： G06T7/60 ,  A61B5/18 ,  G02B20060101 ,  G06K9/00 ,  G06T1/00

    CPC分类号： G06K9/00228 ,  G06F3/012 ,  G06K9/00201 ,  G06K9/00241 ,  G06K9/00845 ,  G06K9/32 ,  G06K9/6203 ,  G06K9/6214 ,  G06T7/74 ,  G06T2200/04 ,  G06T2207/10028 ,  G06T2207/30201 ,  G08B21/06

    摘要： A system for estimating orientation of a target based on real-time video data uses depth data included in the video to determine the estimated orientation. The system includes a timeof-flight camera capable of depth sensing within a depth window. The camera outputs hybrid image data (color and depth). Segmentation is performed to determine the location of the target within the image. Tracking is used to follow the target location from frame to frame. During a training mode, a target-specific training image set is collected with a corresponding orientation associated with each frame. During an estimation mode, a classifier compares new images with the stored training set to determine an estimated orientation. A motion estimation approach uses an accumulated rotation/translation parameter calculation based on optical flow and depth constrains. The parameters are reset to a reference value each time the image corresponds to a dominant orientation.

    摘要翻译： 用于基于实时视频数据估计目标的方向的系统使用包括在视频中的深度数据来确定估计的取向。 该系统包括能够在深度窗口内进行深度感测的飞行时间相机。 相机输出混合图像数据（颜色和深度）。 执行分割以确定图像内的目标的位置。 跟踪用于从帧到帧跟随目标位置。 在训练模式期间，以与每个帧相关联的对应取向收集目标特定训练图像集合。 在估计模式期间，分类器将新图像与存储的训练集进行比较以确定估计的方位。 运动估计方法使用基于光流和深度约束的累积旋转/平移参数计算。 每次图像对应于主导方向时，参数将重置为参考值。