투명 도전성막 및 그 제조 방법
    3.
    发明公开
    투명 도전성막 및 그 제조 방법 无效
    透明导电薄膜及其生产方法

    公开(公告)号:KR1020080113054A

    公开(公告)日:2008-12-26

    申请号:KR1020087024765

    申请日:2007-03-15

    摘要: Disclosed is a transparent conductive film having excellent electrical conductivity and etching properties. Also disclosed is a method for producing the transparent conductive film. The transparent conductive film contains Zn, Sn and O, wherein the molar ratio of Zn to the sum total of Zn and Sn (Zn/(Zn+Sn)) is 0.41 to 0.55. The transparent conductive film is amorphous. The method comprises the step of spattering a sintered body (a target) in an inert gas atmosphere, wherein the sintered body contains Zn, Sn and O and the molar ratio of Zn to the sum total of Zn and Sn (Zn/(Zn+Sn)) in the sintered body is 0.53 to 0.65. ® KIPO & WIPO 2009

    摘要翻译: 公开了具有优异的导电性和蚀刻性能的透明导电膜。 还公开了一种制造透明导电膜的方法。 透明导电膜含有Zn,Sn和O,其中Zn与Zn和Sn(Zn /(Zn + Sn))的总和的摩尔比为0.41〜0.55。 透明导电膜是无定形的。 该方法包括在惰性气体气氛中溅射烧结体(靶)的步骤,其中烧结体含有Zn,Sn和O,并且Zn与Zn和Sn(Zn /(Zn + Sn))为0.53〜0.65。 ®KIPO&WIPO 2009