나노 구조물을 갖는 압력 센서 및 그 제조 방법
    3.
    发明公开
    나노 구조물을 갖는 압력 센서 및 그 제조 방법 有权
    具有纳米结构的压力传感器及其制造方法

    公开(公告)号:KR1020130062587A

    公开(公告)日:2013-06-13

    申请号:KR1020110128939

    申请日:2011-12-05

    IPC分类号: G01L9/00

    摘要: PURPOSE: A pressure sensor with a nanostructure and a manufacturing method thereof are provided to improve a response speed and the sensitivity of a sensor due to the nanostructure adhered to the surface of the sensor. CONSTITUTION: A pressure sensor(100) with a nanostructure comprises a substrate(110), a source electrode(120), a drain electrode(130), and flexible sensor layer(140). The source and the drain electrodes are arranged separately on the substrate on a predetermined distance. The flexible sensor layer is arranged on the source and drain electrodes. The nanostructure adhered to a surface of the flexible sensor layer includes a zigzagged portions of a nano size.

    摘要翻译: 目的:提供具有纳米结构的压力传感器及其制造方法,以提高由于纳米结构粘附到传感器表面而导致的传感器的响应速度和灵敏度。 构成:具有纳米结构的压力传感器(100)包括基底(110),源电极(120),漏电极(130)和柔性传感器层(140)。 源电极和漏电极以预定距离分开布置在衬底上。 柔性传感器层布置在源极和漏极上。 附着在柔性传感器层的表面上的纳米结构包括纳米尺寸的锯齿形部分。

    반도체 소자 및 그 제조 방법
    4.
    发明公开
    반도체 소자 및 그 제조 방법 有权
    半导体元件及其制造方法

    公开(公告)号:KR1020110026801A

    公开(公告)日:2011-03-16

    申请号:KR1020090084597

    申请日:2009-09-08

    摘要: PURPOSE: A semiconductor device and a manufacturing method thereof are provided to improve the power conversion efficiency of the semiconductor device by decreasing the amount of reverse leakage currents and increasing the amount of forward currents. CONSTITUTION: A semiconductor layer(120) is formed on a base substrate(110). An ohmic electrode unit(130) includes an ohmic electrode line which is arranged on the semiconductor layer in a first direction. The ohmic electrode unit includes a first ohmic electrode(132) covered with a schottky electrode line on the semiconductor layer. A schottky electrode unit(140) includes schottky electrode lines which are arranged in the first direction. The ohmic electrode lines and the schottky electrode lines are alternatively arranged in parallel.

    摘要翻译: 目的:提供一种半导体器件及其制造方法,通过减少反向泄漏电流量和增加正向电流量来提高半导体器件的功率转换效率。 构成:半导体层(120)形成在基底(110)上。 欧姆电极单元(130)包括在第一方向上布置在半导体层上的欧姆电极线。 欧姆电极单元包括在半导体层上用肖特基电极线覆盖的第一欧姆电极(132)。 肖特基电极单元(140)包括沿第一方向布置的肖特基电极线。 欧姆电极线和肖特基电极线交替排列成平行。

    화학 센서
    6.
    发明公开
    화학 센서 审中-实审
    化学传感器

    公开(公告)号:KR1020140041352A

    公开(公告)日:2014-04-04

    申请号:KR1020130113272

    申请日:2013-09-24

    IPC分类号: G01N27/403

    摘要: According to a method of manufacturing a chemical sensor (1) including a plurality of sensor cells (11), a substrate (5) is prepared, and an anti-dispersion agent for preventing a photoactive compound (9), coated on one region of the substrate (5) from being dispersed from the region to form a sensitive film (7) of the sensor cells (11), is applied to the substrate (5). The photoactive compound (9) is provided, and the photoactive compound (9) is discharged to the region in a non-contact manner, thereby forming a sensitive film (7).

    摘要翻译: 根据制造包括多个传感器单元(11)的化学传感器(1)的方法,制备基板(5),并且将用于防止光敏化合物(9)的防分散剂涂覆在 将基板(5)从该区域分散以形成传感器单元(11)的敏感膜(7),被施加到基板(5)。 提供光敏化合物(9),光敏化合物(9)以非接触方式排放到该区域,从而形成敏感膜(7)。

    반도체 소자 및 그 제조 방법
    7.
    发明公开
    반도체 소자 및 그 제조 방법 无效
    半导体器件及其制造方法

    公开(公告)号:KR1020130055983A

    公开(公告)日:2013-05-29

    申请号:KR1020110121694

    申请日:2011-11-21

    发明人: 오승석

    摘要: PURPOSE: A semiconductor device and a manufacturing method thereof are provided to prevent a failure like non-open in forming an OSC(One Side Contact) by performing an OSC process when the height of a pillar pattern is low. CONSTITUTION: A pillar pattern(210) is formed on a semiconductor substrate(200). A spacer(225) is formed on the sidewall of the pillar pattern. An OSC is formed by removing the spacer from the pillar pattern. A bit line pattern(240) is formed between the pillar patterns. A silicon pattern(250) is formed by growing the pillar pattern. A storage node contact(280) is formed on the upper side of the silicon pattern.

    摘要翻译: 目的:提供一种半导体器件及其制造方法,以在柱状图案的高度低时通过执行OSC处理来防止在形成OSC(单面接触)时非打开的故障。 构成:在半导体衬底(200)上形成柱状图案(210)。 衬垫(225)形成在柱状图案的侧壁上。 通过从柱状图案移除间隔物形成OSC。 在柱状图案之间形成位线图案(240)。 通过生长柱状图案形成硅图案(250)。 存储节点接触件(280)形成在硅图案的上侧。

    반도체 가스 센서 및 이의 제조 방법
    9.
    发明公开
    반도체 가스 센서 및 이의 제조 방법 审中-实审
    半导体气体传感器及其制造方法

    公开(公告)号:KR1020170089691A

    公开(公告)日:2017-08-04

    申请号:KR1020160010255

    申请日:2016-01-27

    发明人: 이주현 이한춘

    摘要: 가스를감지하는반도체가스센서가개시된다. 반도체가스센서는캐비티를갖는기판, 기판상에구비된제1 절연막, 제1 절연막상에구비된제2 절연막, 제2 절연막상에구비된히터전극, 히터전극상측에구비된센싱전극, 및센싱전극을커버하는감지막을구비할수 있다. 제1 절연막은캐비티와캐비티의주변부에대응하는부분에형성된노출홀을구비한다. 제2 절연막은노출홀을덮도록형성되며, 히터전극은캐비티와대응하는부분에구비되어열을발생시킨다. 이와같이, 반도체가스센서는제2 절연막의아래에노출홀을구비함으로써, 멤브레인이캐비티측으로휘어지는정도를완화시킬수 있다. 이에따라, 센싱영역의온도를일정하게유지할수 있고, 센싱영역의온도분포를균일하게유지할수 있다.

    摘要翻译: 公开了用于感测气体的半导体气体传感器。 半导体气体传感器包括:第一绝缘膜,所述第一绝缘层和第二绝缘膜,第二绝缘膜中设置的加热元件,设置在上加热元件的感测电极,和感测包括设置在基板上,具有腔基板 可以提供覆盖电极的传感膜。 第一绝缘膜具有形成在与腔的周边部分和腔相对应的部分中的暴露孔。 第二绝缘膜形成为覆盖露出孔,并且加热器电极设置在与空腔对应的部分处以产生热量。 以这种方式,由于半导体气体传感器在第二绝缘膜下具有暴露孔,因此可以减小膜向腔侧的弯曲程度。 因此,感测区域的温度可以保持恒定,并且感测区域的温度分布可以保持均匀。