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公开(公告)号:TWI579095B
公开(公告)日:2017-04-21
申请号:TW101125590
申请日:2012-07-16
申请人: 日立金屬股份有限公司 , HITACHI METALS, LTD.
发明人: 佐川英之 , SAGAWA, HIDEYUKI , 青山正義 , AOYAMA, SEIGI , 黑田洋光 , KURODA, HIROMITSU , 鷲見亨 , SUMI, TORU , 藤戶啟輔 , FUJITO, KEISUKE , 岡田良平 , OKADA, RYOHEI
CPC分类号: H01L24/05 , H01L2224/05624 , H01L2224/43 , H01L2224/43848 , H01L2224/45 , H01L2224/45014 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45618 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45664 , H01L2224/45669 , H01L2224/48724 , H01L2224/48824 , H01L2924/00011 , H01L2924/00014 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/10253 , H01L2924/01022 , H01L2924/01012 , H01L2924/0104 , H01L2924/01041 , H01L2924/0102 , H01L2924/01023 , H01L2924/01025 , H01L2924/01024 , H01L2924/00 , H01L2924/013 , H01L2224/48 , H01L2924/01205 , H01L2924/20751 , H01L2924/20752 , H01L2924/00015 , H01L2924/2076 , H01L2924/20108 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/01006 , H01L2924/00012 , H01L2924/01033 , H01L2924/01008 , H01L2924/01016