Apparatus for Direct Fabrication of Nanostructures
    2.
    发明申请
    Apparatus for Direct Fabrication of Nanostructures 审中-公开
    用于直接制造纳米结构的装置

    公开(公告)号:US20110297084A1

    公开(公告)日:2011-12-08

    申请号:US13210318

    申请日:2011-08-15

    Abstract: An all-additive apparatus for direct fabrication of nanometer-scale planar and multilayer structures that performs “pick-and-place” retrieval and deposition of materials comprises a tip and a controller and transport mechanism configured for causing the tip to acquire a transferable material and deposit at least a portion of the acquired transferable material at a predetermined location onto a substrate, without the use of a bridging medium, in order to directly assemble a structure. The tip may be submillimeter-scale, may comprise a plurality of sub-tips disposed in a predetermined arrangement, and/or may mechanically vibrate. Mechanical vibration of the tip may be monitored. The tip may acquire the transferable material from a reservoir. The assembled structure may be cured on the substrate.

    Abstract translation: 用于直接制造纳米级平面和多层结构的全添加装置,其执行材料的“拾取和放置”取出和沉积,包括尖端和配置用于使尖端获得可转移材料的控制器和输送机构, 将所获得的可转移材料的至少一部分在预定位置沉积到基板上,而不使用桥接介质,以便直接组装结构。 尖端可以是亚毫米级的,可以包括以预定布置设置的多个子尖端和/或可以机械振动。 可以监测尖端的机械振动。 尖端可以从储存器获取可转移材料。 组装的结构可以在基底上固化。

    Radiation patternable functional materials, methods of their use, and structures formed therefrom
    4.
    发明授权
    Radiation patternable functional materials, methods of their use, and structures formed therefrom 失效
    可辐射图案化功能材料,其使用方法和由其形成的结构

    公开(公告)号:US07294449B1

    公开(公告)日:2007-11-13

    申请号:US10749876

    申请日:2003-12-31

    Abstract: Materials, compounds and compositions for radiation patternable functional thin films, methods of synthesizing such materials and compounds, and methods for forming an electronically functional thin film and structures including such a film. The compounds and compositions generally include (a) nanoparticles of an electronically functional material or substance and (b) ligands containing a (photo)reactive group. The method generally includes the steps of (1) irradiating the compound and/or composition, and (2) curing the irradiated compound and/or composition, generally to form an electronically functional film. The functional thin film includes a sintered mixture of nanoparticles. The thin film exhibits improved morphology and/or resolution relative to an otherwise identical structure made by an identical process, but without the (photo)functional group on the ligand, and/or relative to an otherwise identical material patterned by a conventional graphics art-based printing process. The present process also exhibits improved throughput relative to conventional photolithographic processing, by eliminating a metal deposition step. The present invention advantageously provides functional thin film structures having qualities suitable for use in electronics applications, such as display devices or RF ID tags, while enabling elimination of a number of conventional photolithographic processing steps (e.g., functional material sputtering, PECVD, etc.).

    Abstract translation: 用于辐射可图形功能薄膜的材料,化合物和组合物,合成这种材料和化合物的方法,以及形成电子功能薄膜的方法和包括这种膜的结构。 化合物和组合物通常包括(a)电子功能材料或物质的纳米颗粒和(b)含有(光)反应性基团的配体。 该方法通常包括以下步骤:(1)照射化合物和/或组合物,和(2)固化照射的化合物和/或组合物,通常形成电子功能膜。 功能性薄膜包括纳米颗粒的烧结混合物。 相对于通过相同方法制备的其它相同的结构,但是没有配体上的(光)官能团,和/或相对于通过常规图形艺术图案化的其它相同材料,薄膜表现出改善的形态和/或分辨率。 基于打印过程。 通过消除金属沉积步骤,本方法还显示相对于常规光刻处理的改善的生产量。 本发明有利地提供具有适合用于电子应用(例如显示装置或RF ID标签)的质量的功能薄膜结构,同时能够消除许多常规光刻处理步骤(例如,功能材料溅射,PECVD等) 。

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