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    MULTI-WORKPIECE PROCESSING CHAMBER AND WORKPIECE PROCESSING SYSTEM INCLUDING THE SAME
    2.
    发明申请
    MULTI-WORKPIECE PROCESSING CHAMBER AND WORKPIECE PROCESSING SYSTEM INCLUDING THE SAME 审中-公开
    多工件加工室和包括其中的工件加工系统

    公开(公告)号：US20100193132A1

    公开(公告)日：2010-08-05

    申请号：US12597924

    申请日：2009-04-02

    申请人： Soon Im Wi ,  Chang Woo Nam

    发明人： Soon Im Wi ,  Chang Woo Nam

    IPC分类号： C23F1/08 ,  C23C16/00

    CPC分类号： H01L21/6719

    摘要： A multi-workpiece processing chamber according to the present invention comprises a chamber housing which forms at least two internal processing spaces therein; at least one partition member which is provided in the chamber housing and partitions the chamber housing into at least two internal processing spaces; and the respective internal processing spaces being coupled with the partition member and having a symmetric shape to generate a processing reaction uniformly. The multi-workpiece processing chamber according to the present invention has internal processing spaces that have a symmetric shape by being coupled with a partition member. Thus, a processing reaction uniformly occurs across the internal processing areas and reproducibility and uniformity of a workpiece processing process may improve.

    摘要翻译： 根据本发明的多工件处理室包括在其中形成至少两个内部处理空间的腔室壳体; 至少一个分隔构件，设置在所述腔室中并将所述腔室壳体分隔成至少两个内部处理空间; 并且各个内部处理空间与分隔构件联接并且具有对称形状以均匀地产生加工反应。 根据本发明的多工件处理室具有通过与分隔构件联接而具有对称形状的内部处理空间。 因此，在内部处理区域内均匀地发生加工反应，可以提高工件加工工序的再现性和均匀性。

    Data writing density judging method for disc
    3.
    发明授权
    Data writing density judging method for disc 失效
    数据写入密度判断方法

    公开(公告)号：US6031802A

    公开(公告)日：2000-02-29

    申请号：US5511

    申请日：1998-01-12

    申请人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    发明人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    IPC分类号： G11B7/0037 ,  G11B7/085 ,  G11B19/12 ,  G11B3/90

    CPC分类号： G11B19/12 ,  G11B7/0037 ,  G11B7/08505

    摘要： An improved data writing density judging apparatus and method for a disc capable of judging a writing density of a disc by detecting an amount of cross talk or detecting a tracking error signal. Cross talk is detected when a disc track is scanned by a beam. A tracking error signal is detected when a pick-up member jumps a certain track while the pick-up member moves across a disc track. The improved apparatus and method computes a ratio between a minimum value and a maximum value of an envelope signal based on the detected amount of cross talk a writing density can be determined. The improved apparatus and method also converts a tracking error signal which is a high frequency analog signal into a digital signal that is used to compute a time required for a pick-up member to jump a certain track. Based on the computed time which is compared with a reference value, a writing density of a disk can also be determined.

    摘要翻译： 一种用于盘的改进的数据写入密度判断装置和方法，其能够通过检测串扰量或检测跟踪误差信号来判断盘的写入密度。 当光束被光束扫描时，检测到交谈。 当拾取构件在拾取构件移动穿过盘轨道时跳过某个轨道时，检测到跟踪误差信号。 改进的装置和方法基于检测到的串扰量可以确定包络信号的最小值和最大值之间的比率来确定书写密度。 改进的装置和方法还将作为高频模拟信号的跟踪误差信号转换为数字信号，该数字信号用于计算拾取构件跳跃某个轨道所需的时间。 基于与参考值进行比较的计算时间，也可以确定盘的写入密度。

    Data writing density judging apparatus and method
    4.
    发明授权
    Data writing density judging apparatus and method 失效
    数据写入密度判断装置及方法

    公开(公告)号：US5774438A

    公开(公告)日：1998-06-30

    申请号：US550652

    申请日：1995-10-31

    申请人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    发明人： Chong Yeop Park ,  Chang Woo Nam ,  Jong Jun Lee

    IPC分类号： G11B7/0037 ,  G11B7/085 ,  G11B19/12 ,  G11B3/90

    CPC分类号： G11B19/12 ,  G11B7/0037 ,  G11B7/08505

    摘要： An improved data writing density judging apparatus and method for a disc capable of judging a writing density of a disc by detecting an amount of cross talk or detecting a tracking error signal. Cross talk is detected when a disc track is scanned by a beam. A tracking error signal is detected when a pick-up member jumps a certain track while the pick-up member moves across a disc track. The improved apparatus and method computes a ratio between a minimum value and a maximum value of an envelope signal based on the detected amount of cross talk a writing density can be determined. The improved apparatus and method also converts a tracking error signal which is a high frequency analog signal into a digital signal that is used to compute a time required for a pick-up member to jump a certain track. Based on the computed time which is compared with a reference value, a writing density of a disk can also be determined.

    摘要翻译： 一种用于盘的改进的数据写入密度判断装置和方法，其能够通过检测串扰量或检测跟踪误差信号来判断盘的写入密度。 当光束被光束扫描时，检测到交谈。 当拾取构件在拾取构件移动穿过盘轨道时跳过某个轨道时，检测到跟踪误差信号。 改进的装置和方法基于检测到的串扰量可以确定包络信号的最小值和最大值之间的比率来确定书写密度。 改进的装置和方法还将作为高频模拟信号的跟踪误差信号转换为数字信号，该数字信号用于计算拾取构件跳跃某个轨道所需的时间。 基于与参考值进行比较的计算时间，也可以确定盘的写入密度。

    System for testing hard disk drives
    6.
    发明授权
    System for testing hard disk drives 失效
    硬盘驱动器测试系统

    公开(公告)号：US06169413A

    公开(公告)日：2001-01-02

    申请号：US08854723

    申请日：1997-05-12

    申请人： Woon-Juk Paek ,  Jeong-Min Kang ,  Dae-Geun Ryoo ,  Young-Bok Sung ,  Chang-Woo Nam

    发明人： Woon-Juk Paek ,  Jeong-Min Kang ,  Dae-Geun Ryoo ,  Young-Bok Sung ,  Chang-Woo Nam

    IPC分类号： G01R3102

    CPC分类号： G06F11/2221 ,  G01R31/2849 ,  G06F11/24 ,  G11B27/36

    摘要： A system for multi-testing a number of hard disk drives (HDDs) comprises a burn-in chamber of high temperature for orderly stacking the HDDs in rows and columns, a control chamber thermally insulated from the burn-in chamber by a partition wall for detachably mounting a plurality of HDD test computers in rows and columns electrically connected with the HDDs with each HDD test computer testing corresponding ones of said HDDs, and a host computer for controlling an internal environment of the burn-in chamber and operation of the HDD test computers.

    摘要翻译： 用于多个测试多个硬盘驱动器（HDD）的系统包括一个高温老化室，用于以行和列顺序堆叠HDD;控制室，其通过分隔壁与老化室隔热， 每个HDD测试计算机测试对应的所述HDD，以及主计算机，用于控制老化室的内部环境和HDD测试的操作，可拆卸地将多个HDD测试计算机安装在与HDD电连接的行和列中 电脑。

    MULTI INDUCTIVELY COUPLED PLASMA REACTOR AND METHOD THEREOF
    8.
    发明申请
    MULTI INDUCTIVELY COUPLED PLASMA REACTOR AND METHOD THEREOF 审中-公开
    多电感耦合等离子体反应器及其方法

    公开(公告)号：US20110204023A1

    公开(公告)日：2011-08-25

    申请号：US12715522

    申请日：2010-03-02

    申请人： No-Hyun Huh ,  Gyoo-Dong Kim ,  Chang-Woo Nam ,  Sung-Min Park ,  Dae-Kyu Choi

    发明人： No-Hyun Huh ,  Gyoo-Dong Kim ,  Chang-Woo Nam ,  Sung-Min Park ,  Dae-Kyu Choi

    IPC分类号： C23F1/00 ,  C23F1/08

    CPC分类号： H01J37/32165 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32449

    摘要： Disclosed is a multi-inductively coupled plasma reactor and method thereof. In a multi-inductively coupled plasma reacting method, an etching method to increase a specific portion of a substrate to be processed includes etching a specific portion of a substrate to be processed; and depositing a passivation layer on a surface of the specific portion etched, wherein the etching and depositing steps are repeatedly proceeded, and one of both steps is executed when there is plasma formed by a central plasma source and a peripheral plasma source. According to the multi-inductively coupled plasma reactor and method thereof of the invention, it is possible that plasma is uniformly processed on the entire area of the substrate since the central plasma source and the peripheral source are provided separately. Further, it is possible to form an independent multiple plasma area without electrical interference in the plasma reactor using the interference prevention electrode grounded between the central plasma source and the peripheral plasma source. Further, the plasma formed by the central plasma source and the peripheral plasma source is used to deeply etch a specific portion of the substrate to be processed.

    摘要翻译： 公开了一种多电感耦合等离子体反应器及其方法。 在多电感耦合等离子体反应方法中，用于增加要处理的衬底的特定部分的蚀刻方法包括蚀刻要处理的衬底的特定部分; 以及在蚀刻的特定部分的表面上沉积钝化层，其中反复进行蚀刻和沉积步骤，并且当存在由中心等离子体源和外围等离子体源形成的等离子体时，执行两个步骤之一。 根据本发明的多电感耦合等离子体反应器及其方法，由于中心等离子体源和外围源分别设置，因此可以在衬底的整个区域上均匀地处理等离子体。 此外，可以使用在中心等离子体源和外围等离子体源之间接地的防干扰电极在等离子体反应器中形成无电干扰的独立多等离子体区域。 此外，由中央等离子体源和外围等离子体源形成的等离子体用于深刻蚀刻待处理衬底的特定部分。

    Tester for peripheral storage device
    9.
    发明授权
    Tester for peripheral storage device 失效
    外围存储设备测试仪

    公开(公告)号：US6124707A

    公开(公告)日：2000-09-26

    申请号：US931124

    申请日：1997-09-16

    申请人： Jin-euk Kim ,  Dae-geun Yoo ,  Chang-woo Nam

    发明人： Jin-euk Kim ,  Dae-geun Yoo ,  Chang-woo Nam

    IPC分类号： G11B5/00 ,  G11B33/08 ,  G11B33/12 ,  H01R11/00

    CPC分类号： G11B33/128 ,  G11B33/08

    摘要： A tester for a peripheral storage device including a peripheral storage device guide received in a mobile rest which is translatable relative to a base frame. The peripheral storage device, which, when translated by the guide, connects with pogo-connectors installed in a supporting block on the base frame. The mobile rest includes a pusher for moving the mobile rest relative to the base frame, as damped by a damper.

    摘要翻译： 一种用于外围存储设备的测试器，包括接收在可移动休息区中的外围存储设备指南，其可相对于基架移动。 外围存储装置当被引导件翻转时与安装在基架上的支撑块中的pogo连接器连接。 移动支架包括用于相对于基架移动移动支架的推动器，由阻尼器阻尼。