公开(公告)号：US4361761A

公开(公告)日：1982-11-30

申请号：US167242

申请日：1980-07-10

Applicant: James R. Treglio

Inventor： James R. Treglio

IPC: H01J3/02 ,  H01J27/02 ,  H01J33/00 ,  H01S1/00

CPC classification number: H01J27/02 ,  H01J3/02 ,  H01J33/00

Abstract: A method and apparatus for merging electrons and ions in a neutralizer region where both are of equal intensity and velocity and directing the beam at a target to be destroyed. The region for merging the beams comprises a plurality of circular electrodes formed in a convex overlapping configuration with circular apertures for receiving ions from a ion source. A separate set of accelerator-decelerator electrodes is positioned to merge the electron beam into the ions in the beam merging region. After the beam leaves the beam merging region it enters an elongated axial magentic field which compresses the beam as it is directed to an object to be destroyed.This device may be housed in a satellite capable of being transported into space and moved within a kill radius of an object. The beam density is determined by the choice of ion species and by merging the beams in a low interaction energy environment.

Abstract translation: 一种用于在中和器区域中并入电子和离子的方法和装置，其中两者具有相同的强度和速度，并且将光束引导到目标被破坏。 用于合流梁的区域包括形成为具有圆形孔的凸起重叠构型的多个圆形电极，用于从离子源接收离子。 放置一组单独的加速器 - 减速电极以将电子束合并到束合并区域中的离子。 在光束离开光束合并区域之后，它进入细长的轴向磁场，当它被定向到要被破坏的物体时，其将压缩光束。 该装置可以容纳在能够被运送到空间中并在物体的杀死半径内移动的卫星中。 光束密度由离子种类的选择和通过在低相互作用能量环境中合并光束来确定。

公开(公告)号：US5317235A

公开(公告)日：1994-05-31

申请号：US35309

申请日：1993-03-22

Applicant: James R. Treglio

Inventor： James R. Treglio

IPC: C23C14/32 ,  H01J27/14 ,  H01J27/22 ,  H01J37/317 ,  H01J7/24

CPC classification number: H01J27/22 ,  C23C14/325 ,  H01J27/14 ,  H01J37/3178 ,  H01J2237/022

Abstract: A cathodic arc metal deposition apparatus that prevents the deposition of metal droplets with the metal ions being deposited. The cathode has an annular configuration. An annular solenoidal magnet is positioned adjacent to the cathode with their central openings in alignment. The opening diameters and spacings of the cathode and magnet is such that no line of sight exists between the cathode and a target to be coated. Preferably, the arc is initiated between the cathode and an annular anode located around the cathode, separated from the cathode by an insulating layer. The arc is initiated by a high voltage pulse formed between a trigger electrode ring within the cathode opening and the cathode. In an alternative embodiment, a plurality of individual cathodes are positioned in a circle in place of the single ring electrode. The anode may surround the set of cathodes, or may be a screen between the cathodes and the magnet. A multi-screen extractor is preferably provided to direct ions toward the target.

Abstract translation: 一种阴极电弧金属沉积装置，其防止金属液滴与金属离子沉积沉积。 阴极具有环形构型。 环形螺线管磁体位于与阴极相邻并且其中心开口对准的位置。 阴极和磁体的开口直径和间距使得阴极和待涂覆的靶之间不存在视线。 优选地，电弧在阴极和位于阴极周围的环形阳极之间开始，通过绝缘层与阴极分离。 电弧由在阴极开口内的触发电极环和阴极之间形成的高压脉冲引发。 在替代实施例中，多个单独的阴极被定位成圆形代替单个环形电极。 阳极可以围绕该组阴极，或者可以是阴极和磁体之间的屏幕。 优选提供多筛提取器以将离子引向靶。

公开(公告)号：US5089707A

公开(公告)日：1992-02-18

申请号：US612589

申请日：1990-11-14

Applicant: Gustav D. Magnuson ,  Joseph F. Tooker ,  James R. Treglio

Inventor： Gustav D. Magnuson ,  Joseph F. Tooker ,  James R. Treglio

IPC: H01J27/02 ,  H01J27/08 ,  H01J27/22 ,  H01J37/067 ,  H01J37/08

CPC classification number: H01J27/08 ,  H01J27/022 ,  H01J27/22

Abstract: An ion generating apparatus utilizing a vacuum chamber with an anode and multiple, selectively operable, cathodes in the chamber. The vacuum chamber is grounded and all but the cathode or cathodes selected for use are grounded to the chamber. The anode is a high-transparency screen, preferably formed from a copper alloy. The cathodes are preferably arranged in a generally circular array, parallel to each other, so that any can be fired by a single trigger cathode assembly positioned adjacent to the array. A linear feed mechanism for moving any cathode toward the anode as cathode material is consumed may be provided.

公开(公告)号：US5896012A

公开(公告)日：1999-04-20

申请号：US908985

申请日：1997-08-08

Applicant: Jun Munemasa ,  Alexander Elkind ,  James R Treglio

Inventor： Jun Munemasa ,  Alexander Elkind ,  James R Treglio

IPC: C23C14/24 ,  C23C14/32 ,  H01J27/04 ,  H01J37/32 ,  H05B31/026 ,  H01J7/24

CPC classification number: H01J37/32055 ,  C23C14/325 ,  H01J27/04 ,  H01J37/3266

Abstract: When a trigger discharge between a metal cathode and a trigger ring induces a vacuum-arc discharge between the cathode an anode, which vaporizes the substances of the cathode surface to produce a metal ion plasma, setting the pulse length of the arc pulse applied between the cathode and the anode to 1 msec or longer will soon short-circuit between the cathode and the trigger ring due to the vaporized substances deposited on the surface of the insulating ring. In order to solve this problem, a permanent magnet 36 for forming a magnetic field across a space between the anode 26 and the cathode 34 is provided close to the rear side of the trigger ring 35 so as to guide the substances vaporized from the cathode 34 toward the anode 26. Thereby, a longer continuous operation can be done with setting the arc pulse longer. moreover, since the permanent magnet 36 is provided at the foregoing position, the magnet does not receive a thermal load by the vacuum-arc discharge, which maintains a stable operation and makes the total construction compact.

Abstract translation: 当金属阴极和触发环之间的触发放电在阴极和阴极表面的物质蒸发以产生金属离子等离子体的阴极之间引起真空电弧放电时，设置施加在金属阴极和触发环之间的电弧脉冲的脉冲长度 阴极和阳极至1毫秒或更长时间将由于沉积在绝缘环表面上的汽化物质而在阴极和触发环之间短路。 为了解决这个问题，在触发环35的后侧附近设置用于在阳极26和阴极34之间的空间形成磁场的永磁体36，以引导从阴极34蒸发的物质 从而可以通过更长时间地设置电弧脉冲来进行更长的连续操作。 此外，由于永久磁铁36设置在上述位置，所以磁体不会受到真空电弧放电的热负荷的影响，从而保持了稳定的动作，使总体结构紧凑。

公开(公告)号：US5306408A

公开(公告)日：1994-04-26

申请号：US905342

申请日：1992-06-29

Applicant: James R. Treglio

Inventor： James R. Treglio

IPC: C23C14/32 ,  H01J37/32

CPC classification number: H01J37/32055 ,  C23C14/325

Abstract: A method and apparatus for coating high temperature resistant, electrically-conductive, ceramic compounds, such as titanium carbides and diborides, onto an organic substrate, which may be an organic resin matrix composite. The apparatus basically comprises a vacuum arc plasma generator, a high-voltage insulated substrate holding table and a plasma channel. The plasma generator includes a vacuum chamber having a cylindrical cathode of the material to be deposited, surrounded by a ceramic insulator which is in turn surrounded by a metal trigger ring in contact with a trigger electrode. When a vacuum arc discharge is initiated, a plasma flows outwardly from the cathode through a hole in an adjacent anode and into a drift tube. The drift tube has a plurality of magnets around the tube exterior to push the plasma away from the tube, maintain a uniform plasma density and guide the plasma towards a substrate on a movable high voltage insulated substrate support. The cathode material is nearly 100% ionized, giving the ions impinging on the organic substrate sufficient kinetic energy to react with and adhere tightly to the target substrate without additional heating. The amount of kinetic energy is controllable to provide the selected degree of substrate surface ion mixing with the coating elements.

Abstract translation: 一种用于将耐高温导电的陶瓷化合物如碳化钛和二硼化物涂覆到有机基底上的方法和装置，其可以是有机树脂基质复合材料。 该装置基本上包括真空电弧等离子体发生器，高压绝缘基板保持台和等离子体通道。 等离子体发生器包括具有待沉积材料的圆柱形阴极的真空室，该陶瓷绝缘体被陶瓷绝缘体包围，陶瓷绝缘体又由与触发电极接触的金属触发环围绕。 当启动真空电弧放电时，等离子体从阴极向外流过相邻阳极中的孔并进入漂移管。 漂移管具有围绕管外部的多个磁体，以将等离子体推离管，保持均匀的等离子体密度并将等离子体引向可移动的高电压绝缘基板支撑件上的基板。 阴极材料几乎100％离子化，使离子在有机衬底上碰撞足够的动能，与靶衬底反应并紧密粘合，无需额外加热。 动能量是可控的，以提供与涂层元件的选定程度的基底表面离子混合。

公开(公告)号：US5859500A

公开(公告)日：1999-01-12

申请号：US908981

申请日：1997-08-08

Applicant: Jun Munemasa ,  Alexander Elkind ,  James R Treglio

Inventor： Jun Munemasa ,  Alexander Elkind ,  James R Treglio

IPC: C23C14/24 ,  H01J37/32 ,  H05H1/00

CPC classification number: H01J37/32055

Abstract: In an apparatus in which a vacuum-arc discharge is generated between a metal cathode and anode plate and an evaporated substance from the cathode is supplied through openings on the anode plate, conventionally, a cleaning work to remove metal films deposited on the edges of the openings has to be done periodically, which limits continuous operation. The apparatus relating to the invention is provided with a rotary anode plate 14 on which a plurality of openings 17 are formed on a circumference concentric with the rotary axis of the anode plate. As the anode plate 14 rotates, the openings 17 are designed to come into a position to face the cathode. This construction can continue a longer operation with an extremely low deterioration of the performance without a maintenance work requiring a relief of the vacuum.

Abstract translation: 在金属阴极和阳极板之间产生真空电弧放电并且通过阳极板上的开口供给来自阴极的蒸发物质的装置中，通常，用于除去沉积在阳极板的边缘上的金属膜的清洁工作 必须定期进行开孔，这限制了连续的操作。 本发明的装置设置有旋转阳极板14，多个开口17形成在与阳极板的旋转轴线同心的圆周上。 当阳极板14旋转时，开口17被设计成进入与阴极相对的位置。 这种结构可以持续更长的操作，其性能极低的劣化，而不需要减轻真空的维护工作。

公开(公告)号：US5296714A

公开(公告)日：1994-03-22

申请号：US905350

申请日：1992-06-29

Applicant: James R. Treglio

Inventor： James R. Treglio

IPC: H01J27/08 ,  H01J27/22 ,  H01J49/42

CPC classification number: H01J27/08 ,  H01J27/22

Abstract: A method and apparatus for modifying the inner surface of a tube by ion surface modification techniques, such as ion implantation, ion mixing and ion beam assisted coating. The apparatus includes a plasma source, preferably a vacuum arc, a first magnet for guiding the plasma into a drift tube. A second magnet is spaced from the first magnet and has a current running opposite to the first magnet. A radial extractor surrounds the area between the magnets, which form a cusp therebetween. The plasma follows the field lines, exiting the drift tube to the extractor, where the ions are removed and accelerated outwardly in a radial direction. With the entire apparatus placed in a tube, the ions will impact the inner wall of the tube. The resulting ion implantation advantageously modifies the surface, typically increasing wear and erosion resistance, improving corrosion resistance, increasing fatigue life, etc. The apparatus may be used to coat the tube interior with the cathode material by operating the extractor at a lower voltage or omitting the extractor. The apparatus may be inserted in tubes and moved along the tube to treat the walls of very long tubes.

Abstract translation: 一种用于通过离子表面改性技术（例如离子注入，离子混合和离子束辅助涂覆）来改变管的内表面的方法和装置。 该装置包括等离子体源，优选为真空电弧，用于将等离子体引导到漂移管中的第一磁体。 第二磁体与第一磁体间隔开并且具有与第一磁体相反的电流。 径向提取器围绕磁体之间的区域，在它们之间形成一个尖点。 等离子体遵循场线，离开漂移管到提取器，其中离子被移除并沿径向向外加速。 当整个设备放置在管中时，离子将冲击管的内壁。 所得的离子注入有利地改变表面，通常增加耐磨性和耐冲蚀性，改善耐腐蚀性，增加疲劳寿命等。该装置可用于通过以较低的电压或省略操作提取器将管内部涂覆于阴极材料 提取器。 该装置可以插入管中并沿管移动以处理非常长的管的壁。