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    STANDARD RECTANGULAR WAVEGUIDE WITH RF PORT INPUT TRANSITION
    1.
    发明公开
    STANDARD RECTANGULAR WAVEGUIDE WITH RF PORT INPUT TRANSITION 审中-公开

    公开(公告)号：US20240319244A1

    公开(公告)日：2024-09-26

    申请号：US18472858

    申请日：2023-09-22

    Applicant: KOREA INSTITUTE OF FUSION ENERGY

    Inventor： Hyun Ho WI ,  Son Jong WANG

    IPC: G01R27/32 ,  H01P5/16

    CPC classification number: G01R27/32 ,  H01P5/16

    Abstract: Disclosed herein is a waveguide with an RF port input transition. The waveguide includes: a tubular rectangular body having openings formed at opposite sides thereof, each of the openings having a flange therearound; multiple isolator ports formed at predetermined intervals in one wall of the rectangular body, the isolator ports each being switchable between open and closed states; multiple impedance matching ports formed at predetermined intervals in another wall of the rectangular body opposite the one wall, the impedance matching ports each being switchable between open and closed states; and a radiator port formed at a center of the one wall of the rectangular body.

    MODULE FOR MEASURING CURRENT/VOLTAGE/POWER OF PLASMA APPARATUS AND PLASMA APPARATUS INCLUDING THE SAME
    2.
    发明公开
    MODULE FOR MEASURING CURRENT/VOLTAGE/POWER OF PLASMA APPARATUS AND PLASMA APPARATUS INCLUDING THE SAME 审中-公开

    公开(公告)号：US20240266156A1

    公开(公告)日：2024-08-08

    申请号：US18427460

    申请日：2024-01-30

    Applicant: KOREA INSTITUTE OF FUSION ENERGY

    Inventor： Jongsik KIM

    IPC: H01J37/32 ,  H01P5/18 ,  H03H7/01 ,  H03H7/06

    CPC classification number: H01J37/3299 ,  H01J37/32091 ,  H01J37/321 ,  H01P5/182 ,  H03H7/06 ,  H03H7/1791 ,  H01J2237/24564

    Abstract: Provided is a module for measuring current/voltage/power of a plasma apparatus, which includes a process chamber having a sealed processing space in which plasma is formed to process a substrate; a substrate support unit disposed in the processing space and on which a substrate is seated; and a gas injection unit configured to inject gas for performing a process in the processing space, wherein, in a substrate processing apparatus configured to process the substrate by applying RF power to the process chamber, the gas support unit, and the gas injection unit, the module for measuring current/voltage/power of the plasma apparatus is disposed adjacent to at least one application line among a first power application line for applying the RF power and a ground line for grounding to measure a RF voltage, current, and power of an input wave and a reflected wave generated by plasma generated in the processing space.

    PLASMA GENERATION DEVICE
    4.
    发明公开
    PLASMA GENERATION DEVICE 审中-公开

    公开(公告)号：US20230328871A1

    公开(公告)日：2023-10-12

    申请号：US18020059

    申请日：2021-08-06

    Applicant: Korea Institute of Fusion Energy

    Inventor： Dong Hun SHIN ,  Yong Cheol HONG ,  Se Min CHUN ,  Geon Woo YANG ,  Hee Jae LEE

    IPC: H05H1/34

    CPC classification number: H05H1/3423

    Abstract: Disclosed is a plasma generation device. A plasma generation device, according to an exemplary embodiment of the present invention, comprises: an electromagnetic wave generator; a plasma torch which generates plasma by arc discharge; and a waveguide which guides an electromagnetic wave generated by the electromagnetic wave generator to be transmitted to the plasma side, wherein the electromagnetic wave transmitted through the waveguide heats one side portion of the plasma.

    WINDOW FOR PLASMA OES DIAGNOSIS, AND PLASMA APPARATUS USING SAME
    7.
    发明申请
    WINDOW FOR PLASMA OES DIAGNOSIS, AND PLASMA APPARATUS USING SAME 有权

    公开(公告)号：US20220230858A1

    公开(公告)日：2022-07-21

    申请号：US17595928

    申请日：2020-05-28

    Applicant: KOREA INSTITUTE OF FUSION ENERGY

    Inventor： Kang Il LEE ,  Yong Sup CHOI ,  Young Woo KIM ,  Jong Sik KIM

    IPC: H01J37/32

    Abstract: Disclosed is a window device for diagnosis of plasma OES (Optical Emission Spectroscopy). The window device includes a housing including a first chamber and a second chamber horizontally adjacent to each other; a connection opening defined in one face of the housing and between the first chamber and the second chamber, wherein the connection opening faces toward an opening through which light of plasma from a plasma chamber is exposed to the connection opening; an observation window opening defined in an opposite face of the housing opposite to the connection opening, wherein the observation window opening is coaxial with the connection opening, wherein the light of the plasma transmits through the observation window opening, and is incident to a light receiver of an OES sensor; an observation window positioned inside the observation window opening and in the housing; a winder and a rewinder installed in the first chamber and the second chamber, respectively; and a transparent film moving, in a roll-to-roll manner, from the rewinder to the winder while covering an inner face of the connection opening in the housing.

    Window for plasma OES diagnosis, and plasma apparatus using same
    8.
    发明授权
    Window for plasma OES diagnosis, and plasma apparatus using same 有权

    公开(公告)号：US12154769B2

    公开(公告)日：2024-11-26

    申请号：US17595928

    申请日：2020-05-28

    Applicant: KOREA INSTITUTE OF FUSION ENERGY

    Inventor： Kang Il Lee ,  Yong Sup Choi ,  Young Woo Kim ,  Jong Sik Kim

    IPC: H01J37/32

    Abstract: A window device for diagnosis of plasma OES (Optical Emission Spectroscopy), is disclosed and includes a housing including a first chamber and a second chamber horizontally adjacent to each other; a connection opening defined in one face of the housing and between the first and second chambers, the connection opening faces toward an opening through which light of plasma from a plasma chamber is exposed to the connection opening; an observation window opening defined in an opposite face of the housing opposite to the connection opening, the observation window opening is coaxial with the connection opening, the light of the plasma transmits through the observation window opening, and is incident to a light receiver of an OES sensor; an observation window positioned inside the observation window opening and in the housing; a winder and a rewinder installed in the first and second chambers, respectively; and a transparent film.

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