公开(公告)号：US20240266156A1

公开(公告)日：2024-08-08

申请号：US18427460

申请日：2024-01-30

Applicant: KOREA INSTITUTE OF FUSION ENERGY

Inventor： Jongsik KIM

IPC: H01J37/32 ,  H01P5/18 ,  H03H7/01 ,  H03H7/06

CPC classification number: H01J37/3299 ,  H01J37/32091 ,  H01J37/321 ,  H01P5/182 ,  H03H7/06 ,  H03H7/1791 ,  H01J2237/24564

Abstract: Provided is a module for measuring current/voltage/power of a plasma apparatus, which includes a process chamber having a sealed processing space in which plasma is formed to process a substrate; a substrate support unit disposed in the processing space and on which a substrate is seated; and a gas injection unit configured to inject gas for performing a process in the processing space, wherein, in a substrate processing apparatus configured to process the substrate by applying RF power to the process chamber, the gas support unit, and the gas injection unit, the module for measuring current/voltage/power of the plasma apparatus is disposed adjacent to at least one application line among a first power application line for applying the RF power and a ground line for grounding to measure a RF voltage, current, and power of an input wave and a reflected wave generated by plasma generated in the processing space.

公开(公告)号：US20180040938A1

公开(公告)日：2018-02-08

申请号：US15231084

申请日：2016-08-08

Applicant: Rohde & Schwarz GmbH & Co. KG

Inventor： Christopher DOLL ,  Ludwig MOLL

IPC: H01P5/18

CPC classification number: H01P5/182

Abstract: A directional coupler is described comprising two housing parts which define at least two hollow conductors and a separation wall positioned between both hollow conductors. Said separation wall comprises several holes ensuring a coupling of the at least two hollow conductors. Said several holes are arranged in two rows in an alternating manner such that a galvanic connection of both housing parts is provided between each neighbored holes. Further, a combiner is described.

公开(公告)号：US09337919B2

公开(公告)日：2016-05-10

申请号：US13697210

申请日：2011-05-11

Applicant: Hidekazu Kikuchi ,  Takayuki Mogi ,  Yoshiyuki Akiyama ,  Hirofumi Kawamura

Inventor： Hidekazu Kikuchi ,  Takayuki Mogi ,  Yoshiyuki Akiyama ,  Hirofumi Kawamura

IPC: H04B7/00 ,  H04B7/24 ,  H01P3/12 ,  H01P5/107 ,  H04B3/56 ,  H01R13/66 ,  H01R103/00 ,  H01R13/6461 ,  H01R24/28 ,  H01R24/76 ,  H05K1/02

CPC classification number: H01P5/02 ,  H01P1/208 ,  H01P3/12 ,  H01P3/121 ,  H01P3/165 ,  H01P5/024 ,  H01P5/082 ,  H01P5/087 ,  H01P5/1022 ,  H01P5/107 ,  H01P5/18 ,  H01P5/182 ,  H01P5/188 ,  H01R13/6461 ,  H01R13/665 ,  H01R24/28 ,  H01R24/76 ,  H01R2103/00 ,  H04B3/56 ,  H04B7/24 ,  H05K1/0225 ,  H05K1/0239 ,  H05K2201/093 ,  H05K2201/09672 ,  H05K2201/0969 ,  H05K2201/09754

Abstract: A signal transmission system including: a first connector apparatus, and a second connector apparatus that is coupled with the first connector apparatus. The first connector apparatus and the second connector apparatus are coupled together to form an electromagnetic field coupling unit, and a transmission object signal is converted into a radio signal, which is then transmitted through the electromagnetic field coupling unit, between the first connector apparatus and the second connector apparatus.

Abstract translation: 一种信号传输系统，包括：第一连接器装置和与第一连接器装置耦合的第二连接器装置。 第一连接器装置和第二连接器装置耦合在一起以形成电磁场耦合单元，并且传输对象信号被转换成无线电信号，然后通过电磁场耦合单元在第一连接器装置和 第二连接器装置。

公开(公告)号：US08598966B2

公开(公告)日：2013-12-03

申请号：US13472231

申请日：2012-05-15

Applicant: Noel Lopez ,  Charles Woods ,  Rob Zienkewicz ,  Jon Filreis

Inventor： Noel Lopez ,  Charles Woods ,  Rob Zienkewicz ,  Jon Filreis

IPC: H01P5/12

CPC classification number: H01P5/024 ,  H01P5/182 ,  H03F3/602

Abstract: In general, in accordance with an exemplary aspect of the present invention, an electrical system configured to use power combining of microwave signals, such as those from monolithic microwave integrated circuits or MMICs is provided. In one exemplary embodiment, the system of the present invention further comprises a low loss interface that the circuits are directly connected to. In another exemplary embodiment, the circuits are connected to a pin which is connected to the low loss interface. In yet another exemplary embodiment of the present invention, a multi-layer power amplifier is provided that comprises two or more chassis and circuits attached to impedance matching interfaces according to the present invention. This multi-layered power amplifier is configured to amplify an energy signal and have a significantly reduced volume compared to existing power combiners.

Abstract translation: 通常，根据本发明的示例性方面，提供了一种配置为使用诸如来自单片微波集成电路或MMIC的微波信号的组合的功率的电气系统。 在一个示例性实施例中，本发明的系统还包括电路直接连接到的低损耗接口。 在另一个示例性实施例中，电路连接到连接到低损耗接口的引脚。 在本发明的另一个示例性实施例中，提供了一种多层功率放大器，其包括两个或多个根据本发明的阻抗匹配接口的底板和电路。 该多层功率放大器被配置为放大能量信号并且与现有功率组合器相比具有显着减小的体积。

公开(公告)号：US08324983B2

公开(公告)日：2012-12-04

申请号：US12901760

申请日：2010-10-11

Applicant: Ronald J. Brandau

Inventor： Ronald J. Brandau

IPC: H01P3/12 ,  H01P5/12

CPC classification number: H01P5/182

Abstract: A waveguide coupler is provided with a trough portion with a first trough and a second trough. A coupling slot between the inner sidewalls of the first and second troughs communicates between the first trough and the second trough. A cover closes the first trough and the second trough to form first and second waveguides. The cover includes a protrusion surface with protrusions extending into the first trough and the second trough. The protrusions form a stepped ridge with a plurality of steps in height, if desired, lateral position. The steps are provided with a maximum inward extension and a minimum lateral distance from the coupling slot at a center step proximate a center of the coupling slot. The coupler is selectable between a high coupling level and a low coupling level by exchanging the cover applied to the trough portion between a flat surface and the protrusion surface.

Abstract translation: 波导耦合器设置有具有第一槽和第二槽的槽部分。 第一和第二槽的内侧壁之间的连接槽在第一槽和第二槽之间连通。 盖封闭第一槽和第二槽以形成第一和第二波导。 所述盖包括具有延伸到所述第一槽和所述第二槽中的突起的突出表面。 如果需要，突起形成具有多个高度台阶的阶梯状脊，横向位置。 在靠近联接槽的中心的中心台阶处，台阶设置有最大向内延伸和距离联接槽的最小横向距离。 通过交换在平坦表面和突出表面之间施加到槽部分的盖，可以在高耦合水平和低耦合水平之间选择耦合器。

公开(公告)号：US07973616B2

公开(公告)日：2011-07-05

申请号：US12405979

申请日：2009-03-17

Applicant: Tetsu Shijo ,  Shuichi Obayashi

Inventor： Tetsu Shijo ,  Shuichi Obayashi

IPC: H01P5/12 ,  H01P3/12

CPC classification number: H01P5/182 ,  H01P3/121

Abstract: A short slot directional coupler includes a dielectric substrate having both surfaces each covered by a metal film, a first via-hole string and a second via-hole string, each of which has via-holes penetrating through the substrate, and formed so that a distance between the first via-hole string and the second via-hole string is narrow at a center of a length direction of the string and wider along directions of both ends of the string, and a pair of third via-hole strings each having via-holes penetrating through the substrate, and formed between parts adjacent to both ends of the first via-hole string and parts adjacent to both ends of the second via-hole string to form a first post-wall waveguide along with the first via-hole string and a second post-wall waveguide along with the second via-hole string.

Abstract translation: 短槽定向耦合器包括具有各自被金属膜覆盖的两个表面的电介质基板，第一通孔孔线和第二通孔孔线，每个孔具有穿过基板的通孔，并且形成为使得 第一通孔孔和第二通孔孔之间的距离在绳的长度方向的中心处窄，并且沿着绳的两端的方向较宽，并且一对第三通孔孔串具有通孔 穿过基板的孔，并且形成在与第一通孔孔列的两端相邻的部分和与第二通孔孔列的两端相邻的部分之间，以形成与第一通孔相连的第一后壁波导 弦和第二后壁波导以及第二通孔串。

公开(公告)号：US07671700B1

公开(公告)日：2010-03-02

申请号：US10502079

申请日：2003-01-23

Applicant: Uwe Rosenberg ,  Konstantinos Beis

Inventor： Uwe Rosenberg ,  Konstantinos Beis

IPC: H01P5/18 ,  H01P5/02

CPC classification number: H01P5/182 ,  F16F7/104

Abstract: A hollow waveguide directional coupler comprises two hollow waveguide sections that are coupled to each other by a plurality of coupling openings formed in a wall extending between the hollow waveguide sections. Two adjacent coupling openings have a distance of 3λg/4. from each other, λg being the wavelength of the nominal center frequency of the operating frequency range of the directional coupler.

Abstract translation: 中空波导定向耦合器包括两个中空波导部分，其通过形成在延伸在中空波导部分之间的壁中的多个联接开口彼此耦合。 两个相邻的联接开口具有3λg/ 4的距离。 彼此之间，λg是定向耦合器的工作频率范围的标称中心频率的波长。

公开(公告)号：US20070252759A1

公开(公告)日：2007-11-01

申请号：US11415321

申请日：2006-05-01

Applicant: Theresa Brunasso ,  John Voss ,  David Finch ,  Wyman Williams ,  Christopher Burton

Inventor： Theresa Brunasso ,  John Voss ,  David Finch ,  Wyman Williams ,  Christopher Burton

IPC: G01S3/16

CPC classification number: H01Q21/064 ,  H01P5/182

Abstract: A compact system can use modular components to enhance the isolation or quality of signals that an antenna array produces. The system can comprise an array of input coupler modules and an array of output coupler modules respectively on the input and output sides of a signal routing device. Each input coupler module can receive a signal from a specific element in the antenna array and can divide or split that received signal into a multiple signal components, such as seven. The signal routing device can route each of those signal components to a different output coupler module in the array of output coupler modules. Thus, each output coupler module can receive and combine multiple signal components, such as seven, from different input coupler modules. The signal routing device can include a readily manufacturable phase trimming section to compensate for phase mismatches.

Abstract translation: 紧凑型系统可以使用模块化组件来增强天线阵列产生的信号的隔离或质量。 该系统可以包括分别在信号路由设备的输入和输出侧上的输入耦合器模块阵列和输出耦合器模块阵列。 每个输入耦合器模块可以从天线阵列中的特定元件接收信号，并且可以将该接收信号划分或分割成多个信号分量，例如七个。 信号路由设备可以将这些信号分量中的每一个路由到输出耦合器模块阵列中的不同输出耦合器模块。 因此，每个输出耦合器模块可以从不同的输入耦合器模块接收和组合诸如七个的多个信号分量。 信号路由设备可以包括容易制造的相位修整部分，以补偿相位不匹配。

公开(公告)号：US06919776B1

公开(公告)日：2005-07-19

申请号：US10128187

申请日：2002-04-23

Applicant: Arnold Möbius ,  Robert Lawrence Ives

Inventor： Arnold Möbius ,  Robert Lawrence Ives

IPC: H01P5/12 ,  H01P5/18

CPC classification number: H01P5/182

Abstract: A traveling wave device for the combining or splitting of symmetric and asymmetric traveling wave energy includes a feed waveguide for traveling wave energy, the feed waveguide having an input port and a launching port, a reflector for coupling wave energy between the feed waveguide and a final waveguide for the collection and transport of wave energy to or from the reflector. The power combiner has a launching port for symmetrical waves which includes a cylindrical section coaxial to the feed waveguide, and a launching port for asymmetric waves which includes a sawtooth rotated about a central axis.

Abstract translation: 用于组合或分离对称和不对称行波能量的行波装置包括用于行波能量的馈送波导，馈电波导具有输入端口和发射端口，用于耦合馈电波导和最终馈波波导之间的波能量的反射器 波导，用于将波能量收集和传输到反射器。 功率组合器具有用于对称波的发射端口，其包括与馈电波导同轴的圆柱形部分，以及包括围绕中心轴线旋转的锯齿波的不对称波的发射端口。

公开(公告)号：US06894476B2

公开(公告)日：2005-05-17

申请号：US10439476

申请日：2003-05-15

Applicant: Russell Wyse ,  Haki Cebi ,  Terry J. Shie

Inventor： Russell Wyse ,  Haki Cebi ,  Terry J. Shie

IPC: G01R21/01 ,  G01R21/12 ,  H01P5/18 ,  G01R23/04 ,  H01P5/12

CPC classification number: H03G3/3042 ,  G01R21/01 ,  G01R21/12 ,  H01P5/182

Abstract: An exemplary coupler detector circuit comprises a coupler, a detector circuit, and a harmonic tank. The coupler has a transmission line electromagnetically coupled to a coupled line, and the coupled line has an isolated node and a coupled node. The transmission line may, for example, be a 50 ohm RF line for transmitting RF energy. The detector circuit is connected to the coupled node and is configured to detect a power transmitted along the transmission line. The harmonic tank is connected to the coupled node, and is configured to short to ground at least one harmonic signal transmitted along the coupled node.

Abstract translation: 示例性耦合器检测器电路包括耦合器，检测器电路和谐波容器。 耦合器具有电磁耦合到耦合线路的传输线，耦合线路具有隔离节点和耦合节点。 传输线可以例如是用于发送RF能量的50欧姆RF线。 检测器电路连接到耦合节点，并且被配置为检测沿着传输线传输的功率。 谐波箱连接到耦合节点，并且被配置为沿着耦合节点传输的至少一个谐波信号接地。