Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus
    1.
    发明授权
    Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus 有权
    用于驱动光学偏转装置阵列的方法,光学偏转装置阵列,光学偏转装置和图像投影显示装置

    公开(公告)号:US08014058B2

    公开(公告)日:2011-09-06

    申请号:US12146067

    申请日:2008-06-25

    IPC分类号: G02B26/12 G02B26/00

    摘要: A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

    摘要翻译: 公开了一种用于驱动光学偏转装置阵列的方法,包括在一系列用于光偏转操作的处理中,至少第一级写入和记录数据的状态,用于指示板构件倾斜方向在 第一倾斜方向或第二倾斜方向,形成在所述多个光学偏转装置中的每一个正下方或相邻的半导体存储器件中; 第二级的状态基于数据的指示,并且偏转光,将任意的光学偏转装置的板构件的倾斜方向切换到第一倾斜方向; 以及第三级的状态,根据数据的指示和偏转光将任意光学偏转装置的板状部件的倾斜方向切换到第二倾斜方向。

    OPTICAL DEFLECTING DEVICE, OPTICAL DEFLECTING DEVICE MANUFACTURING METHOD, AND OPTICAL PROJECTING DEVICE
    2.
    发明申请
    OPTICAL DEFLECTING DEVICE, OPTICAL DEFLECTING DEVICE MANUFACTURING METHOD, AND OPTICAL PROJECTING DEVICE 失效
    光学偏转装置,光学偏转装置的制造方法和光学投影装置

    公开(公告)号:US20070206268A1

    公开(公告)日:2007-09-06

    申请号:US11681021

    申请日:2007-03-01

    IPC分类号: G02B26/00 A61B3/00

    CPC分类号: G02B26/0841

    摘要: Bearing portions having an approximately arc shape are provided on a lower surface of a plate-shaped member. In the bearing portions, stoppers of a regulating member are embedded. With the engagement of the lower surface of the plate-shaped member and the apex of a pivot member and the engagement of an inner surface of the bearing portions and a lower surface of the stoppers, the plate-shaped member is rotatably supported with the apex of the pivot member as a center. With a side surface of the regulating member 109 facing a side surface of the bearing portions, the position of the plate-shaped member in a rotation axis direction is regulated.

    摘要翻译: 具有大致圆弧形状的轴承部分设置在板状构件的下表面上。 在轴承部中嵌入有限制部件的止动件。 通过板状构件的下表面和枢转构件的顶点的接合以及支承部分的内表面和止动件的下表面的接合,板形构件可旋转地支撑有顶点 枢轴构件为中心。 在调节构件109的面对轴承部的侧面的侧面,限制板状构件在旋转轴方向上的位置。

    Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus
    3.
    发明申请
    Method for driving optical deflecting device array, optical deflecting device array, optical deflecting device, and image projection displaying apparatus 有权
    用于驱动光学偏转装置阵列的方法,光学偏转装置阵列,光学偏转装置和图像投影显示装置

    公开(公告)号:US20060109539A1

    公开(公告)日:2006-05-25

    申请号:US11265206

    申请日:2005-11-03

    IPC分类号: G02B26/00

    摘要: A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

    摘要翻译: 公开了一种用于驱动光学偏转装置阵列的方法,包括在一系列用于光偏转操作的处理中,至少第一级写入和记录数据的状态,用于指示板构件倾斜方向在 第一倾斜方向或第二倾斜方向,形成在所述多个光学偏转装置中的每一个正下方或相邻的半导体存储器件中; 第二级的状态基于数据的指示,并且偏转光,将任意的光学偏转装置的板构件的倾斜方向切换到第一倾斜方向; 以及第三级的状态,根据数据的指示和偏转光将任意光学偏转装置的板状部件的倾斜方向切换到第二倾斜方向。

    Actuator, and actuator array
    4.
    发明授权
    Actuator, and actuator array 有权
    执行器和执行器阵列

    公开(公告)号:US07777935B2

    公开(公告)日:2010-08-17

    申请号:US11776305

    申请日:2007-07-11

    CPC分类号: G02B26/0841 G02B26/101

    摘要: An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power or resolution.

    摘要翻译: 公开了一种致动器,其具有小于光刻技术的加工极限的接触部分,并且能够在操作期间减小接触部件的接触面积或接触长度,减少由接触引起的粘附力并减小驱动 执行器的电压。 致动器包括与操作部件接触的操作部件和接触部件。 接触部分通过在第二图案的端部上重叠第一图案而形成。 第一图案具有固体结构,并且第二图案上的第一图案的实心结构的上部的尺寸小于处理分辨率或分辨率。

    METHOD FOR DRIVING OPTICAL DEFLECTING DEVICE ARRAY, OPTICAL DEFLECTING DEVICE ARRAY, OPTICAL DEFLECTING DEVICE, AND IMAGE PROJECTION DISPLAYING APPARATUS
    5.
    发明申请
    METHOD FOR DRIVING OPTICAL DEFLECTING DEVICE ARRAY, OPTICAL DEFLECTING DEVICE ARRAY, OPTICAL DEFLECTING DEVICE, AND IMAGE PROJECTION DISPLAYING APPARATUS 有权
    用于驱动光学偏转装置阵列的方法,光学偏转装置阵列,光学偏转装置和图像投影显示装置

    公开(公告)号:US20080278782A1

    公开(公告)日:2008-11-13

    申请号:US12146067

    申请日:2008-06-25

    IPC分类号: G02B26/08 G02B3/00

    摘要: A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

    摘要翻译: 公开了一种用于驱动光学偏转装置阵列的方法,包括在一系列用于光偏转操作的处理中,至少第一级写入和记录数据的状态,用于指示板构件倾斜方向在 第一倾斜方向或第二倾斜方向,形成在所述多个光学偏转装置中的每一个正下方或相邻的半导体存储器件中; 第二级的状态基于数据的指示,并且偏转光,将任意的光学偏转装置的板构件的倾斜方向切换到第一倾斜方向; 以及第三级的状态,根据数据的指示和偏转光将任意光学偏转装置的板状部件的倾斜方向切换到第二倾斜方向。

    ACTUATOR, METHOD OF PRODUCING THE SAME, OPTICAL SYSTEM, AND IMAGE FORMING DEVICE
    6.
    发明申请
    ACTUATOR, METHOD OF PRODUCING THE SAME, OPTICAL SYSTEM, AND IMAGE FORMING DEVICE 有权
    执行器,其制造方法,光学系统和图像形成装置

    公开(公告)号:US20080018982A1

    公开(公告)日:2008-01-24

    申请号:US11776305

    申请日:2007-07-11

    IPC分类号: G02B26/00 C25F3/00

    CPC分类号: G02B26/0841 G02B26/101

    摘要: An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure, and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power.

    摘要翻译: 公开了一种致动器,其具有小于光刻技术的加工极限的接触部分,并且能够在操作期间减小接触部件的接触面积或接触长度,减少由接触引起的粘附力并减小驱动 执行器的电压。 致动器包括与操作部件接触的操作部件和接触部件。 接触部分通过在第二图案的端部上重叠第一图案而形成。 第一图案具有坚实的结构,并且第二图案上的第一图案的实心结构的上部的尺寸小于处理分辨率。

    Optical deflecting device, optical deflecting device manufacturing method, and optical projecting device
    7.
    发明授权
    Optical deflecting device, optical deflecting device manufacturing method, and optical projecting device 失效
    光学偏转装置,光学偏转装置的制造方法以及光学投影装置

    公开(公告)号:US07277217B1

    公开(公告)日:2007-10-02

    申请号:US11681021

    申请日:2007-03-01

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0841

    摘要: Bearing portions having an approximately arc shape are provided on a lower surface of a plate-shaped member. In the bearing portions, stoppers of a regulating member are embedded. With the engagement of the lower surface of the plate-shaped member and the apex of a pivot member and the engagement of an inner surface of the bearing portions and a lower surface of the stoppers, the plate-shaped member is rotatably supported with the apex of the pivot member as a center. With a side surface of the regulating member 109 facing a side surface of the bearing portions, the position of the plate-shaped member in a rotation axis direction is regulated.

    摘要翻译: 具有大致圆弧形状的轴承部分设置在板状构件的下表面上。 在轴承部中嵌入有限制部件的止动件。 通过板状构件的下表面和枢转构件的顶点的接合以及支承部分的内表面和止动件的下表面的接合,板形构件可旋转地支撑有顶点 枢轴构件为中心。 在调节构件109的面对轴承部的侧面的侧面,限制板状构件在旋转轴方向上的位置。

    Optical deflecting device, optical deflecting device array, method for driving the optical deflecting device and image projection display apparatus using the device
    9.
    发明授权
    Optical deflecting device, optical deflecting device array, method for driving the optical deflecting device and image projection display apparatus using the device 有权
    光学偏转装置,光学偏转装置阵列,用于驱动光学偏转装置的方法和使用该装置的图像投影显示装置

    公开(公告)号:US07480090B2

    公开(公告)日:2009-01-20

    申请号:US11582995

    申请日:2006-10-19

    IPC分类号: G02B26/00 G02B26/08

    CPC分类号: G02B26/0841

    摘要: An optical deflecting device includes a plate-like member having a light reflective area and a conductor layer. The plate-like member rotates with substantially the middle portion thereof made a fulcrum to change an inclination direction thereof and thereby a reflection direction of a light flux incident to the light reflective area is changed. A first electrode group and a second electrode group are arranged so as to oppose the conductor layer of the plate-like member, respectively, and to sandwich a position corresponding to a position of the fulcrum of the plate-like member. Each electrode group includes a control electrode controlling starting of the plate-like member and a drive electrode driving the plate-like member.

    摘要翻译: 光学偏转装置包括具有光反射区域和导体层的板状构件。 板状构件以其大致中部旋转,作为支点而改变其倾斜方向,从而改变入射到光反射区域的光束的反射方向。 第一电极组和第二电极组分别布置成与板状构件的导体层相对,并且夹持与板状构件的支点的位置相对应的位置。 每个电极组包括控制板状构件起动的控制电极和驱动板状构件的驱动电极。

    Light deflector, light deflection array, image forming apparatus, and image projection display apparatus
    10.
    发明授权
    Light deflector, light deflection array, image forming apparatus, and image projection display apparatus 有权
    光偏转器,光偏转阵列,图像形成装置和图像投影显示装置

    公开(公告)号:US07417778B2

    公开(公告)日:2008-08-26

    申请号:US11098700

    申请日:2005-04-05

    IPC分类号: G02B26/08 G02B26/00

    CPC分类号: G02B26/0841

    摘要: A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area with a plate shape member and other members. More particularly, a frictional force and fixing strength are reduced at a contact area with a control member deployed around a plate shape member and the plate shape member. The fixing strength is reduced at a contact area with a fulcrum member and the plate shape member. Also, the fixing strength is reduced at a contact area with a substrate (or an insulation layer on a substrate) and the plate shape member.

    摘要翻译: 通过减小与板状构件和其他构件的接触面积,可以通过低电压驱动光偏转器。 通过减小与板状构件和其他构件的接触面积,可以通过低电压驱动光偏转器。 更具体地,在与围绕板状构件和板状构件配置的控制构件的接触区域处,摩擦力和固定强度降低。 在与支点构件和板形构件的接触区域处,固定强度降低。 此外,在与基板(或基板上的绝缘层)和板形构件的接触区域处,固定强度降低。