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    Single substrate load lock with offset cool module and buffer chamber
    2.
    发明授权
    Single substrate load lock with offset cool module and buffer chamber 失效
    单个衬底加载锁定，带偏置冷却模块和缓冲室

    公开(公告)号：US06530732B1

    公开(公告)日：2003-03-11

    申请号：US09084457

    申请日：1998-05-26

    申请人： Victor J. Theriault ,  Mark Ives

    发明人： Victor J. Theriault ,  Mark Ives

    IPC分类号： B65G1133

    CPC分类号： H01L21/67751 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/139

    摘要： A load lock and related method of handling a substrate involves placing a substrate onto a vertically movable poppet and moving the poppet between two vertically opposed subchambers such that in moving the poppet toward one of the subchambers, that subchamber is sealed to atmosphere. The two subchamber system allows one substrate to be placed into a buffer and another substrate to be cooled at the same time. Also, the system allows for a slow vacuum to be made on the substrate in a subchamber to avoid undesirably loading the substrate by the otherwise immediate drop in pressure.

    摘要翻译： 负载锁定和处理衬底的相关方法涉及将衬底放置在可垂直移动的提升阀上并将提升阀移动到两个垂直相对的副室之间，使得在将提升阀朝向子室中的一个移动时，该子室被密封到大气中。 两个子室系统允许一个衬底被放置在缓冲器中，另一个衬底被同时被冷却。 此外，该系统允许在子室中在基板上进行缓慢的真空，以避免由于其它的即时压力下降而不期望地加载基板。

    Dual plate gas assisted heater module
    7.
    发明授权
    Dual plate gas assisted heater module 有权
    双板气辅助加热器模块

    公开(公告)号：US06231289B1

    公开(公告)日：2001-05-15

    申请号：US09559720

    申请日：2000-04-26

    申请人： Victor J. Theriault ,  Mark Ives

    发明人： Victor J. Theriault ,  Mark Ives

    IPC分类号： B65G1133

    CPC分类号： H01L21/67751 ,  H01L21/67167 ,  H01L21/6719 ,  H01L21/67196

    摘要： A dual plate gas assisted heater module having a vertically movable poppet movable between an upper and a lower subchamber has a passive heating feature which preheats a substrate prior to introducing it into a subchamber for active heating.

    摘要翻译： 具有可在上部和下部子室之间移动的可垂直移动的提升阀的双板气体辅助加热器模块具有被动加热特征，其在将基板引入到用于主动加热的子室之前预热基板。