摘要:
Adamantane derivates which can be material compounds of a polymer excellent in etching resistance and having improved transmittance to light having a short wavelength,represented by the formula (2A″) wherein Y1F is a fluorine atom or a hydroxyl group.
摘要:
A novel perfluoropolyether derivative which is less likely to undergo decomposition, which is free from a problem of deterioration during its use, and which is useful as a lubricating oil or a coating agent, is provided.A compound represented by the following formula (1): HO—(CH2CH2O)r. (CH2CH(OH)CH2O)p—CH2CF2O(CF2CF2O)mCF2CH2O——(CH2CH(OH)CH2O)q. (CH2CH2O)s—H Formula (1) wherein m represents an integer of from 3 to 200, and each of p, q, r and s which are independent of one another, represents an integer of from 0 to 100, provided that when each of p, q, r and s which are independent of one another, is an integer of at least 1, the arrangement of —(CH2CH2O)— and —(CH2CH(OH)CH2O)— units is not particularly limited, and when one of r and p is an integer of at least 2 and the other is an integer of at least 1, or when one of q and s is an integer of at least 2 and the other is an integer of at least 1, these units may be arranged in a block form or at random.
摘要:
A novel perfluoropolyether derivative which is less likely to undergo decomposition, which is free from a problem of deterioration during its use, and which is useful as a lubricating oil or a coating agent, is provided.A compound represented by the following formula (1): HO—(CH2CH2O)r.(CH2CH(OH)CH2O)p—CH2CF2O(CF2CF2O)mCF2CH2O——(CH2CH(OH)CH2O)q.(CH2CH2O)s—H Formula (1) wherein m represents an integer of from 3 to 200, and each of p, q, r and s which are independent of one another, represents an integer of from 0 to 100, provided that when each of p, q, r and s which are independent of one another, is an integer of at least 1, the arrangement of —(CH2CH2O)— and —(CH2CH(OH)CH2O)— units is not particularly limited, and when one of r and p is an integer of at least 2 and the other is an integer of at least 1, or when one of q and s is an integer of at least 2 and the other is an integer of at least 1, these units may be arranged in a block form or at random.
摘要:
The present invention provides a process for producing compounds useful as raw materials for various fluororesins in high yields in few steps from inexpensive and readily available starting materials.The following compound (1) and the following compound (2) are reacted to form the following compound (3), then the compound (3) is fluorinated in a liquid phase to form the following compound (4), and the ester bonds in the compound (4) are dissociated to form the compound (5), or the compound (5) and the compound (6). HOCH2-Q-O—(CH2)3—OH (1), CRBCOX (2), RBCOOCH2-Q-O—(CH2)3—OCORB (3), RBFCOOCF2-QF-O—(CF2)3—OCORBF (4), FCO-QF-O—(CF2)2—COF (5), RBFCOF (6).
摘要:
To provide a resist protective film material for immersion lithography.An alkali soluble resist protective film material for immersion lithography, which comprises a polymer (F) containing repeating units (FU) formed by polymerizing a polymerizable compound (fm) having a fluorine-containing bridged cyclic structure. For example, repeating units (FU) are repeating units formed by polymerizing a compound (f) selected from the group consisting of the following formulae (f1) to (f4) (RF represents H, F, a C1-3 alkyl group or a C1-3 fluoroalkyl group, and XF represents F, OH or CH2OH.)
摘要翻译:提供用于浸没光刻的抗蚀保护膜材料。 一种用于浸渍光刻的碱溶性抗蚀剂保护膜材料,其包含通过聚合具有含氟桥连环状结构的可聚合化合物(fm)形成的重复单元(FU)的聚合物(F)。 例如,重复单元(FU)是通过使从下述式(f1)〜(f4)中选择的化合物(f)聚合形成的重复单元(RF表示H,F,C1-3烷基或 C 3氟烷基,X F表示F,OH或CH 2 OH)
摘要:
The present invention provides a process A1 for producing a compound (5A), which comprises fluorinating a compound (3A-1) by liquid phase fluorination to a compound (4A-1), followed by a decomposition reaction of an ester bond; a process A2 for producing a compound (5A), which comprises fluorinating a compound (3A-2) by liquid phase fluorination to a compound (4A-2), followed by a decomposition reaction of an ester bond; and a process B for producing a compound (5B), which comprises fluorinating a compound (3B) by liquid phase fluorination to a compound (4B), followed by hydrolysis or alcoholysis. Further, the present invention provides a compound (5A) wherein n is 2 to 4, and a compound (5B) wherein n is 3 or 4. A(—CH2—OCO—R)n (3A-1) Af(—CF2—OCO—Rf)n (4A-1) A(—COOR)n (3A-2) Af(—COORf)n (4A-2) Af(—COF)n (5A) A(—OCO—R)n (3B) Af(—OCO—Rf)n (4B) Af(—OH)n (5B) provided that the carbon atom in adamantane to which —OCO—Rf is bonded, is a tertiary carbon atom, A is a n-valent group having n hydrogen atoms in adamantane converted to connecting bonds, R is a fluorinated monovalent organic group, n is an integer of from 1 to 4, Af is a group having at least one of hydrogen atoms in the group A substituted by a fluorine atom, and Rf is a fluorinated monovalent organic group.
摘要:
Adamantane derivates which can be material compounds of a polymer excellent in etching resistance and having improved transmittance to light having a short wavelength, are produced by an economically advantageous process from readily available materials.A compound (10) is subjected to esterification reaction with a compound (11) to obtain a compound (12), which is subjected to fluorination in a liquid phase to obtain a compound (13), which is then subjected to hydrolysis or alcoholysis to obtain a compound (2), which is then reacted with a compound (15) thereby to obtain a compound (1). Here, A to J are —CFH— or —CF2—; RF is a perfluoroalkyl group or the like; X10 is F or the like; Y2 is H or OH; Y3 is H or RFCOO—; Y4 is H, F or RFCOO—; Y5 is H, F, RFCOO— or OH; Y0 is H, F, —OCOCR1═CH2 or OH: R1 is a hydrogen atom, a methyl group or the like; and X11 is OH or a halogen atom:
摘要翻译:金刚烷衍生物可以通过从容易获得的材料的经济上有利的方法产生耐蚀性优异且具有改善的具有短波长的光的透射率的聚合物的材料化合物。 化合物(10)与化合物(11)进行酯化反应,得到化合物(12),将其进行液相氟化,得到化合物(13),然后进行水解或醇解 得到化合物(2),然后与化合物(15)反应,得到化合物(1)。 这里,A至J为-CFH-或-CF 2 - R F是全氟烷基等; X 10是F等; Y 2是H或OH; Y 3是H或R 0 COO-; Y 4是H,F或R“COO-; H 5是H,F,R F CO或O-; Y 0是H,F,-OCOCR 1 -CH 2或OH:R 1是氢原子 ,甲基等; 并且X 11是OH或卤素原子:
摘要:
A fluorosulfonyl group-containing compound having a high polymerization reactivity, a process for its production, a sulfonyl group-containing polymerizable monomer led from the sulfonyl group-containing compound, and a polymer obtainable by polymerizing the sulfonyl group-containing polymerizable monomer
摘要:
A novel perfluoropolyether derivative which is less likely to undergo decomposition, which is free from a problem of deterioration during its use, and which is useful as a lubricating oil or a coating agent, is provided. A compound represented by the following formula (1): HO—(CH2CH2O)r•(CH2CH(OH)CH2O)p—CH2CF2O(CF2CF2O)mCF2CH2O—(CH2CH(OH)CH2O)q•(CH2CH2O)s—H Formula (1) wherein m represents an integer of from 3 to 200, and each of p, q, r and s which are independent of one another, represents an integer of from 0 to 100, provided that when each of p, q, r and s which are independent of one another, is an integer of at least 1, the arrangement of —(CH2CH2O)— and —(CH2CH(OH)CH2O)— units is not particularly limited, and when one of r and p is an integer of at least 2 and the other is an integer of at least 1, or when one of q and s is an integer of at least 2 and the other is an integer of at least 1, these units may be arranged in a block form or at random.
摘要:
Adamantane derivates which can be material compounds of a polymer excellent in etching resistance and having improved transmittance to light having a short wavelength, are produced by an economically advantageous process from readily available materials. A compound (10) is subjected to esterification reaction with a compound (11) to obtain a compound (12), which is subjected to fluorination in a liquid phase to obtain a compound (13), which is then subjected to hydrolysis or alcoholysis to obtain a compound (2), which is then reacted with a compound (15) thereby to obtain a compound (1). Here, A to J are —CFH— or —CF2—; RF is a perfluoroalkyl group or the like; X10 is F or the like; Y2 is H or OH; Y3 is H or RFCOO—; Y4 is H, F or RFCOO—; Y5 is H, F, RFCOO— or OH; Y0 is H, F, —OCOCR1═CH2 or OH: R1 is a hydrogen atom, a methyl group or the like; and X11 is OH or a halogen atom:
摘要翻译:金刚烷衍生物可以通过从容易获得的材料的经济上有利的方法产生耐蚀性优异且具有改善的具有短波长的光的透射率的聚合物的材料化合物。 化合物(10)与化合物(11)进行酯化反应,得到化合物(12),将其进行液相氟化,得到化合物(13),然后进行水解或醇解 得到化合物(2),然后与化合物(15)反应,得到化合物(1)。 这里,A至J为-CFH-或-CF 2 - RF是全氟烷基等; X 10是F等; Y 2是H或OH; Y 3是H或R 0 COO-; Y 4是H,F或R“COO-; H 5是H,F,R F CO或O-; Y 0是H,F,-OCOCR 1 -CH 2或OH:R 1是氢原子 ,甲基等; 并且X 11是OH或卤素原子: