Fluoroadamantane derivative, fluorine-containing polymer and production method
    5.
    发明授权
    Fluoroadamantane derivative, fluorine-containing polymer and production method 失效
    氟金刚烷衍生物,含氟聚合物及其制备方法

    公开(公告)号:US07649065B2

    公开(公告)日:2010-01-19

    申请号:US12091846

    申请日:2006-10-25

    IPC分类号: C08F18/20

    摘要: To provide a novel fluoroadamantane derivative, a novel polymerizable fluoroadamantane derivative and a novel fluoropolymer, and processes for production thereof. To provide the following compound (3), the following compound (4), a polymer obtained by polymerizing the compound (4) and processes for production thereof: provided that Q represents —CHF— or —CF2— (provided that six Qs may be the same or different), Z represents —H, —F or —CH2OH (provided that three Zs may be the same or different), W represents —H or a C1-10 hydrocarbon group, R represents —H, —F, —CH3 or —CF3, and J represents —H, —F, —CHWOH or —CHWOCOCR═CH2 (provided that three Js may be the same or different).

    摘要翻译: 提供新的氟金刚烷衍生物,新型聚合性氟金刚烷衍生物和新型含氟聚合物及其制备方法。 为了提供以下化合物(3),以下化合物(4),通过使化合物(4)聚合而得到的聚合物及其制造方法:Q表示-CHF-或-CF2-(只要6个Q可以 相同或不同),Z表示-H,-F或-CH 2 OH(条件是三个Z可以相同或不同),W表示-H或C1-10烃基,R表示-H,-F, - CH 3或-CF 3,并且J表示-H,-F,-CHWOH或-CHWOCOCR-CH 2(条件是三个可以相同或不同)。

    Pellicle and novel fluoropolymer
    9.
    发明授权
    Pellicle and novel fluoropolymer 有权
    薄膜和新型含氟聚合物

    公开(公告)号:US07790811B2

    公开(公告)日:2010-09-07

    申请号:US11446242

    申请日:2006-06-05

    IPC分类号: C08F114/18

    摘要: A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.

    摘要翻译: 对于短波长的光(具有193nm的照射波长的ArF准分子激光和具有157nm的照射波长的F2准分子激光)的透明性和耐久性优异的有用氟聚合物,例如, 防护薄膜组件,其中用于防护薄膜和/或粘合剂的聚合物(I)是基本上含有以下含氟原子的单元(1)的聚合物,其中形成聚合物主链的链包含碳原子 和醚性氧原子,形成主链的至少一个碳原子是形成环状基团的碳原子,形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。