EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    1.
    发明申请
    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
    曝光装置和装置制造方法

    公开(公告)号:US20120200836A1

    公开(公告)日:2012-08-09

    申请号:US13449041

    申请日:2012-04-17

    IPC分类号: G03B27/52

    CPC分类号: G03F7/70883 G03F7/70341

    摘要: An exposure apparatus exposes a substrate by forming a liquid immersion region on the substrate, and projecting a pattern image onto the substrate via a projection optical system and a liquid that forms the liquid immersion region. The exposure apparatus includes a projection optical system having a plurality of optical elements, by which a pattern image is projected onto a substrate via a liquid to expose the substrate and a liquid recovery system that recovers the liquid along with a gas and has a separator that separates the recovered liquid and the recovered gas.

    摘要翻译: 曝光装置通过在基板上形成液浸区域来露出基板,并通过投影光学系统和形成液浸区域的液体将图案图像投影到基板上。 曝光装置包括具有多个光学元件的投影光学系统,通过该投影光学系统,通过液体将图案图像投影到基板上以露出基板,以及与气体一起回收液体的液体回收系统,并且具有分离器 分离回收的液体和回收的气体。

    CONNECTOR HAVING A PLUG ARRANGED ABOVE A PLATE-LIKE TERMINAL
    2.
    发明申请
    CONNECTOR HAVING A PLUG ARRANGED ABOVE A PLATE-LIKE TERMINAL 有权
    具有安装在板状端子上的插头的连接器

    公开(公告)号:US20110250799A1

    公开(公告)日:2011-10-13

    申请号:US13083679

    申请日:2011-04-11

    IPC分类号: H01R24/00

    CPC分类号: H01R13/112

    摘要: A connector includes first and second connector parts to be connected to each other. A plate-like terminal provided in the first connector part is maintained at a power supply voltage or a ground potential. A plug connected to a signal line is supported by a first insulation part provided on the plate like terminal. The plug includes a protrusion part protruding from the first insulation part. A first terminal is configured by a plate spring supported by a second insulation part provided in the second connector part. The first terminal has an extreme end part to be engaged with a side surface of the protrusion part when the first and second connector parts are connected to each other. A second terminal for power supply or ground is supported by the second insulation part to contact with the plate-like terminal when the first and second connector parts are connected to each other.

    摘要翻译: 连接器包括彼此连接的第一和第二连接器部件。 设置在第一连接器部分中的板状端子保持在电源电压或接地电位。 连接到信号线的插头由设置在板状端子上的第一绝缘部分支撑。 插头包括从第一绝缘部突出的突出部。 第一端子由设置在第二连接器部分中的由第二绝缘部支撑的板簧构成。 当第一和第二连接器部分彼此连接时,第一端子具有与突出部分的侧表面接合的极端部分。 当第一和第二连接器部件彼此连接时,第二绝缘部件支撑用于电源或接地的第二端子与板状端子接触。

    Exposure apparatus and device manufacturing method
    3.
    发明授权
    Exposure apparatus and device manufacturing method 有权
    曝光装置和装置制造方法

    公开(公告)号:US07508490B2

    公开(公告)日:2009-03-24

    申请号:US11325474

    申请日:2006-01-05

    IPC分类号: G03B27/42 G03B27/52

    CPC分类号: G03F7/70883 G03F7/70341

    摘要: An exposure apparatus exposes a substrate by forming a liquid immersion region on the substrate, and projecting a pattern image onto the substrate via a projection optical system and a liquid that forms the liquid immersion region. The exposure apparatus includes: a liquid supply mechanism that has a supply port arranged to oppose a surface of the substrate; and a buffer space formed in a channel of the liquid supply mechanism; wherein the liquid is supplied to the supply port after reserving a prescribed amount or more of liquid in the buffer space.

    摘要翻译: 曝光装置通过在基板上形成液浸区域来露出基板,并通过投影光学系统和形成液浸区域的液体将图案图像投影到基板上。 曝光装置包括:液体供给机构,其具有与基板的表面相对配置的供给口; 以及形成在所述液体供给机构的通道中的缓冲空间; 其中在缓冲空间中保留规定量以上的液体之后将液体供给到供给口。

    Exposure apparatus, exposure method, and method for producing device
    4.
    发明申请
    Exposure apparatus, exposure method, and method for producing device 有权
    曝光装置,曝光方法和制造装置的方法

    公开(公告)号:US20070222957A1

    公开(公告)日:2007-09-27

    申请号:US11802060

    申请日:2007-05-18

    IPC分类号: G03B27/42

    CPC分类号: G03B27/42 G03F7/70341

    摘要: A lithographic projection projects a pattern from a patterning device onto a substrate through a liquid confined to a space adjacent the substrate. The space is smaller in plan than the substrate. The apparatus includes a plate substantially parallel to the substrate to divide the space into two parts, the plate having an aperture to allow transmission of the pattern onto the substrate.

    摘要翻译: 光刻投影通过限制在与衬底相邻的空间的液体将图案从图案形成装置投影到衬底上。 平面上的空间比底物小。 该装置包括基本上平行于基板的板,以将空间分成两部分,该板具有孔,以允许将图案传输到基板上。

    Exposure apparatus and device manufacturing method

    公开(公告)号:US20060176456A1

    公开(公告)日:2006-08-10

    申请号:US11325474

    申请日:2006-01-05

    IPC分类号: G03B27/42

    CPC分类号: G03F7/70883 G03F7/70341

    摘要: An exposure apparatus exposes a substrate by forming a liquid immersion region on the substrate, and projecting a pattern image onto the substrate via a projection optical system and a liquid that forms the liquid immersion region. The exposure apparatus includes: a liquid supply mechanism that has a supply port arranged to oppose a surface of the substrate; and a buffer space formed in a channel of the liquid supply mechanism; wherein the liquid is supplied to the supply port after reserving a prescribed amount or more of liquid in the buffer space.

    Connector and electronic component
    7.
    发明授权
    Connector and electronic component 失效
    连接器和电子元件

    公开(公告)号:US06345999B1

    公开(公告)日:2002-02-12

    申请号:US09706855

    申请日:2000-11-07

    IPC分类号: H01R1122

    CPC分类号: H01R13/193

    摘要: A connector and an electronic component not damaged by connections to the connector are provided. The connector includes a pair of contacts attached to a base of the case, and an actuator. The actuator includes two slat members laid on one top of the other. Free ends of the pair of contacts are positioned in contact holes of the slat members. The contacts initially stand upright before an operation of the actuator. When the slat members are slid in opposite directions, the free ends of the contacts move further apart. After inserting the substrate terminal of the electronic component in between the free ends and releasing the actuator, the contacts try to resume their initial position because of their flexibility, and, as a result, securely hold the terminal.

    摘要翻译: 提供连接器和未连接到连接器而损坏的电子部件。 连接器包括附接到壳体的基部的一对触点和致动器。 致动器包括放置在另一顶部的两个板条构件。 一对触点的自由端位于板条构件的接触孔中。 在执行机构的操作之前,触头最初直立。 当板条构件沿相反的方向滑动时,触头的自由端进一步分开。 在将电子部件的基板端子插入自由端之间并释放致动器之后,触点由于其灵活性而尝试恢复其初始位置,并且因此牢固地保持端子。

    Connector employing liquid conductor for electrical contact
    8.
    发明授权
    Connector employing liquid conductor for electrical contact 失效
    连接器采用液体导体进行电接触

    公开(公告)号:US5779492A

    公开(公告)日:1998-07-14

    申请号:US788699

    申请日:1997-01-24

    摘要: A first contact member comprises a liquid conductor which comes into contact with a second contact member so as to establish the electric connection between the two contact members. A container contains the first contact member therein. The second contact member is pin-shaped. The container is tube-shaped and has a containing portion, which is filled with the liquid conductor, and has an opening through which the second contact member is inserted. An area contraction portion for contracting the cross sectional area of the container is formed at a position between the containing portion and the opening. The container is installed in a through hole provided in a base member. The container includes a pipe member of an electric conductor which comes into direct contact with the liquid conductor and a plug member to be inserted into the hole, before the pipe member is inserted, for preventing the liquid conductor from escaping from the container. The container is formed of elastic material. The portion of the container near to the opening is split into segments and portions of the segments are positioned away from each other as the portions are near to the opening so that the outer diameter of the segments is larger than the inner diameter of the hole before the container is installed into the hole, the segments approaching each other as the container is being inserted into the hole against the elastic force of the segments.

    摘要翻译: 第一接触构件包括与第二接触构件接触以便建立两个接触构件之间的电连接的液体导体。 容器中包含第一接触构件。 第二接触构件是针形。 容器是管状的,并且具有填充有液体导体的容纳部分,并且具有插入第二接触构件的开口。 用于收缩容器的横截面积的区域收缩部分形成在容纳部分和开口之间的位置处。 容器安装在设置在基座构件中的通孔中。 容器包括在插入管构件之前与液体导体直接接触的电导体的管构件和插入孔中的插塞构件,以防止液体导体从容器中逸出。 容器由弹性材料形成。 容器的靠近开口的部分被分割成段,并且部分的部分彼此远离彼此,因为部分靠近开口,使得段的外径大于孔的内径 容器被安装到孔中,当容器相对于段的弹力被插入到孔中时,段彼此接近。

    Apparatus for driving a lens
    9.
    发明授权
    Apparatus for driving a lens 失效
    用于驱动镜头的装置

    公开(公告)号:US5636062A

    公开(公告)日:1997-06-03

    申请号:US165316

    申请日:1993-12-13

    IPC分类号: G02B7/04 G02B7/02

    CPC分类号: G02B7/04

    摘要: Disclosed is an apparatus for driving a lens, having first and second movable lens groups movable along an optic-axis direction, a crank member for moving the first and second movable lens groups along the optic-axis direction in a predetermined mutual relationship, a first moving member for moving the first movable lens group along the optic-axis direction by a force received from the crank member, a second moving member for moving the second movable lens group along the optic-axis direction by the force received by the crank member and a compensating device, disposed between the second movable lens group and the second moving member, for compensating a deviation quantity of the second movable lens group from a predetermined moving quantity.

    摘要翻译: 公开了一种用于驱动具有沿着光轴方向移动的第一和第二可移动透镜组的透镜的装置,用于以预定的相互关系沿着光轴方向移动第一和第二可移动透镜组的曲柄构件,第一 移动构件,用于通过从曲柄构件接收的力沿着光轴方向移动第一可移动透镜组;第二移动构件,用于通过由曲柄构件接收的力沿着光轴方向移动第二可移动透镜组;以及 补偿装置,设置在所述第二可移动透镜组和所述第二移动构件之间,用于将所述第二可移动透镜组的偏移量从预定移动量补偿。

    Connector employing liquid conductor for electrical contact
    10.
    发明授权
    Connector employing liquid conductor for electrical contact 失效
    连接器采用液体导体进行电接触

    公开(公告)号:US5626484A

    公开(公告)日:1997-05-06

    申请号:US261926

    申请日:1994-06-17

    摘要: A first contact member comprises a liquid conductor which comes into contact with a second contact member so as to establish the electric connection between the two contact members. A container contains the first contact member therein. The second contact member is pin-shaped. The container is tube-shaped and has a containing portion, which is filled with the liquid conductor, and has an opening through which the second contact member is inserted. An area contraction portion for contracting the cross sectional area of the container is formed at a position between the containing portion and the opening. The container is installed in a through hole provided in a base member. The container includes a pipe member of an electric conductor which comes into direct contact with the liquid conductor and a plug member to be inserted into the hole, before the pipe member is inserted, for preventing the liquid conductor from escaping from the container. The container is formed of elastic material. The portion of the container near to the opening is split into segments and portions of the segments are positioned away from each other as the portions are near to the opening so that the outer diameter of the segments is larger than the inner diameter of the hole before the container is installed into the hole, the segments approaching each other as the container is being inserted into the hole against the elastic force of the segments.

    摘要翻译: 第一接触构件包括与第二接触构件接触以便建立两个接触构件之间的电连接的液体导体。 容器中包含第一接触构件。 第二接触构件是针形。 容器是管状的,并且具有填充有液体导体的容纳部分,并且具有插入第二接触构件的开口。 用于收缩容器的横截面积的区域收缩部分形成在容纳部分和开口之间的位置处。 容器安装在设置在基座构件中的通孔中。 容器包括在插入管构件之前与液体导体直接接触的电导体的管构件和插入孔中的插塞构件,以防止液体导体从容器中逸出。 容器由弹性材料形成。 容器的靠近开口的部分被分割成段,并且部分的部分彼此远离彼此,因为部分靠近开口,使得段的外径大于孔的内径 容器被安装到孔中,当容器相对于段的弹力被插入到孔中时,段彼此接近。